Flash-lamp annealing of semiconductor materials—Applications and process models

Flash-lamp annealing (FLA) on a millisecond time scale has been shown to be a promising tool in the preparation of high-quality semiconducting materials. The process imposes time varying through-thickness temperature profiles on the substrates being processed, and consequently thermal stresses. A combined thermal and optical model has been developed to predict the substrate temperature distribution and this model has been linked to a structural model to compute stresses and deflections. The paper shows how these models can be used to explore process conditions in flash lamp annealing, with particular regard to the annealing of ion implants in silicon and the crystallization of amorphous silicon layers on glass substrates.     

TiAl＋Sb合金的热稳定性的研究

研究了退火处理对Ｔｉ－３４ｗｔ．％Ａｌ－０．５ｗｔ．％Ｓｂ合金的室温抗弯性能，显微组织，相组成和断口形貌的影响。发现，低于１０００℃退火处理，ＴｉＡｌ＋Ｓｂ合金的显微组织没有变化，其力学性能仍然保持较高的值。此合金成分适应高温使用条件。     

Microstructural Effects of Ion Implantation on Molybdenum

The effects of ion implantation and subsequent annealing on the microstructure of molybdenum have been investigated by transmission electron microscopy. The ions investigated were carbon, nitrogen, and tellurium. The ion-induced damage was found to give rise to grain boundary migration phenomena both during implantation and during subsequent annealing. Precipitation or ordering was found to occur for each ion on annealing.     

液晶显示器生产中的激光退火和缺陷修复

由于在大面积玻璃基底上制备由多层材料构成的高质量薄膜晶体管象元驱动阵列工艺的复杂性，使有源矩阵液晶显示器（AMLCD）的成品率低、价格高。利用激光对AMLCD进行非晶硅薄膜的退火和电路缺陷的修复，可有效的改善AMLCD的性能，提高成品率和降低成本。本文在介绍了激光对非晶硅薄膜退火和电路缺陷修复常用激光器的特性后，讨论了激光对不同类型缺陷修复的原理和过程。最后，分析比较了不同类型激光退火方法的特点。     

Ion implantation doping of OMCVD grown GaN

Doping by ion implantation using Si, O, Mg, and Ca has been studied in single crystal semi-insulating and n-type GaN grown on a-sapphire substrates. The n-and p-type dopants used in this study are Si and O; Mg and Ca, respectively. Room temperature activation of Si and O donors has been achieved after 1150°C annealing for 120 s. The activation of Mg and Ca acceptors is too low to measure at both room temperature and 300°C. Using higher doses to achieve a measurable p-type conduction increases the amount of damage created by the implantation. Rutherford back scattering measurements on this material indicate that the damage is still present even after the maximum possible heat treatment. Secondary ion mass spectrometry measurements have indicated a redistribution in the measured profiles of Mg due to annealing.     

基于栅格法-模拟退火法的机器人路径规划

路径规划是机器人技术中的重要组成部分,分全局路径规划和局部路径规划。本文将栅格法与模拟退火法结合,采用栅格法表示环境信息。局部路径规划主要基于模拟退火法,使路径跳出局部极小点,到达目标位置。     

A force modulation study on crystallization process in ferroelectric vinylidene fluoride and trifluoroethylene copolymer films

This paper introduces the Force Modulation technique to the study of crystallization process in ferroelectric vinylidene fluoride and trifluoroethylene copolymer films. Using this technique we have successfully visualized ferroelectric crystalline domains and observed that these ferroelectric domains grow out from amorphous phase, unite into strip-like structures, and finally congregate into a union. Force Modulation can weaken the influence of topography on imaging of ferroelectric domains, and reveal more details, which are difficult to be observed in topographical image.     

Computer modeling of the continuous annealing furnace

A computer program to calculate the strip temperature heated in the continuous annealing furnace was developed, using the zone method for radiative heat transfer analysis with the measured gas temperature in the furnace. Using theF _E Operator, the present study considered the effects of soot and transient species, in addition to the H₂O−CO₂ gas mixture on the gas radiative heat transfer. The predicted strip temperature distribution forF _E=1.05 represented well the measured data. The maximum difference in the heat flux transfered to the strip from the combustion gas forF _E=1.0 (without soot and transient species gas radiation) and 1.05 (with soot and transient species gas radiation) was about 15%. The present study also investigated the effects of line speed and thickness variations on the strip temperature, establishing the bases for the on-line computer model.     

Improved accuracy and convergence of discretized population balance for aggregation: The cell average technique

A new discretization method for aggregation equations is developed. It is compared to the fixed pivot technique proposed by Kumar and Ramkrishna (1996a. On the solution of population balance equations by discretization—I. A fixed pivot technique. Chemical Engineering Science 51, 1311-1332). The numerical results for aggregation problems by discretized population balances are consistently overpredicting and diverge before the gelling point in the case of a gelling kernel. The present work establishes a new technique which assigns the particles within the cells more precisely. This is achieved by taking first the average of the newborn particles within the cell and then assigning them to the neighboring nodes such that pre-chosen properties are exactly preserved. The new technique preserves all the advantages of the conventional discretized methods and provides a significant improvement in predicting the particle size distribution (PSD). In addition, it is found that the technique is a powerful tool for the computation of gelling problems. The effectiveness of the technique is illustrated by application to several aggregation problems for suitably selected aggregation kernels including physically relevant kernels.     

Analytical characterization of cadmium cyanamide in CdS thin films and bulk precipitates produced from CBD process in pilot plant

CdS thin films and bulk precipitates were obtained by chemical bath deposition (CBD) in a well-closed reactor. X-ray diffraction spectroscopy, Fourier transform infrared spectroscopy, thermal analysis, elemental analysis and leaching have been used to characterize solids and thin films. It has been shown that the proportion of cadmium cyanamide in solids may vary from about 50% to 2% according to physicochemical conditions in solution (time after CBD, ammonia concentration) and that CdO results from CdCN₂ after air annealing of thin films. This last step also increases the crystallinity of the films.