Modeling of silicon oxynitride etch microtrenching using genetic algorithm and neural network

A prediction model of etch microtrenching was constructed by using a neural network. The etching of silicon oxynitride films was conducted in C₂F₆ inductively coupled plasma. The process parameters that were varied in a statistical experimental design include radio frequency source power, bias power, pressure, and C₂F₆ flow rate. The etch microtrenching was quantified from scanning electron microscope images. The prediction accuracy of optimized neural network model with genetic algorithm had a root mean-squared error of 0.03 nm/min. Compared to conventional model, this demonstrates an improvement of about 32%. The constructed model was used to infer etch mechanisms particularly as a function of pressure. Roles of profile sidewall variations were investigated by relating them to the microtrenchings. The pressure effect was conspicuous at lower source power, lower bias power, or higher C₂F₆ flow rate. Microtrenching variations could be reasonably explained by the expected ion reflection from the profile sidewall. The pressure effect seemed to be strongly affected by the relative dominance of fluorine-driven etching over polymer deposition initially maintained in the chamber.     

超临界干燥多孔硅的光致发光

对两种不同条件下制备的多孔硅进行了红外透射光谱测量，并对超临界干燥和自然干燥条件下的光致发光光谱进行了对比测量。用高分辨率透射电镜对其结构进行了观察，研究表明多孔硅的发光机理与其制备条件有关。     

SiC sedimentation and carbon migration in mc-Si by election beam melting with slow cooling pattern

The development of photovoltaic industry demands great amount of multicrystalline silicon. Carbon and SiC in silicon need to be contained in a limited amount since they can cause great adverse affect to solar cells. The behavior of carbon and its precipitation SiC in silicon by electron beam melting (EBM) with a slow cooling pattern was investigated in this study. SiC is found to sedimentate to ingot bottom after EBM. The presence of Si₃N₄ can be heterogeneous nucleation agent for SiC to nucleate continually and both of them precipitate to the ingot bottom. The comprehensive effect of slow solidification condition, temperature gradient and melt convection causes the sedimentation of SiC. It is also found that oxygen plays an important role on the migration of the dissolved carbon. The formation of carbon-oxygen complexes tend to migrate to ingot top since oxygen can transfer from silicon melt to vacuum environment during EBM.     

一种提高硅双极器件频率和功率的新技术

提出了一种能同时提高硅双极器件频率和功率的新技术－具有深阱终端结构的新型梳状深阱结构技术。采用ＭＥＤＩＣＩ模拟分析表明,该技术可交双极器件的击穿电压ＢＶＣＢ０提高到平行平面结的９０％以上;可减小寄生效应和漏电流,有助于提高小电流β０;可适当的增加集电区掺杂浓度,减小τｄ,同时提高ＩＣＭ和Ｐｏ。     

扩展电阻技术在硅,硅基材料测试中的应用

本文利用扩展电阻技术对半导体硅、硅基材料进行测试分析 ,从而用以开发新材料和评估材料的质量。     

SCLC法测量非晶硅有效隙态密度

提出了用空间电荷限制电流（SCLC）法测量非晶硅材料的有效隙态密度的新方法，并且报告了用4061A型半导体综合测试仪测量有效隙态密度的结果。测量结果发现与用低频电容法所得结果相符。     

Nanostructured Bulk Silicon as an Effective Thermoelectric Material

Thermoelectric power sources have consistently demonstrated their extraordinary reliability and longevity for deep space missions and small unattended terrestrial systems. However, more efficient bulk materials and practical devices are required to improve existing technology and expand into large‐scale waste heat recovery applications. Research has long focused on complex compounds that best combine the electrical properties of degenerate semiconductors with the low thermal conductivity of glassy materials. Recently it has been found that nanostructuring is an effective method to decouple electrical and thermal transport parameters. Dramatic reductions in the lattice thermal conductivity are achieved by nanostructuring bulk silicon with limited degradation in its electron mobility, leading to an unprecedented increase by a factor of 3.5 in its performance over that of the parent single‐crystal material. This makes nanostructured bulk (nano‐bulk) Si an effective high temperature thermoelectric material that performs at about 70% the level of state‐of‐the‐art Si_0.8Ge_0.2 but without the need for expensive and rare Ge.     

微机械可变电容制作工艺中的牺牲层释放和残余应力分析

运用高选择比的特别配方来释放MEMS可变电容制作工艺中的牺牲层,以保护上级板金属铝层,同时很好地释放牺牲层磷硅玻璃。探讨了上级板的粘附问题,对工艺中影响成品率的关键因素残余应力进行了模拟,当温度T为350℃时,平面应力P为811.6 MPa;当温度T为500℃时,平面应力P为1 185.9 MPa。分析了残余应力对上级板的影响和对悬臂梁的等效弹性系数的影响。     

Self-diffraction in Porous Silicon/PMMA-DR1 Composite Films

Two-layer structure consisting of PS/PMMA-DR1 composite film planar waveguide layer on porous silicon cladding layer was fabricated in our experiment. The induced grating based on the third nonlinear optical properties was formed by interaction of two Nd ： YAG laser beams at 1 064 nm in the porous silicon/PMMA-DR1 waveguide. The diffraction efficiency of the first order diffracted light is measured to be about 0.2% of the total output.     

A Silicon–Silica Nanocomposite Material

The synthesis and characterization of a novel silicon–silica nanocomposite material are reported. A self‐assembly method allows the encapsulation of silicon nanoclusters within the channels of a periodic mesoporous silica thin film. The result is the formation of a silicon–silica nanocomposite film with bright, room‐temperature photoluminescence in the visible range, and a nanosecond luminescence lifetime. The properties of the nanocomposite material have been studied by several analytical techniques, which collectively show the existence within the channels of non‐diamondoid‐structure‐type silicon nanoclusters with various hydrogenated silicon sites. It is estimated that the silicon nanoclusters in the silica mesoporous films occupy up to 39 % of the accessible pore volume. The nanocomposite film shows improved resistance to air oxidation compared to crystalline silicon. The high loading and chemical stability to oxidation under ambient conditions are important advantages in terms of the development of silicon‐based light‐emitting diodes from this class of materials.