Sensitivity and crosstalk study of the zero gap microlens used in 3.2 μm active pixel image sensors

The microlens has been widely applied to improve the sensitivity and to decrease the spatial crosstalk of image sensors. In order to further decrease the pixel size while improve the image quality, the zero gap microlens has been proposed to make high performance image sensors. In this paper, both the traditional microlens and zero gap microlens are fabricated using TOWER and TOPPAN processes. And their performances are compared and evaluated. The results show that the least sensitivity of the zero gap microlens has been significantly improved by more than 45.8% compared to that of the traditional microlens. The use of the zero gap microlens results in an obvious decrease of the crosstalk among blue, green and red lights. For example, the crosstalk of blue light in red light under the green irradiation has been decreases about 1.33%, and the crosstalk of red light in blue light under the blue irradiation has showed about 2.429 times decrease. Overall, the output colour image of the zero gap microlens is brighter and clearer than that of the traditional microlens. Image quality has been significantly improved due to the use of the zero gap microlens.     

Tunable focus poly(vinyl chloride) gel microlens Array fabricated by shaping in patterned electric field

In this work, we demonstrate a poly(vinyl chloride) (PVC)-gel-based microlens array (MLA) with tunable focus. The MLA is fabricated using a PVC solution and a glass substrate with a ring-array-patterned electrode. By coating the solution on the substrate and applying a direct current (DC) voltage to the electrode, a PVC gel membrane with a convex surface profile on the inner region of the electrode (anode) is formed with the solvent evaporation. After the complete evaporation of the solvent and removing the voltage, the solidified PVC gel membrane exhibits an MLA character. When an inverse DC voltage is applied to the electrode, the PVC gel accumulated on the inner region will shift toward the outer electrode connected to the anode, leading the curvature of the convex surface to decrease and the focal length to increase accordingly. The variable surface profile with voltage is precisely measured by a laser confocal microscope and the result shows that the focal length of the MLA can be tuned within a large range.     

微透镜阵在光纤激光外腔谱组束中的应用研究

提出了基于微透镜阵的光纤激光外腔谱组束方案,设计了能够对光纤阵列出射光束进行预准直的球面折射微透镜阵列.分析了组束系统的组束潜力,结果表明,所设计的组束系统能够实现12个Er3+/Yb3+共掺光纤激光器阵元的外腔谱组束.利用瑞利-索莫菲衍射积分理论,分析了微透镜对光纤出射光束的准直效果,结果表明,微透镜的实际焦距与设计...     

用于均匀照明的单片微透镜阵列面形设计

针对半导体光源不易均匀散射到一定的角度范围或均匀照射到确定平面上的问题,本文利用非成像光学方法设计了一种基于微透镜阵列的均匀散射透镜。该散射透镜由相同面元的微透镜周期性密排而成,微透镜单元为单曲面,根据不同应用,曲面面形可设计成不同的非球面形式。介绍了凸形、前曲面单片微透镜阵列的设计方法,并结合一些应用举例显示了该设计方法的可行性。最后讨论了凹凸面形、前后曲面微透镜阵列各自的应用场合及优缺点。     

GaAs microlens arrays grown by shadow masked MOVPE

This paper describes the fabrication of high quality GaAs microlenses and microlens arrays using shadow masked metalorganic vapor phase epitaxial (MOVPE) growth (SMMG). Microlenses with apertures as small as 30 μm were fabricated and focal lengths down to 40 μm were measured. The smaller lenses closely fit the theoretical behavior of ideal spherical lenses while larger lenses (focal length >80 μm) showed a more complex physical shape and could not be modeled as spherical. This deviation from a spherical shape is expected from simulation of SMMG. The full width at half maximum of the beam waist was <2 μm for all sizes of microlens indicating that these lenses are compatible with coupling to single mode fibers.     

红外凝视成像光学微扫描重建技术研究

扫描式微透镜阵列系统通过微动扫描成像,能够有效解决小行程与大视场之间的矛盾。扫描式微透镜阵列一般采用开普勒式望远结构,通过镜片横向相对位移实现视场扫描。本文提出了一种基于开普勒式望远结构的四片式微透镜阵列,探究了微透镜阵列的角放大率对于3~5 μm波段的扫描式微透镜阵列系统的影响。当角放大率小于1时,经过串扰产生的杂散光较多,系统的能量利用率上限受到限制,导致衍射极限受到限制。角放大率越大,能量利用率上限越高,当角放大率从0.67^×改变为0.83^×,能量利用率可以从43%提升到69%。当角放大率大于1时,系统的能量利用率不再受到结构限制,在抑制串扰的条件下,优化得到角放大率为1.5^×的结构。对其像质进行评价,各扫描视场RMS半径达到探测器像元尺寸,MTF达到0.6@17 lp/mm。角放大率作为表征微透镜阵列结构特点的参数,与系统能量利用率相关,从而影响像质,因此对于角放大率的分析与研究可为扫描式微透镜阵列系统的设计与实现提供依据。     

制备人工复眼结构的方法

提出了一种人工复眼结构的制备技术。人工复眼结构是由类似于昆虫复眼的很多小眼组成。这些小眼分布在球冠基底上以能够像昆虫复眼一样实现大视场探测。通过分析不同制备技术的特点及适用范围,研究材料的特性以及不同材料之间的关系,并将各种制作工艺以及材料相融合,发展了一种可用于制备曲面微阵列元件的制备方法。在该方法中,利用微加工技术在平面上制备作为子眼的微透镜列阵结构;然后利用软光刻技术将该微透镜结构进行翻模,获得分布在柔性基底上的凹透镜列阵结构;最后利用浇铸复制技术将柔性基底上的结构转移到球冠基底上,获得所需的人工复眼结构。利用该方法,开展了相关实验,在曲面基底上制备出了包含20 000多个子眼的人工复眼结构。     

微透镜列阵的离子束刻蚀及衍射效率测量

采用Kaufman离子刻蚀微透镜列阵并采用实时检测系统对刻蚀深度进行了控制.提出了测量微透镜列阵衍射效率的一种方法,对测量误差进行了讨论.     

微透镜阵列的制作及其与图像传感器的集成

介绍了利用硅、熔融石英和聚酰亚胺等材料制作折射和衍射微透镜阵列的工艺和结果,以及这些微透镜阵列分别与红外、可见光图像传感器的集成应用.微透镜与红外256×256PtSiCCD的集成结果表明,微透镜填充系数提高了2.3倍,成像质量明显改善.     

微透镜阵列用于线列红外探测器的研究

采用离子束刻蚀制备了线列长方形拱面熔凝石英微透镜阵列，用准分子激光扫描消融法淀积了性能均匀而且稳定的ＹＢａ２Ｃｕ３Ｏ７－δ高温超导薄膜，用湿法刻蚀制备了超导薄膜器件，用微透镜阵列与超导薄膜器件耦合构成组合式红外探测器。