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An innovate constant volume flow meter (ICVFM) using AAO leak element was developed, and then applied to measure the pumping speed of dry vacuum pumps. The AAO leak element was calibrated with dynamic differential pressure decay method. The results imply that the conductance of AAO leak is inversely proportional to the square root of the molecular mass, and remains unchanged with pressure varying from vacuum to atmosphere. Then the pumping speed was measured by a simple test system. In the end, the uncertainties of calibrating AAO leak element and measuring pumping speed were considered to confirm the measurement capability. The newly developed flow meter enables flow measurements at pressures ranging from vacuum through atmospheric pressure, which has potential application in the semiconductor industry. 相似文献
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用模板浸渍法成功地在多孔阳极氧化铝(AAO)模板里制备了Au纳米线。在这种方法中,AAO模板的孔壁在HAuCl4里浸湿,取出后通过热处理形成Au纳米线。使用扫描电子显微镜和X射线对Au纳米线的微观形貌和结构进行了表征。扫描电镜图片表明在AAO孔中形成了直的并且表面粗糙的金纳米线,纳米线直径约50 nm。X射线衍射图表明,金纳米线具有面心立方(FCC)结构。最后,研究了Au纳米线的形成机理。 相似文献
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Dayin Xu 《Microelectronic Engineering》2006,83(1):89-91
Anodic aluminum oxide (AAO) template was prepared by a two-step anodization method at low temperature (1 °C) and silicon carbide was deposited on the templates by non-reactive radio frequency sputtering method. Well-aligned quasi-one dimension silicon carbide nanorods with the average diameter about 80-90 nm and a mean length of 400 nm were obtained perpendicular to the substrate and observed by AFM and SEM after the aluminum substrates were striped off. Then some samples were annealing at flowing N2 at 400, 500 and 600 °C and FTIR was performed on these samples to obtain the information of structure. 相似文献
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Highly ordered single-crystalline silver sulfide (Ag2S) nanowires have been successfully achieved directly using silver nitrate and thioacetamide (TAA) as the reactants, by diffusion in the channels of anodic aluminium oxide (AAO) membrane. The products have been characterized by scanning electron microscopy (SEM), transmission electron microscopy (TEM), energy-dispersive X-ray spectroscopy (EDX), selected area electron diffraction (SAED) and high-resolution transmission electron microscopy (HRTEM). The results of the research show that the as-prepared Ag2S nanowires are monodisperse with sizes of about 50 nm in diameter, closely corresponding to the pore size of the AAO membrane. Furthermore, its photoluminescence properties and the growth mechanism are also discussed. 相似文献
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采用一次阳极氧化法,通过电解P型<100>晶向Si衬底上的高纯Al膜,在40V下,0.3M草酸中制备了Si基anodic aluminum oxide(AAO)模板。在Si基Al氧化过程中,通过电流密度随时间实时变化曲线的分析,研究了Si基AAO的生长机理。实验发现,电解液温度对Si基AAO制备的影响很大,在30℃下的氧化速度是在10℃下的5倍多。 相似文献
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Cobalt oxide (Co3O4) nanotubes have been successfully synthesized by chemically depositing cobalt hydroxide in anodic aluminum oxide (AAO) templates and thermally annealing at 500 °C. The synthesized nanotubes have been characterized by scanning electron microscope (SEM), transmission electron microscope (TEM) and X-ray diffraction (XRD). The electrochemical capacitance behavior of the Co3O4 nanotubes electrode was investigated by cyclic voltammetry, galvanostatic charge-discharge studies and electrochemical impedance spectroscopy in 6 mol L−1 KOH solution. The electrochemical data demonstrate that the Co3O4 nanotubes display good capacitive behavior with a specific capacitance of 574 F g−1 at a current density of 0.1 A g−1 and a good specific capacitance retention of ca. 95% after 1000 continuous charge-discharge cycles, indicating that the Co3O4 nanotubes can be promising electroactive materials for supercapacitor. 相似文献
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宜兴市西渚污水处理厂设计规模为2.0×104m3/d,分两期实施,一期工程规模为1.0×104m3/d,采用水解酸化/组合式AAO氧化沟工艺。通过优化,将倒置AAO工艺生化池与二沉池合建,将生化池缺氧区、厌氧区、好氧区、二沉池、硝化液回流、污泥回流系统整合为一体,形成组合式AAO氧化沟,该工艺具有占地面积小、投资省、能耗低、原水适应能力强、运行管理方便等突出优点。目前,该污水处理厂已建成运行,出水水质达到《城镇污水处理厂污染物排放标准》(GB18918—2002)一级A标准。介绍了该工程的设计参数、处理工艺流程及其设计特点,可供相关工程参考。 相似文献