Simulation and fabrication of piezoresistive membrane type MEMS strain sensors

Two piezoresistive (n-polysilicon) strain sensors on a thin Si₃N₄/SiO₂ membrane with improved sensitivity were successfully fabricated by using MEMS technology. The primary difference between the two designs was the number of strips of the polysilicon patterns. For each design, a doped n-polysilicon sensing element was patterned over a thin 3 μm Si₃N₄/SiO₂ membrane. A 1000×1000 μm² window in the silicon wafer was etched to free the thin membrane from the silicon wafer. The intent of this design was to fabricate a flexible MEMS strain sensor similar in function to a commercial metal foil strain gage. A finite element model of this geometry indicates that strains in the membrane will be higher than strains in the surrounding silicon. The values of nominal resistance of the single strip sensor and the multi-strip sensor were 4.6 and 8.6 kΩ, respectively. To evaluate thermal stability and sensing characteristics, the temperature coefficient of resistance [TCR=(ΔR/R₀)/ΔT] and the gage factor [GF=(ΔR/R₀)/] for each design were evaluated. The sensors were heated on a hot plate to measure the TCR. The sensors were embedded in a vinyl ester epoxy plate to determine the sensor sensitivity. The TCR was 7.5×10⁻⁴ and 9.5×10⁻⁴/°C for the single strip and the multi-strip pattern sensors. The gage factor was as high as 15 (bending) and 13 (tension) for the single strip sensor, and 4 (bending) and 21 (tension) for the multi-strip sensor. The sensitivity of these MEMS sensors is much higher than the sensitivity of commercial metal foil strain gages and strain gage alloys.     

Smart Electroceramics

"Smart" materials have the ability to perform both sensing and actuating functions. Passively smart materials respond to external change in a useful manner without assistance, whereas actively smart materials have a feedback loop which allows them to both recognize the change and initiate an appropriate response through an actuator circuit. Many smart materials are analogous to biological systems: piezoelectric hydrophones are similar in mechanism to the "ears" by which a fish senses vibrations. Piezoelectrics with electromechanical coupling, shape-memory materials that can "remember" their original shape, electrorheological fluids with adjustable viscosities, and chemical sensors which act as synthetic equivalents to the human nose are examples of smart electroceramics. "Very smart" materials, in addition to sensing and actuating, have the ability to "learn" by altering their property coefficients in response to the environment. Integration of these different technologies into compact, multifunction packages is the ultimate goal of research in the area of smart materials.     

FBG传感器在水下结构工程中的应用

近年来,光纤光栅传感技术在我国发展很快,已经在桥梁、土建等多个领域中得到了应用,但在水工领域的应用还很少.本文结合白鹤梁工程实例,探索该项技术在这一领域应用的可行性.开展的光纤光栅应变、温度传感器在水下工程领域中较大规模的应用研究结果表明：FBG具有很好的防水性能,测试精度高,长期稳定性好,信号传输距离远,为水下结构的长期监测提供了一种可靠有效的手段.     

Polarization control scheme for surface plasmon and optical guided mode control detection

A technique based on what is known as polarizer–compensator–sample–analyzer (PCSA) scheme in ellipsometry, combined with the Kretschmann configuration to excite plasmon and waveguided modes is described. The system allows the control of the polarization state of the reflected light and is shown to have higher sensitivity than the measurement of only the amplitude of the reflected light. We show the response of the system to variations in temperature and small changes in the refractive index of a liquid.     

特殊场合下的温度测量技术

对于测量条件恶劣，不能用常规传感器实现的特殊场合，如高温强腐蚀性介质、真空、高温熔体及核辐射条件下的温度测量，必须开发特种专用传感器。本文阐述了钨铼热电偶等特种温度传感器的特点、性能及应用，并着重探讨了当前测温领域热点问题。铝液、铜液及熔盐等高温溶体连续测温；高温渗碳、真空粉末治金烧结炉(气)等强还原性气氛下的温度测量：流化床等流动粉体等高温强磨损条件下的温度测量技术等。实践证明，新开发的特殊场合下专用温度传感器，不仅与国际接轨，替代进口产品，而且还可以打入国际市场。     

Monitoring Moisture Uptake and Delamination in CFRP-Reinforced Concrete Structures with Electrochemical Impedance Sensors

Electrochemical impedance spectroscopy (EIS) sensors have been used to inspect carbon fiber reinforced polymer (CFRP) -reinforced concrete structures exposed to a variety of test conditions. Similar specimens were also used to investigate the detection of delamination between the CFRP and the concrete using a modified wedge test configuration. The use of external electrodes attached to the CFRP surface, coupled with the embedded rebar, provided the best results. Equivalent circuit modeling was used to analyze the impedance spectra. Several circuit parameters, especially the capacitance and constant phase element (CPE) magnitude, correlated very well with both bonded area/delamination and moisture. Both parameters exhibit a linear relationship with delamination area. The capacitance also showed a linear relationship with moisture content while the CPE was more strongly dependent on moisture. Differences in the response of the specimens subjected to the different exposure conditions were seen and explained based on the moisture uptake of the various specimens.     

Integrated solid-state nanopore devices for third generation DNA sequencing

Third generation DNA sequencing relies on monitoring the ionic current blockage during the DNA molecule’s threading through a nanoscale pore.It is still really tough to attain the single base discrimination on a DNA strand by merely analyzing the ionic current due to speedy DNA translocation and low spatial resolution.More integrated configurations are pursued to present versatile comparative dissimilarities of the four bases by enhancing the spatial resolution within a DNA molecule translocation event,such as transverse tunneling current,local potential change,and capacitance oriented voltage resonance.In this mini review,the insight is provided into the status quo on several functionalized techniques and methodologies for DNA sequencing and furthermore concluding remark and outlook are presented.     

光纤电磁场传感器中调制与解调电路的设计及实现

文［１］提出光纤电磁场传感器中的光调制与电解调技术。本文针对光纤电磁场传感器中的一些特殊问题，着重讨论光调制与电解调电路的设计原理。并将实现的电路应用于单光路检测的光纤电磁场传感器中，实验测试取得满意的结果。     

基于适配体检测水果及其制品中棒曲霉素方法的研究进展

棒曲霉素是广泛分布于各种水果、谷物及农产品中的一种真菌毒素,在较低浓度下产生持久性的毒性作用对人类和动物健康造成严重的危害,因此棒曲霉素在水果及其制品中快速检测方法的研究引发广泛关注。适配体传感器因灵敏度高、耗时短、易操作及开发成本低等优点,在毒素快速检测方面具有潜在的开发和应用优势。本综述从棒曲霉素适配体筛选入手,着重介绍了基于电化学、光学和光电化学原理的适配体传感器在检测毒素中的应用,并展开分析其当前的发展现状、局限性和未来发展前景,旨在对水果及其制品中棒曲霉素快速检测方法的研究和发展提供一定的参考。     

轿车发动机电控喷射系统用新型传感器的开发

天津大学在国家“８６３”新材料领域的资助下,研制开发新型氧敏薄膜材料,研制出近百个Ａ／Ｆ传感器样件。该样件材料新颖,结构简单,响应速度快,成本低,具有独立知识产权。装在夏利车上,与国外生产进行了排放控制试验比较。试验结果表明,控制能力达到国外生产件水平;响应速度比后者快。