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The defect of process equipments is a major factor that impairs the yields in the mass production of semiconductor wafer fabrication and it is a main supervision means to use high-resolution defect inspection tools to detect and monitor the defect damage. Due to the high investment costs of these inspection tools and the resulting decrease in the throughput, how to improve the sampling rate is an important issue for the associated inspection strategy. This paper proposes a new concept and implementation of virtual inspection (VI) to enhance the detection and monitoring of defect in semiconductor production process. The underlying theory of the VI concept is that the state variables identifications (SVIDs) of process equipments can reflect the process quality effectively and loyally. The approach of VI is to combine the application of the fault detection and classification (FDC), and the defect library and the re-engineering of inspection procedure to reach the full-scope of strategic objective. VI enables the defect monitoring to enter a new era by promoting the monitoring level of defect inspection from the previous lot-sampling basis to the wafer-sampling level, and hence upgrades the sampling strategy from random-sampling to full and right-sampling. In this study, various typical defect cases are utilized to illustrate how to create VI models and verify the reliability of the proposed approach. Furthermore, a feasible architecture of the VI implementation for mass production in semiconductor factory is presented in the paper. 相似文献
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PIRF-Nav 2.0: Fast and online incremental appearance-based loop-closure detection in an indoor environment 总被引:1,自引:0,他引:1
Aram KawewongAuthor Vitae Noppharit TongprasitAuthor Vitae 《Robotics and Autonomous Systems》2011,59(10):727-739
This paper presents a fast and online incremental solution for an appearance-based loop-closure detection problem in a dynamic indoor environment. Closing the loop in a dynamic environment has been an important topic in robotics for decades. Recently, PIRF-Nav has been reported as being successful in achieving high recall rate at precision 1. However, PIRF-Nav has three main disadvantages: (i) the computational expense of PIRF-Nav is beyond real-time, (ii) it utilizes a large amount of memory in the redundant process of keeping signatures of places, and (iii) it is ill-suited to an indoor environment. These factors hinder the use of PIRF-Nav in a general environment for long-term, high-speed mobile robotic applications. Therefore, this paper proposes two techniques: (i) new modified PIRF extraction that makes the system more suitable for an indoor environment and (ii) new dictionary management that can eliminate redundant searching and conserve memory consumption. The results show that our proposed method can complete tasks up to 12 times faster than PIRF-Nav with only a slight percentage decline in recall. In addition, we collected additional data from a university canteen crowded during lunch time. Even in this crowded indoor environment, our proposed method has better real-time processing performance compared with other methods. 相似文献
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Breast cancer is one of the most common cancers diagnosed in women. Large margin classifiers like the support vector machine (SVM) have been reported effective in computer-assisted diagnosis systems for breast cancers. However, since the separating hyperplane determination exclusively relies on support vectors, the SVM is essentially a local classifier and its performance can be further improved. In this work, we introduce a structured SVM model to determine if each mammographic region is normal or cancerous by considering the cluster structures in the training set. The optimization problem in this new model can be solved efficiently by being formulated as one second order cone programming problem. Experimental evaluation is performed on the Digital Database for Screening Mammography (DDSM) dataset. Various types of features, including curvilinear features, texture features, Gabor features, and multi-resolution features, are extracted from the sample images. We then select the salient features using the recursive feature elimination algorithm. The structured SVM achieves better detection performance compared with a well-tested SVM classifier in terms of the area under the ROC curve. 相似文献
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Yi-Kuang Chien-Yin Chien-Hsun Chia-Ming Kuang-Chong Chih-Kung Jeng-Shian Shiming Long-Sun 《Sensors and actuators. B, Chemical》2009,141(2):498-505
This study demonstrated a microcantilever biosensor for enhancement of capture antibody immobilization. The electrically protein-manipulated, microcantilever biosensor is featured with enhanced capture antibody immobilization, miniaturization, and high sensitivity. Thanks to the electric property of biological substances in a real environment, given charged proteins can be manipulated with attraction in solution under an electric field. It is evident that higher amount of capture antibody molecules immobilized onto sensing surfaces captures or detects specific molecules, indicating greater deflection and stresses as well. This however leads to significant cost in biosensors. With the merit of MEMS technique that allows highly fabrication-compatible integration into microcantilever biosensors, sparsely distributed antibody molecules in solution are attracted in focus onto a sensing solid surface under electric fields. As the sensing element of the gold-coated, V-shaped silicon nitride microcantilever also serves as an electrode, the electric fields are applied in a channel of flowing microfluidics by locally in-plane electrodes or by a top electrode arranged for three-dimensional fields. As expected, most charged proteins distributed in solution are effectively attracted onto the sensing area within the electric fields. This improves the efficiency of capture antibody immobilization and achieves an eight-fold reduction over the necessary amount of capture antibodies without applying electric fields. With such a successful manipulation of charged proteins, the novel microcantilever biosensor exhibits efficient use of capture antibodies in solution. 相似文献
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