Optimization of the sputtering process parameters of GZO films using the Grey–Taguchi method

This paper examines the optimization of the process parameters of GZO films deposited on polyethylene terephthalate substrates by R.F. magnetron sputtering using the Taguchi method, aiming to obtain highly transparent and conductive films. The influences of the various sputtering factors (R.F. power, sputtering pressure, deposition time, substrate temperature and post-annealing temperature) on electrical resistivity and structural, morphological and optical transmittance of GZO films are analyzed. The electrical resistivity and the optical transmittance of GZO films were improved by post-annealing the substrate during the deposition process. Experimental results indicate the optimal process parameters in GZO films deposited on polyethylene terephthalate substrates can be determined effectively. The electrical resistivity of GZO films is decreased from 1.194 × 10⁻³ Ω cm to 8.627 × 10⁻⁴ Ω cm and the optical transmittance is increased from 86.148% to 90%, leading to multiple performance characteristics in deposition qualities through the Grey–Taguchi method.     

Synthesis of novel UV-curable difunctional thiourethane methacrylate and studies on organic–inorganic nanocomposite hard coatings for high refractive index plastic lenses

This study relates to the development of ultraviolet (UV)-curable, organic–inorganic nanocomposite hard coatings for plastic lens substrates, especially for polythiourethane (PTU) and polycarbonate (PC). Novel difunctional thiourethane methacrylate (mercaptoethylsulfide-thiourethane methacrylate: coded MES-TUMA and isophorone diisocyanate-mercaptoethylsulfide-thiourethane methacrylate: coded IPDI-MES-TUMA) was synthesized to enhance the adhesive strength for PTU. On the basis of IR, ¹H NMR, electron spray ionisation-mass spectrometry (ESI-MS) analysis and gel permeation chromatography (GPC), the expected structures were confirmed. These difunctional thiourethane methacrylates were easily mixed with multifunctional urethane acrylate, surface-modified ZrO₂–TiO₂ nanoparticles and photoinitiator in coating formulations. The UV-cured organic–inorganic nanocomposites were very useful as hard coatings for high refractive index plastic lenses such as PTU and PC.     

阴极电弧离子沉积TiN／Ti镀层腐蚀特性

采用电化学线性极化、交流阻抗谱技术研究了不同基片偏压上阴极电弧沉积TiN/Ti镀层在50×10-6g/gCl-溶液中的腐蚀行为,并对镀层腐蚀的机理进行了探讨。结果表明:基片偏压–400V时,镀层耐蚀性能好;镀层表面的针孔是诱发镀层和基材体系发生点蚀、电偶腐蚀的主要缺陷。     

Preparation and properties of glass cloth‐reinforced polyimide composites with improved impact toughness for microelectronics packaging substrates

A series of glass cloth‐reinforced thermosetting polyimide composites (EG/HTPI) were prepared from E‐glass cloth (EG) and polyimide matrix resins. The polyimide resins were derived from 1,4‐bis(4‐amino‐2‐ trifluoromethyl‐phenoxy)benzene, p‐phenylenediamine, diethyl ester of 3,3′,4,4′‐benzophenonetetracarboxylic acid, and monoethyl ester of cis‐5‐norbornene‐endo‐2,3‐dicarboxylic acid. Based on the rheological properties of the B‐staged polyimide resins, the optimized molding cycles were designed to fabricate the EG/HTPI laminates and the copper‐clad laminates (Cu/EG/HTPI). Experimental results indicated that the EG/HTPI composites exhibited high thermal stability and outstanding mechanical properties. They had flexural strength of >534 MPa, flexural modulus of >20.0 GPa, and impact toughness of >46.9 kJ/m². The EG/HTPI composites also showed good electrical and dielectric properties. Moreover, the EG/HTPI laminates exhibited peel strength of ～ 1.2 N/mm and great isothermal stability at 288°C for 60 min, showing good potential for application in high density packaging substrates. © 2010 Wiley Periodicals, Inc. J Appl Polym Sci, 2010     

Relation between crystal structure and lattice oxygen content of sintered reaction-bonded silicon nitride

When reaction-bonded silicon nitride containing MgO/Y₂O₃ additives is sintered at three different temperatures to form sintered reaction-bonded silicon nitride (SRBSN), the thermal conductivity increases with sintering temperature. The β-Si₃N₄ (silicon nitride) crystals of SRBSN ceramics were synthesized and characterized to investigate the relation between the crystal structure and the lattice oxygen content. The hot-gas extraction measurement result and the crystal structure obtained using Rietveld analysis suggested that the unit cell size of the β-Si₃N₄ crystal increases with the decrease in the lattice oxygen content. This result is reasonable considering that the lattice oxygen with the smaller covalent radius substitutes nitrogen with the larger one in the β-Si₃N₄ crystals. The lattice oxygen content decreased with increasing sintering temperature which also correlated with increase in thermal conductivity. Moreover, it is noteworthy from the viewpoint that it may be possible to apply the lattice constant analysis for the nondestructive and simple measurement of the lattice oxygen content that deteriorates the thermal conductivity of the β-Si₃N₄ ceramics.     

