UHV/CVD外延生长SiGe/Si表面反应动力学

利用 Si H4 和 Ge H4 作为源气体 ,对 UHV/CVD生长 Si1- x Gex/Si外延层的表面反应机理进行了研究 ,通过 TPD、RHEED等实验观察了 Si( 1 0 0 )表面 Si H4 的饱和吸附、热脱附过程 ,得出 Si H4 的分解应该是每个 Si H4 分子的 4个 H原子全部都吸附到了 Si表面 ,Si H4 的吸附率正比于表面空位的 4次方 ,并分析了 Ge H4 的表面吸附机制 .在此基础上建立了 UHV/CVD生长Si1- x Gex/Si的表面反应动力学模型 ,利用模型对实验结果进行了模拟 ,二者符合得很好     

3～6GHz SiGe HBT Cascode低噪声放大器的设计

基于Jazz 0.35μm SiGe工艺设计一款满足UWB和IEEE802.11a标准的低噪声放大器.采用并联电感峰化技术与Cascode结构来展宽带宽;完成了芯片版图的设计,芯片面积为1.16 mm×0.78 mm;在带宽为3~6 GHz范围内,最大增益为26.9 dB,增益平坦度为±0.9 dB.放大器的输入输出匹配良好,其回波损耗S₁₁和S₂₂均小于-10dB,输入与输出驻波比小于1.5,1 dB压缩点为-22.9 dBm.在整个频段内,放大器无条件稳定.     

SiGe-collector trench gate insulated gate bipolar transistor fabricated using multiple target sputtering

A new type of trench gate IGBT (insulated gate bipolar transistor) which uses a SiGe layer for the collector is experimentally investigated. SiGe collectors with different Ge content are deposited by multiple cathode sputtering making low temperature processing possible. The change in turn-off characteristics with Ge content is also investigated. Results indicate that the use of a SiGe collector reduces the tail current at turn-off due to the reduced injection of holes to the n⁻ drift region.     

i基区渐变掺杂SiGe/Si异质结开关功率二极管的特性模拟

提出了在SiGe／Si异质结开关功率二极管的本征i区中采用掺杂浓度三层渐变式结构。由Medici模拟所得的特性曲线表明，该结构在正向I—V特性基本不发生改变的前提下，与i区固定掺杂结构相比具有更好的反向恢复电流与反向恢复电压特性，尤其软恢复特性更加明显，反向恢复过程加快。还对渐变掺杂所得到的优越性能进行了分析，从理论上给出了较好的解释。     

DESIGN AND FABRICATION OF Si/SiGe PMOSFETs

Based on theoretical analysis and computer-aided simulation, optimized design prin-ciples for Si/SiGe PMOSFET are given in this paper, which include choice of gate materials, determination of germanium percentage and profile in SiGe channel, optimization of thickness of dioxide and silicon cap layer, and adjustment of threshold voltage.In the light of these principles, a SiGe PMOSFET is designed and fabricated successfully.Measurement indicates that the SiGe PMOSFET‘s(L=2μ同洒45 mS/mm(300K) and 92 mS/mm(77K) ,while that is 33mS/mm (300K) and 39mS/mm (77K) in Si PMOSFET with the same structure.     

B在SiGe中的应变补偿作用

用超高真空化学气相淀积方法生长出不同硼(B)掺杂浓度的应变SiGe合金材料，研究了B对SiGe合金的应变补偿作用. 结果表明，B的掺入使SiGe的应变减小，B对Ge的应变补偿率为7.3，即平均掺入1个B原子可以补偿7.3个Ge原子引起的应变. 同时获得B的晶格收缩系数为6.23e-24cm3/atom.     

Some silicon-based heterostructures for optical applications

In this paper, we will present our recent research on the growth and characterization of some Si-based heterostructures for optical and photonic devices. The heterostructures to be discussed are ZnO nanorods on Si, SiO₂, and other substrates such as SiN and sapphire. We will also consider strained Si_1−xGe_x/Si heterostructures for Si optoelectronics. The performance and functionality extension of Si technology for photonic applications due to the development of such heterostructures will be presented. We will focus on the results of structural and optical characterization in relation to device properties. The structural characterization includes x-ray diffraction for assessment of the crystallinity and stress in the films and secondary ion mass spectrometry for chemical analysis. The optical properties and electronic structure were investigated by using photoluminescence. The device application of these thin film structures includes detectors, lasers, and light emitting devices. Some of the Si-based heterostructures to be presented include devices emitting and detecting up to the blue-green and violet wave lengths.     

放电等离子烧结制备Si80Ge20B0.6合金及其热电性能

采用高能球磨与放电等离子烧结相结合的方法制备出了单相Si80Ge20B0.6合金块体热电材料.在400～900K 温度范围内对其进行了热电性能测试.粉末冶金法制备的合金内的晶界对载流子形成散射,保温时间较长的试样的电导率明显高于保温时间较短的试样.所有试样的热导率处于2.7～4.5W/(mK)范围.保温9min的试样在...     

SiGe HBT射频噪声模型研究

对现代的双极型晶体管而言,载流子在基极和集电极的空间电荷区（CB SCR）传输延迟可比基极渡越时间,甚至要大于后者。为了更精确地表征了SiGe HBT的射频噪声性能,对van Vliet模型做了扩展,使其包含基极集电极空间电荷区的延迟效应。用2个与噪声相关的延迟时间对transport模型进行了扩展,使得在没有非准静态Y参数的情况下仍然可以对基极和集电极电流噪声进行精确建模。最后,在JC=12.2 mA/μm2,AE=0.12×18μm2条件下,分别对2种模型的基极和集电极噪声电流谱及其归一化相关系数做图并与计算得出的解析值相比较,验证了模型的有效性。     

SiGe HBT MEXTRAM模型参数的直接提取

提出了一种锗硅异质结双极晶体管(SiGe HBT)MEXTRAM集约模型参数的直接提取方法。该方法通过有效地区分各种器件物理效应对器件性能的影响,无需电路仿真器,就能够提取器件的模型参数,简便实用。通过提取实验制备的SiGe HBT器件的整套MEXTRAM模型参数,仿真曲线与测试数据吻合良好,证实了该方法的精确性和有效性。