Modeling ion implantation of HgCdTe

Ion implantation of boron is used to create n on p photodiodes in vacancy-doped mercury cadmium telluride (MC.T). The junction is formed by Hg interstitials from the implant damage region diffusing into the MC.T and annihilating Hg vacancies. The resultant doping profile is n⁺/n^-/p, where the n⁺ region is near the surface and roughly coincides with the implant damage, the n^- region is where Hg vacancies have been annihilated revealing a residual grown-in donor, and the p region remains doped by Hg vacancy double acceptors. We have recently developed a new process modeling tool for simulating junction formation in MC.T by ion implantation. The interstitial source in the damage region is represented by stored interstitials whose distribution depends on the implant dose. These interstitials are released into the bulk at a constant, user defined rate. Once released, they diffuse away from the damage region and annihilate any Hg vacancies they encounter. In this paper, we present results of simulations using this tool and show how it can be used to quantitatively analyze the effects of variations in processing conditions, including implant dose, annealing temperature, and doping background.     

LDD方法在提高电路工作电压中的应用研究

研究了利用轻掺杂漏结构来制作高电源电压器件的工艺方法。分析了ＬＤＤ结构参数对器件击穿特性的影响，并结合实验结果对Ｎ＾－区的注入剂量，长度及引入的串联电阻进行了优化设计。     

NMOS器件两次沟道注入杂质分布和阈电压计算

分别考虑了深浅两次沟道区注入杂质在氧化扩散过程中对表面浓度的贡献。对两次注入杂质的扩散分别提取了扩散系数的氧化增强系数、氧化衰减系数和有效杂地系数，给出了表面浓度与工艺参数之间的模拟关系式，以峰值浓度为强反型条件计算了开启电压，文章还给出了开启电压、氧化条件、不同注入组合之间的关系式。     

费萨姆工艺无水氨精馏塔的模拟计算

本文以ＮＨ３－Ｈ２Ｏ系统Ｇｉｂｂｓ自由能、熵、焓和汽液相平衡的热力学模型为基础，用松弛法进行了无水氨精馏塔的模拟计算。改变无水氨采出比、回流比（直汽量）和进料板位置均影响蒸馏效果。     

小型过程控制器中编程功能的实现

根据中小规模生产设备过程控制的特点,提出了生产工艺程序在过程控制器中应具有的一般形式,并详细分析如何使小型过程控制器具有编辑这种工艺程序的功能。     

实体造型中的几何约束

实体造型是一个基于约束的过程，完成从功能约束到几何约束、再到代数约束的转化而得到实体模型。本文讨论了几何约束的层次性及其表示，并且对几何约束同设计意图的关系进行了研究，提出了基于ＣＳＧ／ＧＣＧ／Ｂ－ｒｅｐ的模型表示。     

A method of identifying latent human errors in work systems

Work system improvements are implemented in various manufacturing processes to prevent problems caused by human errors. However, they are almost always applied to problems which have already occurred. This paper examines a method of identifying latent human errors existing within the work systems beforehand. A procedure for applying failure mode and effect analysis to this identification problem was defined based on over 1000 empirical errors: a work system decomposition criterion and fundamental error modes for listing latent human errors, and then applied to three practical manufacturing processes in order to evaluate its effectiveness.     

冷轧形变量对钛板材再结晶织构形成的影响

采用三维晶体学取向分布函数（ＣＯＤＦ）分析法研究了工业纯钛板材不同冷轧形变量对织构形成的影响。结果表明，冷轧形变量为５０－７０％时，再结晶退火后形成了（２１１８）（０１１０）和（１０１８）（１２１０）的部分纤维织构，而在３０％较低或８６％较高的形变量冷轧时，形成典型的轧制织构（２１１５）（０１１０）和再结晶织构（１０１３）（１２１０）型式。     

1，4－丁二醇的生产及市场需求

介绍了１，４－丁二醇的生产工艺、生产能力、产量和市场需求。     

双塔脱丙烷工艺技术

对扬子乙烯装置双塔脱丙烷系统低压塔液泛、高压塔再沸器堵塞等问题进行了技术分析,提出了工艺流程修改方案,完善了双塔脱丙烷技术,对同类装置有参考价值。