This work focuses on distributed control of film thickness, surface roughness and porosity in a porous thin film deposition process using the deposition rate as the manipulated input. The deposition process includes adsorption and migration processes and it is modeled via kinetic Monte Carlo simulation on a triangular lattice with vacancies and overhangs allowed to develop inside the film. A distributed parameter (partial differential equation) dynamic model is derived to describe the evolution of the surface height profile of the thin film accounting for the effect of deposition rate. The dynamics of film porosity, evaluated as film site occupancy ratio, are described by an ordinary differential equation. The developed dynamic models are then used as the basis for the design of a model predictive control algorithm that includes penalty on the deviation of film thickness, surface roughness and film porosity from their respective set-point values. Simulation results demonstrate the applicability and effectiveness of the proposed modeling and control approach in the context of the deposition process under consideration. 相似文献
Choosing the right compounds to synthesise from large virtual combinatorial libraries is a current challenge for the pharmaceutical industry. Herein we describe a highly optimised method that aligns lead‐like properties with compound diversity. The methods are illustrated by considering a two‐dimensional library based on the interesting spirocyclic bis‐azetidine template.
An adaptive state feedback predictive control (SFPC) scheme and an expert control scheme are presented and applied to the temperature control of a 1200 kt·a^-1 delayed coking furnace, which is the key equipment for the delayed coking process. Adaptive SFPC is used to improve the performance of temperature control in normal operation. A simplified nonlinear model on the basis of first principles of the furnace is developed to obtain a state space model by linearization. Taking advantage of the nonlinear model, an online model adapting method is presented to accommodate the dynamic change of process characteristics because of tube coking and load changes. To compensate the large inverse response of outlet temperature resulting from the sudden increase of injected steam of a particular velocity to tubes, a monitoring method and an expert control scheme based on heat balance calculation are proposed. Industrial implementation shows the effectiveness and feasibility of the proposed control strategy. 相似文献