Formation of low-resistivity poly-Si and SiNx films by Cat-CVD for ULSI application

In this paper, bulk-Si metal–oxide–semiconductor field effect transistors (MOSFETs) are fabricated using the catalytic chemical vapor deposition (Cat-CVD) method as an alternative technology to the conventional high-temperature thermal chemical vapor deposition. Particularly, formation of low-resistivity phosphorus (P)-doped poly-Si films is attempted by using Cat-CVD-deposited amorphous silicon (a-Si) films and successive rapid thermal annealing (RTA) of them. Even after RTA processes, neither peeling nor bubbling are observed, since hydrogen contents in Cat-CVD a-Si films can be as low as 1.1%. Both the crystallization and low resistivity of 0.004 Ω·cm are realized by RTA at 1000 °C for only 5 s. It is also revealed that Cat-CVD SiN_x films prepared at 250 °C show excellent oxidation resistance, when the thickness of films is larger than approximately 10 nm for wet O₂ oxidation at 1100 °C. It is found that the thickness required to stop oxygen penetration is equivalent to that for thermal CVD SiN_x prepared at 750 °C. Finally, complementary MOSFETs (CMOSs) of single-crystalline Si were fabricated by using Cat-CVD poly-Si for gate electrodes and SiN_x films for masks of local oxidation of silicon (LOCOS). At 3.3 V operation, less than 1.0 pA μm⁻¹ of OFF leakage current and ON/OFF ratio of 10⁷–10⁸ are realized, i.e. the devices can operate similarly to conventional thermal CVD process.     

Synthesis of nano particle of inorganic oxides by polymer matrix

Ultrafine (⩽ 150 nm) powders of spinels [MFe₂O₄ where M = Ni(II), Co(II) and Zn(II)]; rare-earth orthoferrites [RFeO₃ where R = Sm, Nd and Gd], and rare-earth garnets [R₃Fe₃O₁₂ where R = Sm, Nd and Gd] with good purity and chemical homogeneity were prepared through two new versatile chemical routes. The first route involved the coprecipitation of the desired metal nitrates from their aqueous solution, in presence of a water soluble polymer-polyvinyl alcohol (PVA), by triethyl ammonium carbonate solution. The other process involved complete evaporation of a mixture of optimum amounts of PVA and the desired aqueous metal nitrate solutions, with and without the addition of optimum amounts of urea when the mixture was evaporated to a pasty mass. In addition, detailed study on the reported potassium ferricyanide route was also carried out for the production of the rare-earth orthoferrite powders. The various precursor as well as the heat-treated mixed-oxide powders, prepared through each of the routes, were compared by the physical characterization studies involving thermal gravimetry and differential scanning calorimetry, infrared spectroscopy, X-ray powder diffraction, transmission electron microscopy, and room temperature magnetic measurements.     

水对植物纤维水泥复合板生产的影响

研究了水对植物纤维水泥复合板性能的影响。选择合适的水分可以提高板材静弯曲强度,减小板材变形。     

胶溶法合成 TiO_2超微粒子

用胶溶法合成了 TiO_2超微粒子。研究了反应物浓度、胶溶剂用量、胶溶温度对胶溶过程的影响,以及表面活性剂 DBS 的量与 Ti 萃取率的关系。探讨了合成超微粒子 TiO_2的最佳条件,分析了产品的特性。200℃热处理得到的产品为非晶型圆球状,粒度均匀,平均6.0nm,在许多有机溶剂中具有良好的分散性和透明性。550℃得到晶态锐钛矿型超微粒子 TiO_2,粒度为8.5nm。700℃热处理得到金红石型TiO_2,粒度为33.2nm。     

化学水汽监督存在的问题及建议

水汽监督是化学监督的主要内容。通过提高水汽品质，可以防止和减缓热力设备腐蚀、结垢、积集沉积物，提高设备的安全性，延长设备的使用寿命。针对目前河北南部电网化学水汽监督工作中存在的主要问题进行了分析，提出了改进措施和处理建议。     

Provision of accuracy for quantitative determination of small amounts of components: Principles of resolving the problem and their realization

Versions are suggested for resolving the problem of monitoring the accuracy of determining small amounts of components in samples of substances and materials. __________ Translated from Izmeritel'naya Tekhnika, No. 1, pp. 52–57, January, 2006.     

某供用电综合楼地下基础底板堵漏防水技术

结合工程概况，分析了负二层地下基础底板渗漏的原因，介绍了防水堵漏方案的设计与优选以及主要施工工艺，实践证明，该工程堵漏防水技术可靠，效果良好，保证了工程的顺利进行。     

环氧玻璃钢衬里在化工设备中的应用

本文叙述了非标准化工设备的环氧玻璃钢防腐衬里工艺、配方及使用考查结果．     

半导体元件清洗技术浅谈

随着社会的进步和科学技术的迅猛发展,对洗净技术的要求也越来越高。清洗方式多种多样,但最主要的是突出在喷射清洗和超声波清洗两大方面,应用于全国各行各业,并且也得到了明显进步。     

煤矸石作水泥混合材的活化方法研究

论述了煤矸石用作水泥混合材时如何激发其活性的若干方法 ,介绍了通常所用的热激活、物理激活和化学激活煤矸石的机理。实验显示了各种激活方法的效果 ,近而讨论了提高煤矸石活性时应注意的问题