Detection and classification of defect patterns on semiconductor wafers

The detection of process problems and parameter drift at an early stage is crucial to successful semiconductor manufacture. The defect patterns on the wafer can act as an important source of information for quality engineers allowing them to isolate production problems. Traditionally, defect recognition is performed by quality engineers using a scanning electron microscope. This manual approach is not only expensive and time consuming but also it leads to high misidentification levels. In this paper, an automatic approach consisting of a spatial filter, a classification module and an estimation module is proposed to validate both real and simulated data. Experimental results show that three types of typical defect patterns: (i) a linear scratch; (ii) a circular ring; and (iii) an elliptical zone can be successfully extracted and classified. A Gaussian EM algorithm is used to estimate the elliptic and linear patterns, and a spherical-shell algorithm is used to estimate ring patterns. Furthermore, both convex and nonconvex defect patterns can be simultaneously recognized via a hybrid clustering method. The proposed method has the potential to be applied to other industries.     

Kernelized relative entropy for direct fault detection in industrial rotary kilns

The objective of this work is to use a 1‐dimensional signal that reflects the dissimilarity between multidimensional probability densities for detection. With the modified Kullback‐Leibler divergence, faults can be directly detected without any normality assumption or joint monitoring of related test statistics in different subspaces such as the T² and SPE in principal component analysis–based methods. To relieve the difficulty associated with asymptotic high‐dimensional density estimates, we have estimated the density ratio rather than the densities themselves. This can be done by approximating the density ratio with kernel basis functions and learn the weights from the available data. The developed algorithm is generic and can be applied to any industrial system as long as process historical data is available. As a case study, we apply this algorithm to a real rotary kiln in operation, which is an integral part of the cement manufacturing plant of Ain El Kebira, Algeria.     

Joint learning and weighting of visual vocabulary for bag-of-feature based tissue classification

Automated classification of tissue types of Region of Interest (ROI) in medical images has been an important application in Computer-Aided Diagnosis (CAD). Recently, bag-of-feature methods which treat each ROI as a set of local features have shown their power in this field. Two important issues of bag-of-feature strategy for tissue classification are investigated in this paper: the visual vocabulary learning and weighting, which are always considered independently in traditional methods by neglecting the inner relationship between the visual words and their weights. To overcome this problem, we develop a novel algorithm, Joint-ViVo, which learns the vocabulary and visual word weights jointly. A unified objective function based on large margin is defined for learning of both visual vocabulary and visual word weights, and optimized alternately in the iterative algorithm. We test our algorithm on three tissue classification tasks: classifying breast tissue density in mammograms, classifying lung tissue in High-Resolution Computed Tomography (HRCT) images, and identifying brain tissue type in Magnetic Resonance Imaging (MRI). The results show that Joint-ViVo outperforms the state-of-art methods on tissue classification problems.     

Unified framework for representing and ranking

In the database retrieval and nearest neighbor classification tasks, the two basic problems are to represent the query and database objects, and to learn the ranking scores of the database objects to the query. Many studies have been conducted for the representation learning and the ranking score learning problems, however, they are always learned independently from each other. In this paper, we argue that there are some inner relationships between the representation and ranking of database objects, and try to investigate their relationships by learning them in a unified way. To this end, we proposed the Unified framework for Representation and Ranking (UR²) of objects for the database retrieval and nearest neighbor classification tasks. The learning of representation parameter and the ranking scores are modeled within one single unified objective function. The objective function is optimized alternately with regard to representation parameter and the ranking scores. Based on the optimization results, iterative algorithms are developed to learn the representation parameter and the ranking scores on a unified way. Moreover, with two different formulas of representation (feature selection and subspace learning), we give two versions of UR². The proposed algorithms are tested on two challenging tasks – MRI image based brain tumor retrieval and nearest neighbor classification based protein identification. The experiments show the advantage of the proposed unified framework over the state-of-the-art independent representation and ranking methods.     

ClustMe: A Visual Quality Measure for Ranking Monochrome Scatterplots based on Cluster Patterns

We propose ClustMe, a new visual quality measure to rank monochrome scatterplots based on cluster patterns. ClustMe is based on data collected from a human‐subjects study, in which 34 participants judged synthetically generated cluster patterns in 1000 scatterplots. We generated these patterns by carefully varying the free parameters of a simple Gaussian Mixture Model with two components, and asked the participants to count the number of clusters they could see (1 or more than 1). Based on the results, we form ClustMe by selecting the model that best predicts these human judgments among 7 different state‐of‐the‐art merging techniques (Demp ). To quantitatively evaluate ClustMe, we conducted a second study, in which 31 human subjects ranked 435 pairs of scatterplots of real and synthetic data in terms of cluster patterns complexity. We use this data to compare ClustMe's performance to 4 other state‐of‐the‐art clustering measures, including the well‐known Clumpiness scagnostics. We found that of all measures, ClustMe is in strongest agreement with the human rankings.