磁场位形对微波ECR等离子体电子参数的影响

测量了两种磁场位形中微波ECR等离子体的电子参数,研究了磁场位形对电子参数空间分布的影响,结果表明:发散场中电子温度在轴心和腔体边缘较大,在过渡的中间区域较小,而磁镜场中电子温度随径向半径R的增大单调减小;电子密度在两种磁场位形中随径向和轴向距离的增大均呈单调下降的趋势,磁镜场中的下降幅度大于发散场;在共振面附近,发散场中气压对电子温度的影响比在磁镜场中大,而气压对电子密度的影响在两种磁场位形中基本相似.     

Influence of Working Pressure on Ion Sensitive Probe Measurement in Microwave ECR Plasmas

In order to precisely measure the ion parameters in a microwave electron cyclotron resonance plasma using an ion sensitive probe,the dependences of the current-voltage(I-V)characteristics on the shielding height(h)and the potential difference between inner and outer electrodes(V_B)have been investigated at different working pressures of 0.03 Pa and 0.8 Pa.Results show that the I-V curves at higher pressure are more sensitive to the variation of h than those at lower pressure.The influence of V_B on ion temperature(T_i)measurement becomes more prominent when the pressure is increased from 0.03 Pa to 0.8 Pa.Under both pressures,the optimized h is obtained at the condition where the current reaches zero in the positive voltage region with a suitable V_B of-1.5 V because of effective shielding of the electron E×B drift.     

TFT-LCD的Line Zara失效机制及改善

为了彻底改善TFT-LCD的Line Zara不良,本文建立了Line Zara失效模型,并分析了Line Zara失效机制,其中Line Zara发生率与外力大小及玻璃弯曲形变程度成正比,与框胶至柱状隔垫物距离、框胶粘结力成反比。基于Line Zara的失效机制,针对性地提出了改善措施并进行了实验验证。实验结果表明,减薄时的抛光工艺、减薄后运输箱的填充密度和框胶粘结力对Line Zara有显著的影响。随着抛光压力的减小和时间缩短,Line Zara发生率逐渐减少。随着运输箱中玻璃数量或隔垫物数量的增加,运输箱的填充密度逐渐增大,玻璃受外力发生的弯曲形变逐渐减小,相应的Line Zara发生率逐渐减小;当隔垫物为无尘纸时,玻璃的弯曲形变最小,Line Zara发生率最低。此外,当框胶与ITO粘结力增加12.5%、与PI粘结力增加66%后,Line Zara的发生率可降低至2%以下。TFT-LCD的Line Zara不良可通过降低抛光压力与时间、增加运输箱的填充密度和增加框胶粘结力彻底改善。     

Ion Heating in an ECR Plasma with a Magnetic Mirror Field

Magnetoelectric heating was used to heat ions in an ECR plasma with a magnetic mirror field.The temperature and density of ions were measured by an ion sensitive probe(ISP) before and after magnetoelectric heating in order to investigate the influence of the anode ring’s radius,axial position and working pressure on magnetoelectric heating.Results showed that a suitable radius of the anode ring could improve the ion temperature effectively and the optimal size of the anode ring depended on the cyclotron radius of ions.The radial uniformity of the ion density was improved by increasing the radius of the anode ring after heating.The magnetic mirror field could reduce the loss of ions caused by collision with the wall of the chamber and it was beneficial to increase the ion temperature and the ion density.It was suitable to heat the ions when the anode ring was set at the center of the magnetic mirror field where there was a weaker magnetic field strength.Lower pressure contributed to the increase in the ion temperature and efficiency of magnetoelectric heating.