基于微流体数字化技术的新型无阀微泵的设计研究

根据微流体的特性,研制出一种新型无阀微泵。介绍该微泵设计原理,利用毛细作用力作为进口动力源,再利用“数字化微流体技术”驱动,将出口处的液体喷出。由于进出口有压力差,进口形成自锁,微泵也就形成了单向流。该微泵样品经制作及实验验证,工作原理正确,喷出的液体量微小、可控,可达纳升级,并可实现连续流、离散流。     

多级低压电渗流微泵的设计、加工及测试

设计了一种多级低压电渗流微泵。该微泵系统主要由直流电源和蚀刻微通道的芯片等部分组成。芯片是在一块硅基片上蚀刻6组尺寸不同的微通道,从而达到提供不同大小的流量和承受不同背压的目的。对芯片的加工工艺流程进行了说明,同时对微泵进行了试验研究。实验结果表明：在低压下,该泵能够驱动通道中的液体。     

Recent advances in microscale pumping technologies: a review and evaluation

Micropumping has emerged as a critical research area for many electronics and biological applications. A significant driving force underlying this research has been the integration of pumping mechanisms in micro total analysis systems and other multi-functional analysis techniques. Uses in electronics packaging and micromixing and microdosing systems have also capitalized on novel pumping concepts. The present work builds upon a number of existing reviews of micropumping strategies by focusing on the large body of micropump advances reported in the very recent literature. Critical selection criteria are included for pumps and valves to aid in determining the pumping mechanism that is most appropriate for a given application. Important limitations or incompatibilities are also addressed. Quantitative comparisons are provided in graphical and tabular forms.     

硅微热致动泵的关键加工工艺

提出了一种新型结构的硅微热致动泵,对该泵相关的微机械关键加工工艺进行了综述分析和试验研究。