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报道了一种基于负电阻温度系数的多晶硅电阻电热激励/压阻检测SiO 2/Si3N4/SixNy微桥谐振器的新型红外探测器.微桥谐振器吸收的红外辐射引起微桥温度升高,激励电阻和检测电桥的阻值减小,使得恒定激励电压作用下激励电阻的静态功率和惠斯登电桥的焦耳热增加,等效于增加了辐射在微桥谐振器上的红外辐射.初步的实验证实了该方案的可行性. 相似文献
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S. K. Mishra L. C. Pathak S. K. Ray S. Kal D. Bhattacharya S. K. Lahiri K. L. Chopra 《Journal of Superconductivity》1992,5(5):445-449
Microbridges of YBa2Cu3O7 thin films have been fabricated by conventional photolithography and wet chemical etching using EDTA, and by the lift-off lithography technique. The variation of etch rate with etch time, etchant temperature, and post-deposition sintering temperature has been studied. It has been shown that both techniques are useful for film patterning. However, an additional sintering step is necessary for the chemically etched sample to regain the original film properties. An order of increase in critical current density is observed for the patterned film. 相似文献
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Microbridge testing is used to measure the Young's modulus and residual stresses ofmetallic films. Nickel film microbridges with widths of several hundred microns arefabricated by Microelectromechanical Systems. In order to measure the mechanicalproperties of nickel film microbridges, special shaft structure is designed to solve theproblem of getting the load--deflection curves of metal film microbridge by Nanoin--denter XP system with normal Berkovich probe. Theoretical analysis of the micro--bridge load--deflection curve is proposed to evaluate the Young's modulus and residualstress of the films simultaneously. The calculated results based on the experimentalmeasurements show that the average Young's modulus and residual stress are around190GPa and 175MPa respectively, while the Young's modulus measured by Nano-hardness method on nickel film with silicon substrate is 186.8±7.34GPa. 相似文献
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微桥结构Ni膜杨氏模量和残余应力研究 总被引:2,自引:0,他引:2
采用MEMS(MicroelectromechanicalSystems)技术研制了镍(Ni)膜微桥结构试样,应用陶瓷压条为承力单元,与纳米压痕仪XP系统的Berkovich三棱锥压头相结合,解决了较宽Ni膜微桥加载问题。测量了微桥载荷与位移的关系,并结合微桥力学理论模型得到了Ni膜微桥的杨氏模量及残余应力,其值分别为190.5GPa和146MPa,与应用纳米压痕仪直接测得的带有Si基底的Ni膜杨氏模量186.8±7.34GPa相吻合。 相似文献
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D K Walia A K Gupta G S N Reddy V N Ojha V S Tomar Neeraj Khare N D Kataria K C Nagpal 《Bulletin of Materials Science》1991,14(4):1119-1123
Superconducting Bi-Sr-Ca-Cu-O (2212) films were prepared by spraying stoichiometric aqueous solutions of nitrates of bismuth,
strontium, calcium and copper on heated MgO (100) substrates and subsequent annealing in air. TheR-T curves of the films show metallic behaviour above the superconducting transition temperature.T
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(R=0) is observed between 80 and 85 K. Annealing temperature has a profound effect onT
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(R=0) and on the orientation of the film. Annealing in air in near-melting region yields highly oriented films withc-axis perpendicular to the substrate. These films show a sharp superconducting transition with zero resistance at 85 K. Microbridges
of the dimensions of 50 μm × 50 μm have been patterned photolithographically followed with chemical etching. The 1 V characteristics
of the microbridges show Josephson effects due to the presence of grain boundary weaklinks. The temperature dependence of
the critical current for these microbridges suggest formation of superconductor-normal-superconductor type weaklinks. 相似文献