Effect of gas mixing ratio on gas-phase composition and etch rate in an inductively coupled CF4/Ar plasma

In this work, we carried out investigations aimed at understanding the effect of gas mixing ratio on plasma parameters, gas phase composition and etch rate in CF₄/Ar inductively coupled plasma. For this purpose, a combination of experimental methods and modelling was used. Experiments showed that electron temperature and electron density are not very sensitive to variations of Ar content in CF₄/Ar plasma. From a zero-dimensional plasma model, the densities of both neutral and charged particles change monotonically. The analysis of surface kinetics based on an ion-assisted etching mechanism showed the possibility of non-monotonic etch rate behaviour due to a concurrence of chemical and physical etching pathways.     

Understanding and Modeling the Effect of Surfactants in Enhanced Particle Removal from Surfaces in Aqueous Media

The removal of particulate contamination is a critical issue for many manufacturing processes. It is particularly critical to the electronics industry in which small pieces of microscopic debris remaining after chemical mechanical planarization (cmp) using submicron polishing particles can cause device failure. One way to enhance particle removal following the cmp process is to utilize surfactants. Recent research has shown ways to model the effect of surfactants on enhanced particle removal. However, previous research has not demonstrated the effect of ionic strength on enhanced particle removal associated with surfactant use. Past research has also not shown the combined effects of ionic strength and surfactant concentration on enhanced particle removal using surfactants. This article summarizes the parameters affecting particle removal, and it provides data and analysis on the effect of ionic strength as well as the combined effects of ionic strength and surfactant concentration on particle removal following cmp processing.     

Adaptive Edge Detectors for Piecewise Smooth Data Based on the minmod Limiter

We are concerned with the detection of edges—the location and amplitudes of jump discontinuities of piecewise smooth data realized in terms of its discrete grid values. We discuss the interplay between two approaches. One approach, realized in the physical space, is based on local differences and is typically limited to low-order of accuracy. An alternative approach developed in our previous work [Gelb and Tadmor, Appl. Comp. Harmonic Anal., 7, 101–135 (1999)] and realized in the dual Fourier space, is based on concentration factors; with a proper choice of concentration factors one can achieve higher-orders—in fact in [Gelb and Tadmor, SIAM J. Numer. Anal., 38, 1389–1408 (2001)] we constructed exponentially accurate edge detectors. Since the stencil of these highly-accurate detectors is global, an outside threshold parameter is required to avoid oscillations in the immediate neighborhood of discontinuities. In this paper we introduce an adaptive edge detection procedure based on a cross-breading between the local and global detectors. This is achieved by using the minmod limiter to suppress spurious oscillations near discontinuities while retaining high-order accuracy away from the jumps. The resulting method provides a family of robust, parameter-free edge-detectors for piecewise smooth data. We conclude with a series of one- and two-dimensional simulations.To David Gottlieb, on his 60th birthday, with friendship and appreciation.     

Density Measurement of Liquid Ni-Ta Alloys by a Modified Sessile Drop Method

The density of liquid Ni- Ta alloys was measured by using a modified sessile drop method. It is found that the density of the liquid Ni- Ta alloys decreases with the increasing temperature, but increases with the increase of tantalum concentration in the alloys. The molar volume of liquid Ni- Ta binary alloys increases with the increase of temperature ancl tantalum concentration.     

用迁移率和载流子浓度研究碲镉汞中的深能级

获得了一种研究碲镉汞深能级的方法。通过分析迁移率 载子浓度与温度的关系，可以得到关于深能级的重要依据。     

用SBR1502胶浆制取道路沥青改性用胶乳

用附聚法和降粘法浓缩ＳＢＲ１５０２胶浆制取道路沥青改性用胶乳。结果表明：总固物质量分数可由（２１±２）％上升到４５％～５０％。该胶乳与齐鲁石化公司炼油厂１００号乙沥青混合，改性后的道路沥青具有良好的使用性能，可满足高等级路面沥青的技术要求。     

Prediction of High-Temperature Long-Term Strength for Damaged Structures

A method is proposed for analytical estimation of the high-temperature long-term strength of structures with material discontinuities, which are stress raisers. We consider the processes involving the formation of diffusion pores. Diffusion processes in metals are strongly enhanced with increasing temperature and stresses.     

The Role of Plasma Science in Graduate Education

In many academic institutions plasma science is currently viewed as a basic physics discipline encompassing a broad range of applications including fusion, astrophysics, space physics, low temperature plasma physics for the semiconductor industry, and environmental remediation of nuclear and chemical waste. Although the applications are broad, it is accurate to state that the major development of the field has been driven by the scientific needs of a single program, fusion. As such, plasma science and engineering has played an important role in graduate education since the early days of the fusion program, late 50's, early 60's.     

OFA-II型定量荧光仪在油气勘探中的应用

定量荧光仪在现场应用中受到各种因素的影响:如岩屑样品浸泡时的干、湿;图谱是否出现了淬灭;环境温度的影响等等。文章通过具体事例给出解决这些问题的办法。     

川中丘陵区一种新型小流域径流输沙模型的建立与应用

径流输沙模型对定量评价水沙的输出响应具有重要的意义。本研究在已有研究成果的基础上，通过对四川盐亭县林山西沟小流域的径流、泥沙进行现场观测与分析，提出含沙量单位线的定义及其确定方法，建立了适应该小流域的径流输沙模型。并应用实测资料进行比较，表明模型的模拟结果可靠，模拟过程确定性系数达0．8以上，为川中丘陵区小流域径流输沙过程的预测预报提供了一个新方法。