The influence of substrate orientation on the density of silicon nanowires grown on multicrystalline and single crystal substrates by electron cyclotron resonance chemical vapour deposition

The Au catalysed, vapour-liquid-solid growth of Si nanowires on Si substrates of different orientations has been studied using electron cyclotron resonance plasma-assisted chemical vapour deposition (ECRCVD). ECRCVD plasma excitation is found to strongly promote wire growth rate and density with wire diameters in excess of 200 nm under the conditions used. Substrate orientation and nanowire density are strongly correlated. This has been studied using multicrystalline as well as single crystal Si substrates. It is suggested that the Gibbs-Thomson effect can account for the behaviour of wire density with orientation. The application of an RF generated, DC self-bias of − 5 V on the substrate during growth strongly enhances wire density without affecting growth rate or diameter. A tentative model for wire growth has been proposed which is based on an initial incubation/crystallisation step, followed by silicon incorporation at the vapour-liquid interface being rate-limiting.     

类金刚石薄膜的反应离子刻蚀

为了刻蚀出图形完整、侧壁陡直、失真度小、独立的类金刚石薄膜微器件,反应离子刻蚀是一种有效地刻蚀方法。研究了氧气与氩气的混合气体进行类金刚石薄膜刻蚀的主要工艺参数(刻蚀时间、有无掩膜、氩氧体积混合比、负偏压)。研究结果表明:在相同条件下,刻蚀速率随刻蚀时间变化不大;有无掩膜对刻蚀速率无明显影响;流量一定时,刻蚀速率随氩氧体积比的增大而降低,随负偏压的增大先增大后减小。实验得到最佳刻蚀条件,在此条件下,刻蚀出图形完整、侧壁陡直、失真度小的微器件,并成功制备出"独立"的微齿轮,进行了组装。     

Spin Polarization by Tilted Magnetic Field in Wide Ga1?xAlxAs Parabolic Quantum Wells

Wide parabolic wells can be created by properly controlling the Al content during the growth of successive Ga_1–xAl_xAs thin layers. Under a tilted magnetic field these systems present interesting transport properties, which are associated to their composition dependent g-factor. We present an exact solution for the eigenstates of an electron gas inside such a quantum well. We calculate the renormalized cyclotron frequencies as functions of the angle of tilt, as well as the density of states, and the Fermi level. We discuss the conditions for the existence of spin-polarized charge.     

等离子体微细加工技术的新进展

在大规模集成电路制造中常用反应离子刻蚀 ,但对于加工 2 0 0mm以上直径的片子和 0 2 5 μm的线宽及孔洞 ,它的能力已达到极限。低压等离子刻蚀设备 (ECR ,ICP ,HWP)和高浓度等离子体可以解决这一问题。已经在整个片子上均匀地获得高的刻蚀速率。剖面控制精确 ,可改善图形的保真度。本文介绍了干法刻蚀技术的这一最新进展 ,阐述了电子回旋共振等离子体源、感应耦合等离子体源、螺旋波等离子体源的工作原理和干法刻蚀的关键技术问题。     

流量比对等离子体基团分布和薄膜结构的影响

使用光强标定的发射光谱(AOES)测量了CHF3／C6H6混合气体的微波电子回旋共振(ECR)放电等离子体中基团的分布状态。实验发现随着CHF3流量的增加，成膜基团CF、CF2、CH等的相对密度增大，而刻蚀基团F的密度也会增加，从而使得a—C：F薄膜的沉积速率降低。同时红外吸收谱(IR)分析表明，在高CHF3流量下沉积的a—C：F薄膜中含有更高的C—F键成分。可见在a—C：F薄膜的制备中CHF3／(CHF3 C6H6)流量比是重要的控制参量。     

硼中子俘获治疗加速器ECR质子源电磁场仿真设计

电子回旋共振(ECR)质子源具有可给流强高、亮度高、可靠性高、使用频率高、易维护、小型化等优点,因而被硼中子俘获治疗(BNCT)装置的直线加速器所采用。本文利用CST软件对2.45 GHz ECR质子源进行优化设计。优化后ECR质子源的等离子体发生器腔体的尺寸为101.12 mm×45.00 mm,给出了脊波导耦合器的最优尺寸参数,使等离子体发生器腔体内电场强度提高为普通波导的4.5倍。通过Opera-3D对ECR质子源的引出电极结构进行了仿真计算,并给出了优化参数。另外,初步设计了质子源的线圈磁铁系统,优化了磁场分布。本文结果为质子源的研制提供了数据。     

中国原子能科学研究院回旋加速器束流动力学与多物理场模拟技术发展与应用

经过60年的发展,中国原子能科学研究院（CIAE）独立自主地开展了基于PIC技术的强流回旋加速器束流动力学的大规模并行计算的核心算法研究,开发了CYCPIC2D、CYCPIC3D和OPAL-CYCL等强流回旋加速器束流动力学模拟程序,搭建了专用的高性能并行化计算机群PANDA。本文以CIAE已建成及在研的不同类型的回旋加速器为例,总结了回旋加速器基本束流动力学的分析方法和主要计算结果,并介绍了CIAE在回旋加速器束流动力学与多物理场模拟技术方面的发展与应用。     

Effect of cyclotron resonance on ‘hot’ dispersion in a staggered double metallic grating sheet beam travelling wave tube

Based on the beam wave synchronous interaction in transverse and longitudinal directions at the same time and starting from Maxwell’s equation and linear Vlasov equation, the beam–wave interaction ‘hot’ dispersion equation considering both cyclotron resonance and Cherenkov resonance in a staggered double metallic grating traveling wave tube is deduced. Through the reasonable selection for geometric and electrical parameters, the numerical calculation and analysis of the ‘hot’ dispersion equation shows that the beam–wave interaction gain and frequency band with the cyclotron resonance enhancement effect are higher than those with only Cherenkov resonance radiation.     

电沉积法制备加速器生产~(68)Ge用镓镍固体靶

68Ge主要用于制备68Ge-68Ga发生器以及正电子发射型计算机断层显像(positron emission computed tomography)的校正放射源。采用69Ga(p,2n)68Ge反应制备68Ge,本研究建立了制备镓镍合金靶件的方法,以利用现有的回旋加速器生产68Ge。在酸性条件下通过电沉积法制备镓镍固体靶件,优化镀液组分以及电沉积条件,确定了电沉积工艺,制备了镓含量75%的镓镍固体靶件。经过三次辐照实验表明,此靶件可以生产68Ge。此工艺简便易行,制备的靶件质量稳定,可应用于回旋加速器生产68Ge。     

Design of the Transmission Lines for 140 GHz ECRH System on HL-2A

A new 140 GHz/2 MW/3 s electron cyclotron resonance heating （ECRH） system composed of two units is now being constructed on HL-2A. As a part of the system, two trans- mission lines marked No.7 ＆ 8 play the role of carrying microwave power from two gyrotrons to the tokamak port. Based on the oversized circular corrugated waveguide technology, an evacu~ ated transmission system with high power capability and high transmission efficiency is designed. Details are presented for the design of the corrugated waveguide, the layout of the proposed lines and the vacuum pumping system. Then mode conversion losses due to coupling, misalignment, bends and gaps are discussed to serve as a reference for analyzing the transmission efficiency and alignment. Finally, a dual-modes propagation case consisting of the HEll and LPn even modes is discussed.