等离子硅刻蚀及其工艺参数的多尺度优化

用CFD-ACE+和CFD-TOPO分别对容性耦合等离子体反应腔室放电和等离子硅刻蚀过程进行仿真,讨论不同射频电压和腔室条件对等离子体特性的影响.结果表明:随着射频电压的升高,离子的通量增大;在低射频电压时,离子通量随腔室压强的升高而减小,而在高射频电压时趋势则相反.用Kriging模型对影响刻蚀形貌的参数(腔室压强和射频电压)进行优化,结果表明该优化方法可以为工艺条件相近的刻蚀机设备的设计提供参考.     

Effects of Y2O3 and ZrO2 on the Densification of Si3N4-Zr(Y)O2 Composites

The effects of ZrO₂ and Y₂O₃ on the densification of hotpressed Si₃N₄-Zr(Y)O₂ composites have been studied. High density could not be obtained by the addition of pure or 3-mol%-Y₂O₃-doped ZrO₂ in this composite; however, nearly full density (>97%) could be obtained in Si₃N₄ using 6- and 8-mol%-Y₂O₃-doped ZrO₂. It is concluded that Y₂O₃ diffusing out from the added Zr(Y)O₂ promoted the densification and that ZrO₂ also had some role in the formation of an oxynitride glass.     

硅整流元件纯水冷却系统换热设备的化学清洗

介绍了硅整流元件的纯水冷却系统换热设备化学清洗中药剂的评定筛选原则。质量标准，清洗工艺等。并对其清洗效果加以评定。     

直接凝固注模成型Si_3N_4及SiC陶瓷──基本原理及工艺过程

直接凝固注模成型（ｄｉｒｅｃｔｃｏａｇｕｌａｔｉｏｎｃａｓｔｉｎｇ，ＤＣＣ）是一种崭新的（准）净尺寸陶瓷成型方法。本文报道了采用此法成型Ｓｉ_３Ｎ_４及ＳｉＣ陶瓷的基本原理和工艺过程。ＤＣＣ成型工艺过程为把高固相含量低粘度的陶瓷浆料浇注到无孔模具中，事先加入到浆料中的生物酶及化学物质通过改变浆料的ｐＨ或电解质浓度来改变浆料的胶体化学行为，从而使浆料原位凝固，得到有足够脱模强度的陶瓷坯体。ＤＣＣ成型的特点为坯体密度高（理论密度的５５％～７０％），坯体均匀，不用或只需少量的有机添加剂（少于１％），可成型大尺寸、复杂形状、高可靠性的陶瓷部件。     

Theoretical studies of displacement deposition of nickel into porous silicon with ultrahigh aspect ratio

A model is developed to address the uniformity of displacement deposition of nickel inside porous silicon with an ultrahigh aspect ratio as high as 200. The nickel distribution is treated as a current distribution issue as in electrodeposition. It is shown that the deposition distribution along the pore depth exhibits a strong dependence on a polarization parameter ξ. High values of ξ correspond to mass transport limitations and lead to non-uniform distributions, whereas small ξ values, representing interfacial reaction control, produce uniform distributions. Non-uniform deposition primarily occurs at an initial stage in which the reaction is dominated by mass transfer. As the deposition process continues, the deposition rate drops to a low value, and the deposition uniformity shifts from Ni²⁺ mass transport limitations to its interfacial reaction control, leading to uniform Ni²⁺ concentration and deposition rate distributions. It is predicted that the non-uniformity at the initial stage could be remedied by increasing the bulk concentration of the nickel ions and decreasing the plating bath pH. In addition, the uniformity of the deposition distribution can be significantly improved by introducing inhibiting additive coumarin to the plating solution.     

In Situ Synthesis and Microstructures of Tungsten Carbide-Nanoparticle-Reinforced Silicon Nitride-Matrix Composites

A W₂C-nanoparticle-reinforced Si₃N₄-matrix composite was fabricated by sintering porous Si₃N₄ that had been infiltrated with a tungsten solution. During the sintering procedure, nanometer-sized W₂C particles grew in situ from the reaction between the tungsten and carbon sources considered to originate mainly from residual binder. The W₂C particles resided in the grain-boundary junctions of the Si₃N₄, had an average diameter of ∼60 nm, and were polyhedral in shape. Because the residual carbon, which normally would obstruct sintering, reacted with the tungsten to form W₂C particles in the composite, the sinterability of the Si₃N₄ was improved, and a W₂C–Si₃N₄ composite with almost full density was obtained. The flexural strength of the W₂C–Si₃N₄ composite was 1212 MPa, ∼34% higher than that of standard sintered Si₃N₄.     

合成二氧化硅对硅橡胶性能的影响

介绍了合成二氧化硅及硅橡胶的结构性质，探究了二氧化硅的结构性质对硅橡胶补强性能的影响，指出了二氧化硅颗粒的大小、形态、聚结状态、表面性质和与高分子硅氧烷之间的相互作用是影响二氧化硅对硅橡胶补强性能的最主要的因素，并用实验对硅橡胶的硬度、拉伸强度、300％定伸应力、扯断伸长率、撕裂强度、压缩永久变形等物理性能进行测定，结果表明：BET比表面积180～200m^2／g，孔隙度（吸油量）为3.0～3.2mL／g，平均粒径为8～10岬的沉淀法白炭黑对硅橡胶具有很好的补强效果。     

Electrochemical ferrate generation for waste water treatment using cast irons with high silicon contents

This paper deals with the electrochemical preparation of ferrate in 15 M NaOH media, with a view to treatment of waste waters. Grey cast irons with high silicon contents were shown to allow current yields in the range 20–40% depending on the applied current density, up to 34 mA cm^–2. Ferrate solutions with contents up to 0.08 M could be produced in a divided cell of simple design, and provided with flat or packed-bed electrodes. Deactivation of the anode surface was shown to be of moderate significance for hour-long runs. The ferrate produced was tested for treatment of industrial liquid wastes: coagulation efficiency of the suspended matter was comparable with that of an electrocoagulation process with sacrificial Al anodes. The potential of waste water treatment by addition of ferrate is discussed.     

Deep oxidation of aqueous organics over a silicon carbide-activated carbon supported platinum–ruthenium bimetallic catalyst

In previous work, we developed a highly active bimetallic platinum–ruthenium catalyst supported on a very high surface area activated carbon substrate. In fixed bed reactors, this catalyst proved capable of the continuous long-term deep oxidation of a variety of aqueous organic contaminants associated with spacecraft wastewater streams at 121 °C. This work was extended to the mineralization of more typical environmental contaminants, including halocarbons and aromatics. The primary weakness of this catalyst was the tendency toward relatively high rates of chemical decomposition. To overcome this limitation, methods were developed for the production of a silicon carbide coating over the surface of the activated carbon, yielding a reasonable trade-off between increasing resilience and decreasing surface area. Here we report the catalytic decomposition of dissolved organic contaminants at 130 °C using this silicon carbide/activated carbon supported bimetallic catalyst.     

烧结助剂对氮化硅陶瓷显微结构和性能的影响

氮化硅中氮原子和硅原子的自扩散系数很低，致密化所必需的扩散速度和烧结驱动力都很小，在烧结过程中需采用烧结助剂。烧结助剂是影响氮化硅陶瓷的显微结构和性能的关键因素之一。有效的烧结助剂不但可以改善氮化硅陶瓷的显微结构，而且可以提高氮化硅陶瓷的高温性能和抗氧化性能。