Characterization of strength properties of thin polycrystalline silicon films for MEMS applications

The aim of this work is to characterize the strength properties of polycrystalline silicon (polysilicon) with the use of tensile and bending test specimens. The strength of thin polysilicon films with different geometry, size and stress concentrations has been measured and correlated with the effective size of the specimen and its stress distribution. The test results are evaluated using a probabilistic strength approach based on the weakest link theory with the use of STAU software. The use of statistic methods of strength prediction of polysilicon test structures with a complex geometry and loading based on test values for standard material tests specimen has been evaluated.     

RD取样器及其应用

RD取样器是在APR-M2工具基础上发展起来的专用取样设备，由取样心轴、取样外筒、破裂盘、样品腔几部分组成。与RD安全循环阀配合使用，完全可以替代APR-M2工具，具有取样准确、缩短施工工期，取样过程简单、安全等特点。     

井冈山水厂设计体会

阐述水厂设计中对水厂规模、水源地、净水厂位置及净水工艺的确定过程，根据原水的特点，通过分析对无阀滤池进行改良。     

Coordinating production and distribution of jobs with bundling operations

We consider an integrated scheduling and distribution model in which jobs completed by two different machines must be bundled together for delivery. The objective is to minimize the sum of the delivery cost and customers' waiting costs. Such a model not only attempts to coordinate the job schedules on both machines, but also aims to coordinate the machine schedules with the delivery plan. Polynomial-time heuristics and approximation schemes are developed for the model with only direct shipments as well as the general model with milk-run deliveries.     

矿石中金的快速测定

研究了活性炭纤维滤布富集分离的条件和解脱方法,并利用微波溶样、液珠萃取比色法测定矿石中的金。该方法的测定范围为(0.5~xx)×10-6,相对标准偏差RSD为3.2%,可用于矿石中金的野外快速测定。     

亚毫米波系统探测距离分析

本文提出了距离的概率分布函数作为系统的性能指标，提高了系统评价的准确性。     

阳平关砂金矿精选厂尾矿综合回收的研究

本文详细的介绍了陕西省阳平关砂金矿精选厂尾矿金和其他可利用的矿物综合回收方法和最佳分选流程。     

高效率平面磁控溅射器的研制

介绍一种新型磁控溅射装置。它采用两块极性相对的环状磁铁的设计方法，通过扩大靶表面的等离子放电区域面积，使传统磁控溅射枪使用中经常受到的两个限制──溅射速率与靶的利用率得到了较大的改善。实验中铜靶在溅射功率密度为11W／cm~2时溅射速率约为800nm／min，如果继续提高功率则可获得更高的速率。而靶的利用率可达64％左右。另外，在认为出射粒子符合cos~nθ分布的前提下，发现当n＝3．3时，实验数据和理论数据符合得较好。     

热镀钢丝膜层的冷凝计算

分析了热镀钢丝自液池引出过程中的热传导，得出了温度分布的解析解，从而计算钢丝表面膜层达到凝固温度时的提抽高度，为结构设计及确定冷却装置的合理位置提供依据。