光刻胶灰化工艺与深亚微米线条的制作

随着器件尺寸的缩小，细线条的制作成为很关键的工艺，普通光学光刻已接近其分辨率的极限，而电子束光刻和Ｘ射线光刻技术复杂、费用昂贵。本文对光刻胶灰化工艺进行了分析和研究，并应用此工艺进行了深亚微米线条的制作，在普通光学光刻机上制作出宽度小于０．２５μｍ细线条。我们已将此工艺成功地应用在深亚微米ＭＯＳＦＥＴ的制作中。     

Studies on Three—electrode Semiconductor Lasers

Using the ray trace method,three-section semiconductor lasers are studied .An analytic expression of output power for the three-section semiconductor lasers is derived for the first time.Frome this expression,threshold condition is also obtained.     

激光微焊接质量的模糊识别技术研究

讨论了激光微焊点焊接质量的模糊识别的概念，数学模型及其应用方法，并介绍了系统的硬件组成。     

真空／控制气氛无钎剂激光软钎焊系统的研制

结合激光软钎焊技术的特点，研制了真空／控制气氛无钎剂激光软钎焊系统，以便利用激光软钎焊的优点，进行真空／控制气氛下激光非接触加热的无钎剂技术研究。     

RS码频域纠错编码在激光对潜通信信道中的实现方法

介绍了信道编码在激光对潜通信系统中的重要作用，介绍了频域编译ＲＳ码的基本方法，并给出了脉冲位置调制信道的ＲＳ码频域编译码的计算机模拟方法和结果。     

射线法研究两段式半导体激光器模谱

由于两区载流子密度不同，两段式双稳半导体激光器（ＴＢＬＤ）两区界面反射不为零，这将使器件的输出模谱变得复杂，利用射线法，推导了ＴＢＬＤ的端面输出模谱表达式，在此基础上讨论了界面反射的影响以及由界面及端面构成的子腔对模谱的调制。     

光孤子源的研制

报道了利用增益开关分布反馈半导体激光器，Ｆ－Ｐ光学滤波器及掺饵光纤放大顺研制成光孤子源的研究工作。光孤子源性能稳定，输出的超短光脉冲重复频率为２．５ＧＨｚ脉宽２４，谱宽０．１４ｎｍ，时间带宽积０．４１９，平均输出光功率２．４ｍＷ。     

具有激光二极管结构的1.3μm侧面发光二极管（Ⅰ）：理论分析

讨论了用某些参数不合格的激光二有管管芯制作侧面发光二极管的可能性，并给出了超辐射发光二极管和侧面发光二极管的定量判定依据。     

Structural properties of phosphorous-doped polycrystalline silicon

The structural properties and hydrogen bonding of undoped and phosphorous doped polycrystalline silicon produced by step-by-step laser dehydrogenation and crystallization technique were investigated using Raman spectroscopy and hydrogen effusion measurements. At low laser fluences, E_L, a two-layer system is created. This is accompanied by the change in hydrogen bonding. The intensity of the Si–H vibration mode at 2000 decreases faster than the one at 2100 cm⁻¹. This is even more pronounced in phosphorous-doped specimens. The laser crystallization results in an increase of the hydrogen binding energy by approximately 0.2–0.3 eV compared to the amorphous starting materials.     

Experimental investigation of the effects of heat release on mixing processes and flow structure in a high-speed subsonic turbulent H2 jet

In this paper, we explore the effects of heat release on mixing and flow structure in a high-speed subsonic turbulent H₂ jet in an air coflow. Heat release effects are determined from the comparison of nonreacting and reacting jet behavior, boundary conditions being identical in both cases. Experiments are performed in a wind tunnel specifically designed for this purpose. Planar laser induced fluorescence on OH radicals and on acetone (seeded in the hydrogen jet) are used to characterize the cartography of scalars, and laser Doppler velocimetry is used to characterize velocity profiles in the far field of the H₂ jet. Results show significant effects of heat release on mixing and flow structure, indicating an overall reduction of mixing and entrainment in the reacting jet compared to the nonreacting jet. First, a change is observed in the orientation of coherent structures originating from Kelvin-Helmholtz type instabilities, and responsible for air entrainment within the jet, which appear “flatter” in the jet flame. Then, the flame length is increased over what would be predicted from the intersection of the mean stoichiometric contour with the centerline of the nonreacting jet. And finally, the longitudinal average velocity decrease along the jet axis is quicker in the nonreacting jet, and nondimensional transverse velocity fluctuations are about half as high in the reacting jet as in the nonreacting jet, indicating a reduction of the turbulence intensity of the flow in this direction in the jet flame.