Optimization of Selective Epitaxial Growth of Silicon in LPCVD

Selective epitaxial growth (SEG) of silicon has attracted considerable attention for its good electrical properties and advantages in building microstructures in high‐density devices. However, SEG problems, such as an unclear process window, selectivity loss, and nonuniformity have often made application difficult. In our study, we derived processing diagrams for SEG from thermodynamics on gas‐phase reactions so that we could predict the SEG process zone for low pressure chemical vapor deposition. In addition, with the help of both the concept of the effective supersaturation ratio and three kinds of E‐beam patterns, we evaluated and controlled selectivity loss and nonuniformity in SEG, which is affected by the loading effect. To optimize the SEG process, we propose two practical methods: One deals with cleaning the wafer, and the other involves inserting dummy active patterns into the wide insulator to prevent the silicon from nucleating.     

自适应阵对角线加载研究

本文分析了对角线加载对自适应阵性能的影响，提出了加载门限的概念，以及加载门限的计算公式，为加载量的选取提供了方法和依据，并将加载研究的结果加以推广，提出了有效的ＬＳ自适应波束形成算法的非零初始化方法。     

机器人腕力传感器的动态负载效应

本文从时域和频域两方面研究机器人腕力传感器在加载情况下的动态响应，进行动态建模和频谱分析，探讨负载效应的影响。     

Characteristics of hydrostatic bearing/seal parts for water hydraulic pumps and motors. Part 1: Experiment and theory

In this paper, the load-carrying capacity, power losses and stiffness of disk-type hydrostatic thrust bearings including the case of eccentric loading are discussed theoretically. The numerical analysis method is established based on a two-dimensional elastohydrostatic problem with an elastic deformation model, which is extended to adapt it for a non-axisymmetric load acting on the thrust bearing. The bearing is made of a combination of stainless steel/stainless steel and stainless steel/plastics. For the elastic materials, the maximum stiffness derived from, i.e., minimum film thickness is, larger than that of the rigid material in the range of a large ratio of pocket pressure and a hydrostatic balance ratio of over unity, which is defined as the ratio of the load to the maximum hydrostatic load-carrying capacity. The maximum load-carrying capacity and minimum power loss can exist in the domain of the hydrostatic balance ratio over unity for the case of the bearing consisting of elastic/rigid materials, in comparison with that composed of the same rigid materials. For the case of water, the power loss due to leakage flow is slightly larger but that due to frictional torque is much smaller than that in the case of hydraulic oil. Then, the total power loss is much smaller than that of hydraulic oil.     

预处理工艺对硬质合金与金刚石膜间粘结力的影响

在两种经不同预处理的硬质合金YG8基底上，采用微波等离子体化学气相沉积法，在微波功率2kW，压强4.0kPa和6.5kPa，CH4和H2流量分别为1.6cm/s和100.0cm/s的条件下生长金刚石薄膜。利用X射线衍射检测了金刚石薄膜是否存在，用拉曼光谱分析了薄膜的质量，用金相显微镜观察了薄膜的洛氏硬度压痕，标定并比较了不同预处理工艺膜与基底的结合力。实验结果表明，不同的预处理方法对于粘结力的影响不大，最主要的因素是钴含量的多少。     

具有初始弯曲转子振动峰值的控制方法

本文从理论上研究了控制初始弯曲引起的转子振动幅值的一种新方法。通过在与转轴初始弯曲方向成较大夹角的方向添加不平衡质量的方法 ,使转子新的不平衡方向与初始弯曲方向夹角接近 180° ,则可以减小转子在临界转速附近的振幅。无论新的不平衡参数大于或小于初始弯曲参数 ,只要新的不平衡参数不至于太大 ,则临界转速附近的振幅响应肯定会得到改善。特别是当新的不平衡参数近似等于初始弯曲参数时 ,无论转速高低 ,振幅都会大幅下降。当重力参数、外阻尼系数和内阻尼系数改变后仍有同样结论。本文援引文献 [2 ]中的实例对这种方法进行了验证 ,并给出了解决类似故障的步骤。本文的方法可用于处理生产实际中转轴初弯引起的振动问题     

后压浆技术在杨凌国际会展中心基桩工程中应用效果的分析

本文叙述了杨凌国际会展中心基桩静力载荷试验的试验过程 ;通过对三根灌注桩承载力的试验结果分析 ,认为后压浆技术对提高灌注桩单桩极限承载力有很大作用     

Rheological and drug‐release behaviour of a scleroglucan gel matrix at different drug loadings

The aim of this study was to investigate the drug‐loading effects on release and mechanical properties of a scleroglucan gel, with the intention of considering them in delivery systems formulations. The rheological and kinetic properties of a 2 % w/w scleroglucan gel matrix loaded with 0, 0.02, 0.04, 0.06, 0.2 and 0.4 % w/w of theophylline (Th, used as a model drug) were investigated. Rheological measurements were performed in a controlled‐stress rotational‐shear rheometer under isothermal conditions. For theophylline release from the gel a flat Franz cell was used and the kinetic parameters were derived applying a semi‐empirical power law. The influence of scleroglucan molar weight on kinetic and rheological behaviour was also studied. Results suggest two possible effects of drug loading on the gel network: in the 0.04–0.06 % w/w Th range a plasticizing effect and in the 0.2–0.4 % w/w Th range a rigidization effect. In the first range mentioned, the changes in the gel structural properties tested by means of rheological measurements are coincident with changes in drug‐release kinetics. Copyright © 2005 Society of Chemical Industry     

Dynamic response and behavior of reinforced concrete slabs under impact loading

Reinforced concrete slabs are among the most common structural elements. In spite of the large number of slabs designed and built, the effect of their details on their behavior under impact loads are not always appreciated or properly taken into account. This experimental study was aimed at understanding the dynamic behavior of structural concrete slabs under impact loading to improve the state of the art of protective design. This study investigated the effects of different types of slab reinforcements and the applied impact loads on the dynamic response and behavior of reinforced concrete slabs.     

Behaviors of concrete-filled steel tubular members subjected to combined loading

The present study is an investigation on the behaviors of concrete-filled thin-walled steel tubular members subjected to combined loading, such as compression and torsion, bending and torsion, compression, bending and torsion. ABAQUS software is used in this paper for the finite element analysis (FEA). A comparison of results calculated using this modeling shows generally good agreement with test results. The FEA modeling is then used to investigate the influence of important parameters that determine the ultimate strength of the composite members under combined loading, such as compression and torsion, bending and torsion, compression, bending and torsion. The parametric studies provide information for the development of formulae for calculating the ultimate strength of the composite members subjected to combined loading.