硅外延片中的杂质控制

有5类掺杂源影响硅的外延片中的杂质分布。主掺杂质控制外延层的杂质浓度，决定外延层的电阻率。固态外扩散、气相自掺杂和系统自掺杂影响衬底界面附近的外延层杂质浓度的深度分布。该文介绍了此3类掺杂源的掺杂过程和抑制方法。金属杂质在外延层中对器件有害，防止沾污和使用吸杂技术能降低金属杂质在外延层中的浓度。     

Homogenization of hardness distribution and distortion in high pressure gas quenching

Quenching with gases rather than oil or other liquid media has the advantages of reducing the risks concerning health and environment, while simultaneously homogenizing the quenching results and minimizing distortion due to a wide range of possible process parameter variations and the pure convective heat transfer. In this contribution, a coupled solution for increasing homogenization of quenching results within high pressure gas quenching will be presented. In the first stage, an experimental test facility was set up for flow investigations and in the second stage a numerical simulation model was generated. The numerical and experimental results of the flow through the chamber were compared for several boundary conditions. Finally, after complete verification of the simulation, the model may be used to assist in parameter variation for optimization of homogeneous high pressure gas quenching.     

Stretchable Gold Tracks on Flat Polydimethylsiloxane (PDMS) Rubber Substrate

A process to fabricate stretchable gold tracks on silicone rubber substrates is studied by XPS, static water contact angle measurement, AFM, and SEM. The process involves several steps: removing uncured oligomers by hexane Soxhlet extraction; pre-stretching the substrate; activating the strained silicone surface by an oxygen plasma treatment; coating the strained substrate with 5 nm titanium and 80 nm gold layers; and finally releasing the sample. The plasma treatment creates a thin brittle silica-like layer that temporarily increases the substrate's surface energy. Indeed, the plasma treatment is followed by a hydrophobic recovery. As a consequence, the delay between plasma treatment and metal deposition has to be reduced as much as possible. The silica-like layer can be nicely observed after release. The entire process allows us to obtain stretchable metallized samples that remain conductive even after an excessive deformation leading to electrical failure.     

Effect of carbon surface oxidation on platinum supported carbon particles on the performance of gas diffusion electrodes for the oxygen reduction reaction

The effect of carbon surface oxidation on platinum supported carbon particles (Pt/C) with nitric acid was investigated by cyclic voltammetry, electrochemical impedance spectroscopy, polarization experiments and chronoamperometry. Cyclic voltammograms, polarization curves and electrochemical impedance spectra showed that the treated catalyst had much larger active surface area and higher ionic conductivity than the untreated catalyst, and provided enhanced performance for oxygen reduction. The formation of acidic groups was examined by IR spectra. The Pt/C surface oxidation had a large effect on the performance of a gas diffusion electrode for oxygen reduction reaction.     

Water and salt permeability of reinforcement polymer‐gel composite membrane

The charged mosaic polymer membrane (CMM) without reinforcement and the composite charged mosaic polymer membrane (CCMM) with reinforcement were investigated in terms of salt and water transport (permeability). The composite charged mosaic polymer membrane (CCMM) with reinforcement showed a unique transport behavior such as preferential material transport L_p and ω. Water permeability coefficient, L_p and salt permeability coefficient, ω were estimated by taking account of active layer thickness of composite polymer gel. The L_p and ω values of CCMM with reinforcement were larger than those of CMM without reinforcement. On the other hand, the reflection coefficient of CCMM, σ, showed negative value, which suggested preferential material transport to solvent transport. © 2008 Wiley Periodicals, Inc. J Appl Polym Sci, 2008     

微型集散系统通用过程控制软件包

本文给出一种新的基于ＭＣＳ－５１单片机集散系统通用过程控制软件包的设计原理及其实施方法。文中重点地阐述了微型集散系统的构在民，通用过程控制软件的自动生成，主要数据结构与程序结构，实现方法及关键技术等。本软件包是采用ＴＵＲＢＯＣ２．０版本和ＭＣＳ－５１泄编语言编程的，并通过了ＭＣＳ－５１组合软件的编译，形成了可用的目标码程序系统。     

全金属反射光学系统结构的有限元分析

用有限元分析方法对全金属反射光学系统在各种受力状态下的变形、应力及固有频率做了全面的分析，并给出了结构多次优化后的分析结果。     

A Study of Surface Deformation during Wire‐Rod Rolling of High Speed Steels using Experimental and Computational Techniques

The evolution of surface defects during shape rolling of high‐speed steel billets is studied using longitudinal surface defects prepared by machining and welding. The reduction of the defects during rolling in a production mill is compared to the total area reduction of the billets. Samples are collected after pass 4, 6, 8, 14, 19 and the final pass, 28, representing the finished 5.5mm wire. By inspecting the cross sections, the rotation of the billets from pass to pass is evaluated. Results from FE simulations on solid billets are compared to the experimental results. Generally, simulations predict less reduction than observed experimentally. In most cases cracks reduce most effectively followed by carbon steel welds and stainless steel welds.