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1.
In this letter, a concise process technology is proposed for the first time to enable the fabrication of good quality three-dimensional (3-D) suspended radio frequency (RF) micro-inductors on bulk silicon, without utilizing the lithography process on sidewall and trench-bottom patterning. Samples were fabricated to demonstrate the applicability of the proposed process technology.  相似文献   
2.
We have fabricated a self-aligned offset-gated poly-Si thin film transistor (TFT) by employing a novel photoresist reflow process. The gate structure of the new device is consisted of two unique patterns: A main-gate and a sub-gate. The new fabrication method extends the gate-oxide over the offset region. With the assistance of the sub-gate and reflowed photoresist a self-aligned offset region is successfully obtained due to the offset oxide acting as an implantation mask. The poly-Si TFT with symmetrical offsets is easily fabricated and the new method does not require any additional offset mask step. Compared with the misaligned offset gated poly-Si TFTs, excellent symmetric electrical characteristics are obtained  相似文献   
3.
吴正立  严利人 《微电子学》1996,26(3):189-191
隧道小孔中超薄SiO2的生长是EEPROM电路制造的关键工艺之一。采用SUPREM-Ⅲ工艺模拟程序对超薄SiO2的热生长进行了工艺模拟,经过大量的工艺实验及优化,确定了超薄SiO2的最佳生长条件,生长出的SiO2性能良好,完全可满足EEPROM研制的要求。  相似文献   
4.
A series of mixtures of Japanese subbituminous Taiheiyo coal and Athabasca oil sand bitumen (AOB) with various coal concentrations (0–100 wt%) was coprocessed in a 70 ml autoclave at 420°C for 1 h in the presence of H2 (50 kg/cm2 at room temperature) and sulfided Ni---Mo/Al2O2 catalyst. The mixture containing 2 wt% coal produced the largest amount of hexane soluble fraction (HS) and the smallest amount of benzene insoluble fraction (BI). Thus, a synergistic liquid production occurred for this mixture with 2 wt% coal by suppressing the retrogressive reactions which proceeded for pure AOB. The HS obtained from mixtures with 2–30 wt% showed higher H/C ratios and lower heteroatom contents than those obtained from pure AOB and the mixtures with more than 30 wt% coal. The amounts of transferable hydrogen contained in the mixtures were estimated using anthracene as a hydrogen acceptor. The mixtures with 2–10 wt% coal contained higher amounts of donor hydrogen than pure AOB. The HS yield from the various mixtures was correlated with the amount of donor hydrogens contained in the mixtures, except for the mixture with 10 wt% coal. Thus, the important factor which results in synergism is suggested to be the amount of donor hydrogens contained in the feed mixtures.  相似文献   
5.
In an attempt to develop new catalysts for the formation of formaldehyde from methane, the promotion effect of Fe on SiO2 and that of Sn on WO3 have been studied. The formation of formaldehyde on silica can be appreciably enhanced by the impregnation of Fe, as far as iron loadings are kept below 0.1 atom.% (Fe/Si × 100). In the case of Sn---W---Ox catalysts, both the addition of Sn to WO3, and that of W on SnO2 were effective to the selective formaldehyde formation. Absorption spectra (UV-Vis) and ESR measurements revealed that tetrahedrally coordinated Fe3+ in the silica network plays an important role in the formation of formaldehyde. A thin surface layer consisting of W and Sn oxides can account for the selective formaldehyde formation on the Sn---W---Ox catalysts.  相似文献   
6.
7.
This paper presents a recurrent neural-network model for solving a special class of general variational inequalities (GVIs), which includes classical VIs as special cases. It is proved that the proposed neural network (NN) for solving this class of GVIs can be globally convergent, globally asymptotically stable, and globally exponentially stable under different conditions. The proposed NN can be viewed as a modified version of the general projection NN existing in the literature. Several numerical examples are provided to demonstrate the effectiveness and performance of the proposed NN.  相似文献   
8.
9.
吴正立  严利人 《微电子学》1996,26(5):339-341
为了提高E^2PROM中N管源漏穿通电压,用实验的方法对制造工艺进行了研究。结果表明,高能量注入是提高VPT的有效手段,但受到pn结击穿的限制,只适用于低区短沟N管;DDD工艺大幅度高VPT,但pn结击穿电压低于20V,不能应用于高压MOS管;采用适量的防穿通注入和适当增大沟道长度为最理想的工艺途径。  相似文献   
10.
The periodic steady state of power distribution system loads is studied for electronically switched, time varying cases. Many loads of this type appear on contemporary power systems as energy saving and controllable demands. Several alternative methods of calculating the periodic steady state are discussed and a new method is proposed based on the frequency modulation property of the discrete Fourier transform. The new method is termed the gain-shift formula (GSF) because the format of the technique entails adding frequency shifted terms which represent the parameter to be calculated. An example of a triac-switched load on the distribution system is given. The main advantages of the GSF are: rapid calculation of the periodic steady state; and efficient calculation of the frequency spectrum of voltages and currents in the periodic steady state  相似文献   
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