无纵向电场分量离子波纹激光的小信号增益

在离子波纹摆动器中，改变电子束的入射方向，保证了离子波纹场的纵向分量为零，从而消除了纵向电场对离子波纹激光的不利影响。给出了束电子的运动轨迹，运用Madey定理计算了小振幅条件下该离子波纹激光的小信号增益。     

医用激光治疗机的触摸屏控制系统设计

介绍了医用红宝石激光器触摸屏控制系统的基本结构，分析了医用红宝石激光器中主要电磁干扰（EMI）的产生机制，提出了具体的电磁兼容（EMC）技术措施并得到实验验证。     

激光水下成像技术及其进展

介绍了近年发展起来的三种主要的激光水下成像方法，即常规水下激光成像、高分辨率水下激光三维成像和偏振激光成像，分析了它们各自的工作原理、特点以及各自的发展状况。     

光学材料的激光微加工研究进展与应用前景

综述了国内外在光学材料激光微加工方面的研究成果和应用状况，并展望了其发展前景。     

激光熔覆专用铁基合金粉末的研究进展

指出了目前防止熔覆层开裂所采取的主要措施中存在的问题,阐述了激光熔覆和热喷涂对于所用合金粉末性能要求之异同,评述了激光熔覆专用铁基合金粉末的研制现状,提出了成分与组织设计的新思想。     

Effects of post annealing on removal of defect states in silicon oxynitride films grown by oxidation of silicon substrates nitrided in inductively coupled nitrogen plasma

Ultra thin (5 nm) silicon oxynitride (SiON) films were fabricated at a low temperature using nitrogen plasma generated by an inductively coupled plasma system. Effects of post-metalization annealing (PMA) of Al/SiON/Si MOS structure on the electrical properties of the SiON films were studied and correlations between the charge trapping states and the leakage current were established. Positive charge trapping by interface states generated by plasma damage was characterized by the hysteresis in high-frequency capacitance-voltage (C-V) characteristics. Hysteresis was observed to be completely removed by PMA while interface state density at the Si mid band gap reduced from 2.2×10¹³ to 3.7×10¹¹/eV/cm² and the oxide fixed charge density changed from 3.3×10¹² to −4×10¹¹/cm². The leakage current also decreased significantly, by more than two orders of magnitude, with PMA. The analysis of the leakage current using trap assisted tunneling (TAT) mechanism indicated that with PMA, the trap energy level in the SiON film becomes shallower from 1.3 to 0.7 eV. The positive trapped charges were observed to be annihilated by PMA and the trapping sites became neutral trap centers in the SiON film. This could lead to the reduction in the leakage current component given rise to by TAT.     

线光栅扫描实现衍射图形的矢量化直写

在双光束激光直写系统中,衍射光变图像的光刻是逐像素点进行的.本文提出在该系统中采用狭缝获得光栅线来进行衍射图形的直写,利用一种改进的矢量文件格式,使平台沿着垂直光栅线的方向运动,获得连续的多光点同时直写,直写后的衍射光栅线是连续的,系统的运行效率是逐点光刻的几十倍.编写了与DXF文件的接口直写控制程序,给出了实验结果.     

热作模具钢表面激光堆焊耐磨合金层的研究

本文主要通过在H13钢上用大功率CO_2激光束进行堆焊,阐述了激光堆焊工艺变化对堆焊组织和性能的影响,在本试验条件下,得到了高密度弥散金属化合物组织的激光堆焊层,平均硬度为HV800,与基体呈冶金结合,耐磨性比H13模具钢提高149%。     

大功率CO2激光器脉冲电源研究

本文论述了直流高压与高频脉冲电源相叠加，构成高频、高压脉冲电源，并使其对CO2激光器进行放电实验，研究了同条件下的放电参数与功率。     

Investigation into polishing process of CVD diamond films

A new technique used for polishing chemical vapor deposition (CVD) diamond films has been investigated, by which rough polishing of the CVD diamond films can be achieved efficiently. A CVD diamond film is coated with a thin layer of electrically conductive material in advance, and then electro-discharge machining (EDM) is used to machine the coated surface. As a result, peaks on the surface of the diamond film are removed rapidly. During machining, graphitization of diamond enables the EDM process to continue. The single pulse discharge shows that the material of the coated layer evidently affects removal behavior of the CVD diamond films. Compared with the machining of ordinary metal materials, the process of EDM CVD diamond films possesses a quite different characteristic. The removal mechanism of the CVD diamond films is discussed.