用于纳米操作的硅基集成式微型 xy 定位平台

针对纳米级定位平台小型化和高定位精度的要求,基于体硅工艺研制出一种集结构、驱动和位移检测一体化的集成式微型纳米级xy定位平台. 采用体硅双面深度反应离子刻蚀（DRIE）技术释放出高深宽比的静电梳齿驱动器、检测梁及定位平台结构. 由于定位平台属于面内运动,为了提高面内运动位移检测的灵敏度提出了一种利用离子注入工艺和DRIE技术相结合制作检测梁侧壁压阻的方法,并利用该侧壁压阻工艺成功地把基于侧壁压阻式的位移传感器集成到微型xy定位平台上. 实验测试表明,位移传感器的灵敏度优于1.17mV/μm,线形度优于0.814%,当驱动电压取30V时,定位平台的单轴输出位移可达±10μm,并且定位平台x方向和y方向上的位移耦合量非常小;在空气条件下测得定位平台的一阶固有频率为983Hz.     

自适应光纤光源准直器的结构设计

设计了一种可以快速高精度调节光纤准直激光束发射角度的自适应光纤光源准直器.该器件利用双压电驱动器控制光纤端面的位置,通过准直透镜实现出射激光束的准直.建立了自适应光纤光源准直器的物理模型,通过理论分析得出了光纤端面的偏移与器件结构参数的关系.研制了一个器件,并对其光纤端面偏移量、谐振频率等进行了测试.实验结果表明,理论...     

压电微马达研究进展

利用网络和图书馆对国际上1996年至今的压电微马达研究进展进行了调研。分别介绍了压电薄膜陶瓷的行波、驻波类微马达的最新研究情况，同时也对一种具有与压电微马达特性相同的静电超声微马达的研究作了说明，最后给出了本实验室研制的压电陶瓷行波微马达的运动机理。     

Microtentacle Actuators Based on Shape Memory Alloy Smart Soft Composite

Recent advances in miniature robotics have brought promising improvements in performance by leveraging the latest developments in soft materials, new fabrication schemes, and continuum actuation. Such devices can be used for applications that need delicate manipulation such as microsurgery or investigation of small‐scale biological samples. The shape memory effect of certain alloys is one of the promising actuation mechanisms at small scales because of its high work density and simple actuation mechanism. However, for sub‐millimeter devices, it is difficult to achieve complex and large displacement with shape memory alloy actuators because of the limitation in the fabrication process. Herein, a fabrication scheme for miniaturized smart soft composite actuator is proposed by utilizing two‐photon polymerization. The morphing modes are varied by changing the direction of the scaffold lamination. In addition, the actuation is controlled via local resistive heating of a carbon nanotube layer deposited inside of the actuators. The proposed design can generate a 390 µN force and achieve a bending angle up to 80°. Applications of the actuators are demonstrated by grasping small and delicate objects with single and two finger devices.     

Voltage–frequency converter for laser welding control

An experimental model of a voltage–frequency converter was realised and utilised for the control of the thermal behaviour by the laser welding of thermoplastic polymer materials. The input signal of 0–10?V comes from a thermal–optical real-time analysing device of the welding process. The output signal of 0–300?Hz is introduced to the input interface of a laser welding equipment, for setting the laser pulse frequency. Operation tests were performed on the laser welding equipment type HL 124P LCU. The pulses have rectangular waveform, with the amplitude of 20?V. The frequency is very stable, with deviations of less than 0.5?Hz. The waveform and the frequency response at the converter output are appropriate.     

超声波电动舵机数字舵控系统设计

文章介绍一种超声波电动舵机控制系统的设计与实现方案,该方案以FPGA为控制核心,并采用变速积分PID控制策略来提高系统品质,将舵机控制系统与驱动系统进行一体化设计,从而实现了对超声波电动舵机的一体化控制.实验表明,该超声波舵机系统具有性能稳定、集成度高、精度高等特点,且其性能指标满足使用要求.     

带微型扰流片旋转稳定弹气动特性分析

为了分析并定量描述微型扰流片在旋转稳定弹上的应用效果,采用计算流体力学方法,对带微型扰流片的旋转稳定弹在不同马赫数下的流场进行研究。通过分析扰流片和弹体表面压力分布,讨论了扰流片尺寸变化对扰流效果的影响,得出了扰流片轴向力系数、法向力系数及静力矩系数随外形参数的变化规律。结果表明:采用扰流片作为气动执行机构能产生较大的操纵力,其附加法向力方向与弹体攻角方向相同; 增加扰流片面积能有效提高弹丸的升阻比; 法向力系数、静力矩系数与扰流片高度呈良好的线性关系,该线性关系在超声速下更为明显。     

Reconfigurable and Latchable Shape‐Morphing Dielectric Elastomers Based on Local Stiffness Modulation

Programmable soft materials exhibiting dynamically reconfigurable, reversible, fast, and latchable shape transformation are key for applications ranging from wearable tactile actuators to deployable soft robots. Multimorph soft actuator sheets with high load‐bearing capacity are reported, capable of bending on multiple axis, made by combining a single dielectric elastomer actuator (DEA) with two layers of shape memory polymers (SMPs) fibers and an array of stretchable heaters. The rigidity of the SMP fibers can be reduced by two orders of magnitude by Joule heating, thus allowing the orientation and location of soft and hard regions to be dynamically defined by addressing the heaters. When the DEA is then actuated, it bends preferentially along the soft axis, enabling the device to morph into multiple distinct configurations. Cooling down the SMPs locks these shape changes into place. A tip deflection angle of over 300° at 5 kV is achieved with a blocking force of over 27 mN. Devices using two antagonistic DEAs are also reported that attain more complex shapes. Multimorphing is demonstrated by gripping objects with different shapes. An analytical model is developed to determine the design parameters that offers the best trade‐off between large actuation and high holding forces.     

Studies on the performance characteristics and improvements of the piezoelectrically-driven micro gas compressors

This study presents the main characteristics of a micro gas compressor produced by microfabrication techniques on silicon wafers. The compressor consists of a compression chamber, check valves and a silicon membrane where the piezoelectric bimorph actuator is installed. Compressor performance was investigated under various working conditions of input voltage and frequency to the actuator at several downstream back pressures. Volume stroke ratio is a critical parameter for gas compressors. However, micro actuators do not generally produce large displacement, so the volume stroke ratio of the micro compressor is expected to be significantly less than that of conventional mechanical compressors. Therefore, the possibility of using dual compression was also investigated in order to improve micro compressor performance. The performance of the micro compressor is evaluated in this study through experiments and simulation.     

精密设备系统主动隔振的基础理论与技术

本文分析了精密设备隔振平台的激励环境,从理论分析角度将被动隔振和主动隔振的隔振传递率进行了对比,得出在超低频阶段主动隔振传递率远远低于被动隔振中的隔振传递率的结论.从应用技术角度阐述了精密隔振中广泛应用的超磁致伸缩驱动器的性能,并通过实验测得了其静态位移输出特性.此外,介绍了主动隔振系统常用的控制方法,给出了模糊PID方法的振动控制效果.