Extraction of genomic DNA and detection of single nucleotide polymorphism genotyping utilizing an integrated magnetic bead-based microfluidic platform

This study presents a new magnetic bead-based microfluidic platform, which integrates three major modules for rapid leukocytes purification, genomic DNA (gDNA) extraction and fast analysis of genetic gene. By utilizing microfluidic technologies and magnetic beads conjugated with CD_15/45 antibodies, leukocytes in a human whole blood sample can be first purified and concentrated, followed by extraction of gDNA utilizing surface-charge switchable, DNA-specific, magnetic beads in the lysis solution. Then, specific genes associated with genetic diseases can be amplified by an on-chip polymerase chain reaction (PCR) process automatically. The whole pretreatment process including the leukocytes purification and gDNA extraction can be performed in an automatic fashion with the incorporation of the built bio-separators consisting of microcoils array within less than 20 min. The detection of single nucleotide polymorphism (SNP) genotyping of methylenetetra-hydrofolate reductase (MTHFR) C677T region associated with an increased risk of genetic diseases was further performed to demonstrate the capability of the proposed system. The extracted gDNA can be transported into a micro PCR chamber for on-chip fast nucleic acid amplification of detection genes with minimum human intervention. Hence, the developed system may provide a powerful automated platform for pretreatment of human leukocytes, gDNA extraction and fast analysis of genetic gene.     

应用非线性Galerkin方法求解微梁的动态响应

分析在电场力驱动下微共振器的非线性动力学特性．取前3阶模态,利用非线性Galerkin方法得到单自由度的降阶模型．用多尺度法计算降阶模型的动态响应,并得出了稳态响应的幅频特性曲线,与利用传统Galerkin方法直接取1阶模态所得的结果比较．以数值积分法求解3自由度模型得到的微共振器动力学响应为参考标准,验证了非线性Galerkin方法与传统Galerkin方法相比具有较高的精度．     

振动式微机械陀螺驱动环路数字AGC研究

对微机械陀螺系统的自激驱动环路进行了分析,并对数字处理电路中自动增益控制（AGC）模块进行了深入研究,给出了一种高控制精度的定点数字AGC算法。通过理论分析和模型仿真,结果表明AGC控制精度得到很大的提高,对陀螺驱动输出信号的幅度具有很好的控制效果,从而可以大大减小陀螺温漂及其他一些因素引起的不稳定性。最后给出了算法的直线逼近近似实现方法,能在的定点DSP当中很方便的实现。     

自加热非晶锗热电阻MEMS流速传感器的制造与测试

为扩大流速传感器的测量范围并降低功耗,制造并测试了一种基于自加热非晶锗薄膜热电阻的MEMS流速传感器,它是由嵌入氮化硅薄膜的四个非晶锗热敏电阻和一对环境测温补偿电阻组成。四个非晶锗热电阻同时作为自加热热源和测温元件,相互连接以形成惠斯通电桥。给出了MEMS工艺流程,微加工制造了尺寸为8.9 mm×5.6 mm×0.4 mm的流速传感器芯片。搭建了低流速和高流速气流通道实验装置,对传感器的惠斯通电桥施加50μA的恒定电流(CCA),实现了0～50 m/s范围内的流速测量。结果表明,传感器在低流速(0～2 m/s)时的灵敏度约为81.6 mV/(m/s),在高流速(2～50 m/s)时的灵敏度约为51.9 mV/(m/s),最大功耗仅约为1.03 mW。     

一种L~E波段的A型上电极MEMS单刀三掷开关设计

针对单刀多掷开关(SPMT)在相控阵雷达、宽带收发器中用于切换滤波器和传输线时需要满足宽频带、高隔离度的性能需求,设计了一种宽频带、高隔离度的MEMS单刀三掷开关(SP3T)。通过ANSYS电磁仿真软件中的HFSS模块对MEMS SP3T开关进行优化,利用COMSOL软件对上电极的机械性能进行仿真。仿真结果表明,所设计的MEMS SP3T开关可工作在1~90 GHz的频带内,且插入损耗小于1 dB@90 GHz,隔离度大于35 dB@90 GHz,其整体体积约为0.75 mm³。     

On-chip Diamond MEMS Magnetic Sensing through Multifunctionalized Magnetostrictive Thin Film

Electrically integrable, high-sensitivity, and high-reliability magnetic sensors are not yet realized at high temperatures (500 °C). In this study, an integrated on-chip single-crystal diamond (SCD) micro-electromechanical system (MEMS) magnetic transducer is demonstrated by coupling SCD with a large magnetostrictive FeGa film. The FeGa film is multifunctionalized to actuate the resonator, self-sense the external magnetic field, and electrically readout the resonance signal. The on-chip SCD MEMS transducer shows a high sensitivity of 3.2 Hz mT⁻¹ from room temperature to 500 °C and a low noise level of 9.45 nT Hz^−1/2 up to 300 °C. The minimum fluctuation of the resonance frequency is 1.9 × 10⁻⁶ at room temperature and 2.3 × 10⁻⁶ at 300 °C. An SCD MEMS resonator array with parallel electric readout is subsequently achieved, thus providing a basis for the development of magnetic image sensors. The present study facilitates the development of highly integrated on-chip MEMS resonator transducers with high performance and high thermal stability.     

High-performance MEMS shutter display with metal-oxide thin-film transistors and optimized MEMS element

Active matrix prestressed microelectromechanical shutter displays enable outstanding optical properties as well as robust operating performance. The microelectromechanical systems (MEMS) shutter elements have been optimized for higher light outcoupling efficiency with lower operation voltage and higher pixel density. The MEMS elements have been co-fabricated with self-aligned metal-oxide thin-film transistors (TFTs). Several optimizations were required to integrate MEMS process without hampering the performance of both elements. The optimized display process requires only seven photolithographic masks with ensuring proper compatibility between MEMS shutter and metal-oxide TFT process.     

变分模态分解组合广义形态滤波器的MEMS陀螺仪去噪方法

为了更加有效地消除MEMS陀螺仪输出信号存在大量不同类型噪声的同时保留有效信号特征,本文提出了一种变分模态分解(VMD)的多尺度自适应组合广义形态滤波器(CGMF)去噪方法.该方法首先采用VMD将MEMS陀螺仪原始输出信号分解为多个不同尺度的具有特殊稀疏性的一高低频离散带限子信号内模函数(BLIMFs),然后通过选择CGMF中合适的结构元素(SEs)长度和几何结构对上述不同尺度BLIMFs进行自适应去噪处理,最后重建去噪后的BLIMFs获得去噪信号.通过实验验证并与现有的信号去噪方法相比,本方法的主要优点在于:1)解决了CGMF中SEs的长度和几何结构等关键参数的自适应选择问题; 2)针对不同类型噪声均进行了有效的分离和去噪处理.     

基于GPS与惯性组件的复合测姿系统设计

针对微小型载体空间有限而无法安装大型测姿系统,提出了一种低成本的微型复合测姿方案.复合测姿系统由单天线GPS和MEMS惯性组件构成.利用扩展卡尔曼滤波将单天线GPS和MEMS惯性组件信息融合,提高了姿态估计精度.室外车载实验结果表明,利用该复合测姿系统解算的滚角和俯仰角误差可控制在1°以内,航向角误差可控制在2°以内.