A model for preventive maintenance operations and forecasting

Equipment costs constitute the greatest majority of overall costs for semiconductor manufacturing. Therefore, maintaining high equipment availability has been regarded as one of the major goals in the industry. The ability to forecast correctly equipment preventive maintenance (PM) timing requirements not only can help optimizing equipment uptime but also minimizing negative impacts on manufacturing production efficiency. This research used grey theory and evaluation diagnosis to construct a PM forecasting model for prediction of PM timing of various machines. The results showed significant improvements of PM timing predictions compared to the existing method based on experience and an alternative method proposed by Li and Chang (Semiconductor Manufacturing Technology Workshop 2002: 10–11, pp. 275–277) for the same fab cases. Received: June 2005 / Accepted: December 2005     

Time Characterization of High Density Gas Jet from a Pulsed Supersonic Nozzle via Laser Produced Plasma

A high-density gas jet supersonic nozzle is reported in this paper. The jitter and actuation time of the nozzle is determined by the pin discharge and laser spark radiation respectively. The jitter time of the nozzle is within 10μs with the backing pressure as high as 25 bar. With a nanosecond laser pulse focused on the gas jet about 1 mm below the nozzle, the actuation time is calculated to be about 15 ms by detecting the laser produced spark radiation, which reveals the existence of the gas jet and the relative gas density evolving with time. Consequently the gas density is estimated to be well above 10^19 cm^-3, compared with theoretical simulations from the nozzle parameters.     

InP基应变补偿结构偏振不灵敏半导体光放大器制作的研究

为了制备偏振不灵敏的半导体光放大器(SOA)，将有源区设计为由4个压应变、3个张应变阱层及晶格匹配的垒层InGaAsP交替组合而成的应变补偿结构。器件做成带有倾角的扇形脊形波导结构，避免了常规制作SOA的复杂工艺。对样品3在80～125mA电流范围内，获得了偏振灵敏度≤0．6dB．最小可达0．1dB；较大的电流范围内FWHM值为40nm。     

激光武器对抗效能指标体系研究

武器系统的效能是规划、研制、配置和部署武器系统的基本依据,是评价武器系统优劣最重要的综合性指标,建立正确的效能指标体系是进行效能分析与评价的前提。在详细研究了激光武器对抗机理、效能指标选用原则的基础上,构建了相对完整的激光武器对抗效能指标体系结构,并提出了在不同作战任务下量度激光武器对抗能力的效能定义。     

机车大功率整流管试验台的研制

本文基于计算机技术和现代测量技术，介绍了一种虚拟仪器-机车大功率整流管试验台的研制。该试验台根据LMS自适应算法，模拟实际工作环境，自适应地控制试验过程，并对试验数据应用小波分析技术分析处理，得到机车大功率整流管准确而全面的性能参数，具有自动化程度高、试验结果可靠性高的优点。本文主要介绍试验数据处理和软件设计。     

Modelling and analysis of 3-D arrangements of particles by point processes with examples of application to biological data obtained by confocal scanning light microscopy

Within the concept of point processes, a review is presented of quantities which can be used in studies of three-dimensional (3-D) aggregates of particles. Suitable characteristics and estimators are given for both unmarked and marked point processes. To demonstrate the feasibility of such quantitative approaches, an application in histology, dealing with 3-D arrangements of cell nuclei in rat liver, is described. Using a confocal scanning light microscope, 3-D images are recorded and image analysis used to obtain the coordinates of the centroid, together with the volume and DNA content, of each cell nucleus. Examples of results are given, using both unmarked and marked point processes. In the latter case, cell type, nuclear volume and ploidy group are suitable marks.     

激光平网雕刻机设计

研制了用于制作平面网版的激光雕刻机，设计了雕刻机用CO2激光器、光路系统及单片机控制系统，探讨了将图像文件转化为控制命令文件的方法。     

采用模数转换技术提高脉冲激光测距的测时精度

针对脉冲激光测距中计数量化误差影响测时精度的问题,本文提出了采用模数转换技术提高测时精度的方法,并进行了可行性与精度分析,理论与实践结果均表明,该方法易于实现,能够容易地将计数量化误差减少若干个数量级。     

激光熔敷合金层组织及腐蚀磨损特性研究

利用ＣＯ＿２连续激光器在４５钢表面进行了激光熔敷镍基合金、镍基Ｃｒ＿２Ｏ＿３合金和镍基ＷＣ合金，以２Ｃｒ１３不锈钢为对比材料，系统地研究了激光熔敷层在不同冲击速度和腐蚀介质浓度下的腐蚀磨损特性，并根据组织分析、显微硬度测试及腐蚀磨损后的表面形貌观察，探讨了激光熔敷层的腐蚀磨损过程。结果表明：激光熔敷层的腐蚀磨损性能均比２Ｃｒ１３不锈钢好。     

不锈钢管子—管板的激光焊接

试验研究了不锈钢的深溶焊接。研究了聚焦光束回转的光具。在工件不动的情况下,焊接管子—管板连接环缝。焊缝质量满足压力容器的要求,焊接效率大大提高。