一种Ku波段综合馈电多功能板的研制

基于多层微波数字复合基板层叠互联技术,研制的Ku波段综合馈电多功能板集成了射频收发网络、电源分配网络、阵面波控及波控分配网络,主要负责16个片式T/R组件的功率分配与合成,同时为各T/R组件提供电源及控制信号。文中对多功能板的架构设计、工作原理进行了说明,重点介绍了各微波垂直互联电路和射频收发网络的设计,最后加工并测试了验证样件,测试结果良好。收发网络总口驻波＜1.9,分口驻波＜1.3,插损＜16 dB,相邻端口的隔离度＞20 dB,且幅度一致性≤0.602 dB,相位一致性≤6.429°。工程应用可行性和实用性得到了验证。     

化学气相沉积制备大面积高质量石墨烯的研究进展

石墨烯是由单层碳原子紧密堆积形成的一种碳质新材料,具有优良的电学、光学、热学及力学等性质。在众多的石墨烯制备方法中,化学气相沉积(Chemical vapor deposition,CVD)最有可能实现大面积、高质量石墨烯的可控制备。综述了CVD方法制备大面积、高质量石墨烯的影响因素,包括衬底、碳源及生长条件(气体流量、生长温度、等离子体功率、生长压强、沉积时间、冷却速率等)。最后展望了CVD方法制备石墨烯的发展方向。     

衬底偏压对反应磁控共溅射 Y∶HfO2薄膜电学性能的影响

作为微电子器件中最具发展前景的高介电薄膜材料,HfO₂薄膜得到了学者们的广泛研究。低漏电流是HfO₂薄膜使器件获得优良性能的前提,但易受晶粒尺寸、氧空位和粗糙度等因素影响。针对反应磁控溅射所得薄膜表面粗糙度高及漏电流密度大等缺点,本文在溅射过程中通过在衬底施加偏压的方法降低了HfO₂薄膜的漏电流密度。结果表明：通过在衬底施加适当的偏压使得Y掺杂HfO₂(Y∶HfO₂)薄膜的漏电流密度降低到8×10^-8 A/cm²。漏电流密度的变化与薄膜粗糙度和晶粒尺寸有关,而薄膜粗糙度和晶粒尺寸主要受衬底偏压的影响,但衬底偏压对薄膜物相的影响可以忽略。通过施加衬底偏压,利用反应磁控溅射方法制备了低漏电流和高k值Y∶HfO₂薄膜,可为高性能器件的制备提供基础。     

Maskless writing of microfluidics: Rapid prototyping of 3D microfluidics using scratch on a polymer substrate

We present a new rapid prototyping method designed for simple fabrication of 3D microfluidics using a maskless direct writing technique on polymer substrates. The entire process is enabled by a commercial cutter plotter with 10 μm resolution precision and high speed. A CAD design of top and bottom microstructures is directly written on a polymer substrate using a cutter plotter after setting up the suitable force. The smallest channel width of 20 μm was obtained with the minimum force and 100 μm from the maximum. Also the written depth increased linearly with force from 30 to 130 μm. Several 3D microfluidic devices are demonstrated using a maskless writing technique. The entire fabrication process from CAD layout to a final 3D device can be completed in 30 min outside the clean room facilities.     

Investigation of Raman enhancement in hydrothermally roughened SERS-active substrates

In this work, we study surface enhanced Raman spectroscopy (SERS) active substrates for the detection of Rhodamine 6G. To examine the electromagnetic enhancement, we apply the finite-difference time-domain (FDTD) algorithm to analyze the structures by solving a set of coupled Maxwell's equations (Ampere's Law and Faraday's Law) in differential form. The field enhancements are thus investigated in the visible regime with the wavelength of 633 nm. In our experimental measurement, the surface enhanced Raman scattering signals from the surface of substrates with 12-hour treatment and without treatment are performed and compared. Through the three-dimensional (3D) FDTD calculation, we find that the hydrothermally 12-hour treated samples possess significantly vertical variations of surface and thus have relatively larger field enhancement than those without treated. Consequently, it implies a strong positive effect on the surface enhancement which is consistent with the measured intensity.     

基于改进的Voronoi图划分的边界元衬底耦合参数提取技术

提出了一种快速而准确的数模混合集成电路衬底耦合参数提取方法。采用边界元法求解衬底耦合电阻,与有限差分法相比,计算速度提高了一个数量级以上,且可以保持精度,结合改进的Ｖｏｒｏｎｏｉ图来划分版图,生成的衬底ＲＣ网络数目远小于同样采用Ｖｏｒｏｎｏｉ图的文献「４」,而且解决了文献「４」中由于解析公式计算衬底电阻导致精度不高的问题。     

1,3-丙二醇发酵过程中底物抑制及其对策的研究

研究了底物甘油浓度对Klebsiellapneumoniae发酵生产 1 ,3 丙二醇的影响 ,并通过实验确定了最佳的初始甘油浓度和甘油开始对产物生成产生抑制作用的浓度。针对底物抑制现象 ,提出了菌种驯化和流加甘油发酵两种解决途径。结果表明 :采用原始菌株发酵 ,适宜的甘油初始浓度为 642 .4mmol/L ,此时 1 ,3 丙二醇浓度和转化率分别可达 2 60mmol/L和 0 .492mol/mol;在较高甘油初始浓度 (789mmol/L)的情况下 ,经驯化培养获得的耐底物抑制菌株 ,可将最终 1 ,3 丙二醇浓度和转化率分别提高到 30 0 .9mmol/L和 0 .530mol/mol;采用流加甘油发酵工艺 ,1 ,3 丙二醇浓度和转化率分别可提高到 397.7mmol/L和 0 .62 5mol/mol。     

聚3—己基噻吩及其掺杂TiO2材料对NO2的气敏特性

制作了一种工作于室温下的NO2气体传感器。该传感器以有机聚合物聚3—己基噻吩(P3HT)为敏感材料,以聚对苯二甲酸乙二醇酯(PET)薄膜为柔性衬底。对敏感膜进行了SEM表征。室温下,对不同体积分数的NO2进行了测试,对器件尺寸的影响进行了分析,并对响应规律进行了总结。经实验,对NO2测试下限可达到0.2×10-6。为提高敏感性、减小恢复时间,尝试对敏感膜掺杂TiO2,并同未掺杂的敏感膜进行实验比较,发现对体积分数1.5×10-6的NO2,掺杂TiO2可将敏感性提高8%,恢复性也有明显改善,对周期为1060 s的循环测试表明:掺杂TiO2下阻值基本能完全恢复。     

基体拉伸法测试二氧化钛薄膜界面结合强度

利用热氧化法在工业纯钛表面形成氧化层,利用改进后的基体拉伸法研究了500和800℃加热1h所形成的氧化层和基体的结合强度,结果发现裂纹形貌与界面结合强度有关.500℃所形成的氧化层较薄,与基体的结合强度高,＞970MPa,裂纹方向与载荷轴向呈±45°;而800℃形成的氧化层较厚,与基体的结合强度差,＜495MPa,裂纹基本与载荷轴向垂直.