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A one-dimensional self-consistent fluid model was developed for radio frequency glow discharge in helium at near atmospheric pressure, and was employed to study the gas breakdown characteristics in terms of breakdown voltage. The effective secondary electron emission coefficient and the effective electric field for ions were demonstrated to be important for determining the breakdown voltage of radio frequency glow discharge at near atmospheric pressure. The constant of A was estimated to be 64±4 cm 1 Torr 1 , which was proportional to the first Townsend coefficient and could be employed to evaluate the gas breakdown voltage. The reduction in the breakdown voltage of radio frequency glow discharge with excitation frequency was studied and attributed to the electron trapping effect in the discharge gap. 相似文献
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纳米薄膜材料技术近年来发展迅速,作为新型材料,由于在光,电、磁以及力学等方面具有特殊性能,使之作为功能材料和结构材料都应用广泛,发展前景良好。其材料应用范围十分广泛,特别是在信息,能源等工业快速发展的前提下,元器件的小型化,高密度,高集成等要求使纳米薄膜技术受到越来越多的重视。纳米薄膜未来的技术的目标是能按照需要形成高质量的分子线度级别的薄膜,并且对于不同形状的基底要形成高质量的膜层。微纳米薄膜材料成为如今半导体行业研究的重要课题和发展基础。 相似文献
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“常规型”水采存在初期投资大、井上下煤水大、循环运转电耗高、煤水污染等缺点.采区化水采工艺系统的研究打破了原水采落、运、提、脱常规型工艺模式,彻底取消了煤水提升系统和地面煤泥脱水系统,实现了煤水在井下采区内循环复用,煤泥在采区内脱水回收,使生产环节大为简化. 相似文献