As离子注入形成硅化钨的研究

大规模集成电路的发展使集成度不断提高,器件尺寸减小,线条变窄。现常用的多晶硅栅和互连,由于电阻率高,限制了集成电路的速度。近年发展起来的硅化物材料,因其电阻率低、稳定性好、自对准性能好而常被用作大规模集成电路中的欧姆接触,互连和肖特基势垒。     

Influence of silicon on the oxidation of titanium between 550 and 700°C

The oxidation behavior of Ti-Si alloys (0.25, 0.5, and 1 Wt. % Si) was investigated between 550 and 700°C; in oxygen by continuous thermogravimetry for a maximum duration of about 500 hr and, in air by daily weighing for durations from a few hundred to several thousand hours. The kinetics results revealed that the presence of silicon leads to a decrease in oxidation rate which is more evident when the temperature is raised and the silicon content is increased. Morphological and structural examinations revealed that silicon modifies the internal architecture of oxide layers when compared with unalloyed titanium; in particular, reduced porosity in the layers is observed. Analysis showed that silicon is uniformly distributed in the oxide layer. However, while part of the silicon is in solid solution in the rutile, some is also precipitated as small crystals ( <1 m at 850°C) of SiO₂, of cristobalite structure. The adherence of oxide layers to the metal substrate was measured after cooling of samples; the addition of silicon has been observed to modify, in a manner dependent on its content, the adherence of oxide layers.     

钛合金固态相变的研究进展

综述了近年来国内外学者在钛合金固态相变理论和实验研究方面的进展情况，介绍了几种钛合金固态相变的研究实验方法，并对钛合金中马氏体、硼、亚稳脚分解等相变动力学、晶体学以及组织的演变、形核生长等进行了总结和归纳。     

γ—TiAl增压涡轮熔模铸造过程数值模拟研究

根据熔模型壳离心浇注的铸造工艺特点，建立了γ－TiAl增压涡轮凝固传热过程的数值模型，推导了离心压力下γ－TiAl金属间化合物的凝固收缩和补缩过程数学模型，模拟计算了γ－TiAl增压涡轮铸件的温度场和收缩缺陷，结果表明，模型能可靠计算γ－TiAl增压涡轮铸件凝固过程的温度分布和准确预测铸件的收缩缺陷，数值模拟结果与实验结果吻合良好，数值模拟结果证实了前期工作所提出的进一步减少及消除收缩缺陷的优化工艺措施的合理性。     

Ti(C,N)粉末制备技术的研究及进展

概括了国内外Ti(C,N)粉末的制备技术,特别系统地介绍了Ti(C,N)粉末的制备技术的最新进展,分析了这些制备技术的工艺过程和工艺特点,讨论了其存在的问题和发展趋势。     

疲劳裂纹扩展行为的研究现状及钛合金的疲劳裂纹扩展特征

疲劳裂纹扩展行为是现代材料研究中重要的内容之一。论述了组织结构、环境温度、腐蚀条件以及载荷应力比、频率变化对材料疲劳裂纹扩展行为的影响。总结出疲劳裂纹扩展研究的常用方法和理论模型,并讨论了"塑性钝化模型"和"裂纹闭合效应"与实际观察结果存在的矛盾。最后,对钛合金疲劳裂纹扩展研究的内容和研究结果进行了概述。     

Microstructure of Titanium after Hydrogenation

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Microstructural evolution and interfacial reactions between Ti and ZrO2/CaTiO3 composites

Various proportions of ZrO₂/CaTiO₃ powders were mixed and hot pressed at 1500°C/30 min for Ti casting. The hot-pressed ZrO₂/CaTiO₃ composites were reacted with pure Ti at 1700°C/10 min in Ar. The interfacial reaction between Ti and ZrO₂/CaTiO₃ composites was investigated through X-ray diffraction, scanning electron microscopy, transmission electron microscopy, and energy-dispersive X-ray spectroscopy. The ZrO₂/CaTiO₃ composites with less than 10 vol.%, CaTiO₃, and a minor amount of residual TiO₂ were found. When the content of ZrO₂ was increased to larger than 10 vol.%, two Ca₂Zr₅Ti₂O₁₆ and CaZrTi₂O₇ phases appeared in the composites. The amount of CaTiO₃ and CaZrTi₂O₇ in the composites gradually decreased as the amount of ZrO₂ increased. When Ti came in contact with ZrO₂/CaTiO₃ composites with less than 10 vol.% ZrO₂, the resulting eutectic reaction produced a liquid phase and induced melting. When ZrO₂ was increased to more than 30 vol.% in the composites, Ca₂Zr₅Ti₂O₁₆ and CaZrTi₂O₇ changed completely to CaZrO₃, Ti₂O, CaO, and ZrO₂. With more than 30 vol.% ZrO₂, no other reaction phases occurred in the Ti side after contact with the ZrO₂/CaTiO₃ composites, which is conducive for producing ceramic composites for Ti casting applications.     

Johnson-Cook dynamic constitutive relationship for TC 16 titanium alloy

The true stress--strain curves of TC16 alloy with a wide range of strain rates were investigated under uniaxial quasi-static tension and uniaxial dynamic compression with the lnstron 8032 test machine and the split Hopkinson bar respectively. The results indicate that the true stress increases with increasing strain rate, while decreases with increasing temperature. Under the 105 s^-1 high strain rate and temperature higher than 673 K, the true stress would even be less than that under quasi-static condition. A new method incorporating TCl6＇s stress strain curve developing item was proposed to determine the coefficients in J-C model easily and to avoid the estimation of the adiabatic temperature rising. The Johnson-Cook dynamic constitutive relationship for TC16 was obtained for the first time. Good agreement was obtained between the model prediction and the experimental stress--strain curves for TC16 under both quasi-static and dynamic loadings.     

The effect of α phase on the deformation mechanisms of β titanium alloys

The effects of α and β phase interactions on the tensile and creep deformation behavior of β titanium alloys was studied using Ti-6.0wt.% Mn and Ti-8.1wt.%V as the model two-phase alloys, and Ti-13.0wt.%Mn and Ti-14.8wt.%V as the single-phase β alloys. The β phase of α-βTi-8.1V deforms by stress-induced hexagonal martensite (α′), while slip and twinning occurs in the single-phase β alloy with the same chemistry as the β phase. No stress-induced martensite was observed in the β or α-βTi-Mn alloys. This behavior is modeled in terms of a number of factors, including elastic interaction stresses between the α and β phases, coherency between the α phase and hexagonal martensite, and β phase stability. This paper was presented at the Beta Titanium Alloys of the 00’s Symposium sponsored by the Titanium Committee of TMS, held during the 2005 TMS Annual Meeting & Exhibition, February 13–16, 2005 in San Francisco, CA.