Fabrication of Y2O3 buffer layer on polished Ni substrates for YBCO superconducting tape

Highly cube textured Ni tapes are produced by heavy cold rolling and recrystallization annealing. The textured nickel tapes have been proven to be suitable substrates for YBCO superconducting tape. Nevertheless, rolling damage and grain boundary grooves on Ni influence the epitaxial growth of highly textured buffer and YBCO layers. The polishing of the Ni substrate surface may play a crucial role in making it beneficial to epitaxial film deposition. In our work, several polishing methods were adopted on Ni to reduce the depth of rolling damage and grain boundary grooves. On the polished Ni substrates, textured Y2O3 buffer layers were deposited using RF sputtering. XRD results show that in-plane texture of Y2O3 films will minish with the decreasing of the Ni substrate surface roughness. AFM results show that average grain size of the Y2O3 film is biggest and surface is coarse in film on flatter Ni surface.     

Fabrication of Y_2O_3 buffer layer on polished Ni substrates for YBCO superconducting tape

1IntroductionIn recent years,worldwide research efforts have been made to develop YBCOsuperconducting tapes.Two promising approaches for the profitable production of long YBCOtapes that are suitable for carryinghigh currents in magnetic fields are RABi TS(Rolling Assisted Biaxially Textured Substrates)[1]and IBAD(Ion Beam Assisted Deposition)methods[2].In RABi TS process,the necessarily strong biaxial texture ofthe YBCOfil mis achieved by epitaxial growth of buffer layers andthe …     

Mullite for Structural, Electronic, and Optical Applications

Mullite (3Al₂O₃·2SiO₂) is becoming increasingly important in electronic, optical, and high-temperature structural applications. This paper reviews the current state of mullite-related research at a fundamental level, within the framework of phase equilibria, crystal structure, synthesis, processing, and properties. Phase equilibria are discussed in terms of the problems associated with the nucleation kinetics of mullite and the large variations observed in the solid-solution range. The incongruent melting behavior of mullite is now widely accepted. Large variations in the solid solubility from 58 to 76 mol% alumina are related to the ordering/disordering of oxygen vacancies and are strongly coupled with the method of synthesis used to form mullite. Similarly, reaction sequences which lead to the formation of mullite upon heating depend on the spatial scale at which the components are mixed. Mixing at the atomic level is useful for low-temperature (<1000°C) synthesis of mullite but not for low-temperature sintering. In contrast, precursors that are segregated are better suited for low-temperature (1250° to 1500°C) densification through viscous deformation. Flexural strength and creep resistance at elevated temperatures are significantly affected by the presence of glassy boundary inclusions; in the absence of glassy inclusions, polycrystalline mullite retains >90% of its room-temperature strength to 1500°C and displays very high creep resistance. Because of its low dielectric constant, mullite has now emerged as a substrate material in high-performance packaging applications. Interest in optical applications mainly centers on its applicability as a window material within the mid-infrared range.     

Development of High Thermal Conductivity Aluminum Nitride Ceramic

AIN ceramics with densities varying from 3.18 to 3.30 g/cm³ and room-temperature thermal conductivities varying from 88 to 193 W/m K were produced. Different sintering conditions, packing powders, AIN powder sources, carbon additive, and sintering times were evaluated, and the key processing parameters which cause the differences in density and thermal conductivity were identified. SEM, TEM, and EDS were used to characterize the correlation between thermal conductivity, microstructure, and processing parameters. The important parameters which control the thermal conductivity of AIN ceramics are discussed.     

人工湿地填料除砷效率及影响因素试验研究

人工湿地是净化含砷水体的重要途径之一,而填料是决定人工湿地除砷效果的关键因素。通过填料如砾石、锰砂、沸石和陶粒的理化性质的测定,以及各种填料的吸附动力学、吸附等温线和吸附影响因素试验,研究了填料的除砷性能及影响因素。结果表明:4种填料均能在24 h内达到吸附平衡,一级动力学方程和二级动力学方程能很好地拟合其吸附过程;锰砂、陶粒、沸石和砾石最大吸附容量依次为36.62,25.39,11.96,7.04 mg/kg,Freundlich方程能较好地拟合填料的等温吸附过程;在0.25~0.50 mm范围内,粒径对锰砂和陶粒吸附砷影响不显著;溶液中氨氮浓度在0.50~2.50 mg/L范围内几乎不影响填料对砷的吸附;当砷初始浓度低于0.4 mg/L时,磷酸盐在0.25~0.50 mg/L范围内对填料吸附砷的影响不显著;砷初始浓度高于0.4 mg/L时,随着磷酸盐浓度从0.25 mg/L增加至0.50 mg/L时,陶粒对砷的最大吸附量降低了2.57 mg/kg,对锰砂的吸附量降低了1.85 mg/kg。