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91.
92.
93.
采用金属有机物化学气相沉积(MOCVD)方法生长六方相InN薄膜,利用氮化镓(GaN)缓冲层技术制备了高质量薄膜,得到了其能带带隙0.7eV附近对应的光致发光光谱(PL). 通过比较未采用缓冲层,同时采用低温和高温GaN缓冲层,以及低温GaN缓冲层结合高温退火三种生长过程,发现低温GaN缓冲层结合高温退火过程能够得到更优表面形貌和晶体质量的InN薄膜,同时表征了材料的电学性质和光学性质. 通过对InN薄膜生长模式的讨论,解释了薄膜表面形貌和晶体结构的差异. 相似文献
94.
Theodore Chung Jae Limb Jae-Hyun Ryou Wonseok Lee Peng Li Dongwon Yoo Xue-Bing Zhang Shyh-Chiang Shen Russell D. Dupuis David Keogh Peter Asbeck Ben Chukung Milton Feng Dimitri Zakharov Zusanne Lilienthal-Weber 《Journal of Electronic Materials》2006,35(4):695-700
The design and growth of GaN/InGaN heterojunction bipolar transistors (HBTs) by metalorganic chemical vapor deposition (MOCVD)
are studied. Atomic-force microscopy (AFM) images of p+InGaN base layers (∼100 nm) deposited under various growth conditions indicate that the optimal growth temperature is limited
to the range between 810 and 830°C due to a trade-off between surface roughness and indium incorporation. At these temperatures,
the growth pressure must be kept above 300 Torr in order to keep surface pit density under control. An InGaN graded-composition
emitter is adopted in order to reduce the number of V-shaped defects, which appear at the interface between GaN emitter and
InGaN base and render an abrupt emitter-base heterojunction nearly impossible. However, the device performance is severely
limited by the high p-type base contact resistance due to surface etching damage, which resulted from the emitter mesa etch. 相似文献
95.
Z. Y. Xie C. H. Wei S. F. Chen S. Y. Jiang J. H. Edgar 《Journal of Electronic Materials》2000,29(4):411-417
The correlation between surface morphological properties of the GaN epilayers and the surface conditions of 6H-SiC (0001)
substrates etched in H2, C2H4/H2, and HCl/H2 was studied. Etching 6H-SiC in H2 produced a high quality surface with steps and terraces, while etching in HCl/H2 produced either a rough surface with many pits and hillocks or a smooth surface similar to that etched in H2, depending on the HCl concentration and temperature. The GaN epilayers were subsequently deposited on these etched substrates
using either a low temperature GaN or a high temperature AlN buffer layer via MOCVD. The substrate surface defects increased
the density and size of the “giant” pinholes (2–4 μm) on GaN epilayers grown on a LT-GaN buffer layer. Small pinholes (<100
nm) were frequently observed on the samples grown on a HT-AlN buffer layer, and their density decreased with the improved
surface quality. The non-uniform GaN nucleation caused by substrate surface defects and the slow growth rate of
planes of the islands were responsible for the formation of “giant” pinholes, while the small pinholes were believed to be
caused by misfit dislocations. 相似文献
96.
本文讨论了影响生长速度的因素,如主载气流量、金属有机源流量(在一定蒸气压下),衬底放置位置,及掺杂和非掺杂情况等.对实验结果进行了计论,并与其它文献进行了比较.着重阐述了改善侧向均匀性问题. 相似文献
97.
D. N. Armitage H. M. Yates J. O. Williams D. J. Cole-hamilton I. L. J. Patterson 《Advanced functional materials》1992,1(1):43-46
ZnS has been grown on GaAs(100) substrates by atmospheric pressure metal–organic chemical vapour deposition (MOCVD) using dimethylzinc (DMZn) and t-butyl mercaptan (t-BuSH). The effects of the reactant gas phase molar ratio and the growth temperature on the characteristics of the material grown have been investigated. The structural quality of the layer is demonstrated by X-ray rocking curve half-widths of less than 300 arcsec for the epilayers. There is little significant pre-reaction and the layers are of excellent surface morphology and layer uniformity. 相似文献
98.
Thin strained regions have been inserted at the interfaces of lattice-matched InGaAs/lnP superlattices to assess growth conditions
for tailoring of localized compositional changes and for studying As-P intermixing behavior during heterojunction growth.
Also, precise growth rates of binary composition layers were determined from specially designed superlattices using strained
layers of common anion compounds inserted periodically into InP and GaAs. Growth rates of fractional monolayers are found
to be identical to thick layer growth rates. When thin InAs, GaAs, GaP, ALAs, or AIP layers were inserted at the InGaAs/lnP
heterojunctions, the measured strain at either one or both interfaces was equal to the strain predicted from the growth rate
x time product. Excess strain seen in some cases is due to a change in As-P intermixing and this component can be separated
from the predicted strain. Insertion of Ga-compounds at the InP-grown-on-InGaAs interface causes interface roughening which
degrades the superlattice. For all other compositions the thin, highly strained regions are not detrimental to the crystalline
quality of the periodic structure. 相似文献
99.
Guotong DuJinzhong Wang Xinqiang WangXiuying Jiang Shuren YangYan Ma Wei YanDingsan Gao Xiang LiuHui Cao Junying XuR.P.H. Chang 《Vacuum》2003,69(4):473-476
ZnO films were grown on C-plane sapphire substrate by plasma-assisted MOCVD. The films was characterized by XRD, photoluminescence (PL) and the optical transmission spectrum. We found tensile strain in the sample, which had been annealed many times during the growth process, while there is compressive strain in the sample, which was annealed only one time after growth. The PL spectra at room temperature for the sample annealed many times exhibited only one emitting peak at around 380 nm. However, we find Γ5 and Γ6 free exciton peaks in the sample annealed only one time after growth. At the same time, the optical transmission indicate that the maximum of the sample's transmission decreases against with the increasing of the c-axis length in ranges from 190 to 900 nm. 相似文献
100.
The polarization of the photoluminescence (PL) of self-assembled CdSe quantum dots (QDs), grown by metalorganic chemical vapor
phase deposition, was measured. From the (001) surface, the PL was found preferentially polarized in the
direction, while from the
cleaved surface in the [001] direction. The polarization of PL depends strongly on the ZnSe capping layer thickness and the
PL energy. With an increase in ZnSe coverage, the intensity ratio
was found to increase first, then decrease after the coverage is thicker than a critical value. Moreover, such a critical
thickness is smaller for larger QDs (lower PL energies). Possible origins of the PL polarization are discussed. We suggest
that besides the quantum confinement effects, the strain field in the QDs also plays an essential role in the observed polarization
of PL. 相似文献