Tensile testing of silicon thin films

The tensile strength of silicon thin films was investigated using a specimen chucking system dedicated for microscale specimens. The system uses electrostatic force to fix and hold the free end of the cantilever‐shaped specimens. The thin film tensile tester was built using this system. The accuracy and reliability of this method were assured by comparing it with other tensile‐testing methods using single‐crystal silicon specimens. The result shows good agreement between the testing methods. The strength properties of polysilicon thin films, such as the effect of the testing environment and the specimen size and the film fabrication conditions, were investigated.     

Radiation tolerant nano-FED biosensing for space application

A p-type polysilicon nanowire and silicon nano-channel combination based biosensor was developed, which has the potential to detect pathogens and thus protect crew safety aboard long-term manned flight programmes in high radiation space flights. This study outlines structures, which compose the biosensor, and demonstrates that the nano-device utilised herein is total dose radiation hardened. Highly doped polysilicon nanowires (30–100?nm) in nano-field-effect device (FED) were fabricated on silicon/silicon dioxide wafers and insulated with a thin polyimide layer. When the targeted gene, Escherichia coli DH5 alpha 16S rRNA, incubated on the device surface, the constant overall impedance increased or decreased depending on the electronic charge, mass and composition of the target molecule. All measurements were carried under 25 MeV S-Band linear accelerator followed by impedance measurements. Current sets of experiments show these nano-FED can form the basis of a robust, very sensitive handheld tool for pathogen detection in space application.     

还原炉进料夹液对生产的影响及控制措施

分析了多晶硅还原炉进料夹液产生的原因及其对生产的影响。主输送管位置高于各还原炉进料管是产生进料夹液的主因,进料夹液易造成还原炉跳停、控制不稳定等故障,可通过降低主输送管的位置、输送管设置电伴热、还原炉进料管配置排液管等措施解决还原炉进料夹液的问题。     

基于负温度系数的多晶硅电阻电热激励/压阻检测微桥谐振器的新型红外探测器

报道了一种基于负电阻温度系数的多晶硅电阻电热激励/压阻检测SiO 2/Si3N4/SixNy微桥谐振器的新型红外探测器.微桥谐振器吸收的红外辐射引起微桥温度升高,激励电阻和检测电桥的阻值减小,使得恒定激励电压作用下激励电阻的静态功率和惠斯登电桥的焦耳热增加,等效于增加了辐射在微桥谐振器上的红外辐射.初步的实验证实了该方案的可行性.     

多晶硅废气淋洗系统的应用

废气淋洗装置是多晶硅生产线的重要组成部分。本套废气淋洗装置充分改进了传统西门子法制取多晶硅废气淋洗的工艺,实现了机械化、自动化,具有自动化程度高,氯硅烷处理能力大,工艺稳定等优点。     

弱磁技术在非铁磁性材料检测中的应用研究

提出一种能够应用于铁磁性与非铁磁性材料缺陷检测的弱磁检测技术,并以多晶硅和7A09铝合金两种非铁磁性材料为例,阐述了该技术检测非铁磁性材料的一般过程,即测试材料磁导率、设计实验、采集信号及信号分析。多晶硅自然缺陷检测实验表明,弱磁检测技术能够检测直径为10 μm的夹杂缺陷;铝合金人工缺陷检测实验表明,对于Φ0.4 mm的孔型缺陷和深度为1~2 mm的槽型缺陷,弱磁检测技术都具有很好的检测效果;验证了这种检测方法在非铁磁性材料检测中的可行性。     

硫铁矿烧渣制聚硅硫酸铁工艺条件探讨

以硫铁矿烧渣及水玻璃为原料制备无机高分子絮凝剂聚硅硫酸铁(PSFS),产品成本低,净水效果好,达到了烧渣综合利用的目的.本文研究了不同调节酸及陈化时间对活化硅酸的影响;不同Si/Fe摩尔比对净水效果的影响;同时考察了引入硼离子后对净水效果及产品稳定性的影响.确定以盐酸为调节酸、陈化时间12～14 h、Si/Fe摩尔比0.8为最佳条件.     

板式PECVD设备维护后初期的生产品质提升方案

以板式PECVD设备维护后的初期在多晶硅片表面镀的氮化硅薄膜为研究对象,分析了其膜厚、折射率、腐蚀速率等数据,以及此种镀膜情况下制备的多晶硅太阳电池的电性能.结果表明:在设备维护后初期(约1 h)镀制的氮化硅薄膜,随着时间的推移,氮化硅薄膜的膜厚不断下降,折射率随之上升,二者分别从第48 min和第56 min开始趋于...     

多晶硅量子效应及其对MOSFET阈值电压的影响

根据载流子分布曲线近似,通过求解泊松方程,得到了多晶硅中电场及其电势的分布,计算了在不同掺杂浓度下多晶硅量子效应所引起的MOSFET阈值电压的偏移,并与数值模拟的结果进行了比较,表明其具有较好的准确性。     

一种以多晶硅为振动膜的MEMS传声器研制

给出了以磷掺杂的多晶硅为振动膜的电容式MEMS传声器的研制过程。从等效电路模型出发,研究了电容式MEMS传声器的振动特性和灵敏度,给出了传声器灵敏度随振动膜张力、膜与背板间的空气隙厚度、背板声孔大小及背板声孔所占面积而变化的解析表达式。结合硼掺杂硅/硅复合背板结构MEMS传声器,提供了参考制作工艺流程。样品测试在1kHz频率处的灵敏度达到-60dB(相对于1V/Pa)。