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UV-nanoimprint lithography (UV-NIL) using a soft mold is a promising technique with low cost and high throughput for producing the submicron scale large-area patterns. However, the deformations of the soft mold during imprinting process which can cause serious consequences have to be understood for the practical application of the process. This paper investigated the deformation of the soft mold by theoretical analyses, numerical simulations, and experimental studies. We simulated the mold deformation using a simplified model and finite element method. The simulation and the related experimental results agree well with each other. Through the investigation, the mechanism and affected factors of the mold deformation are revealed, and some useful conclusions have been achieved. These results will be valuable in optimizing the imprinting process conditions and mold design for improving the quality of transferred patterns.  相似文献   
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直接金属成形技术是快速成形领域研究的热点问题,文中提出一种基于弧焊的直接金属成形技术,并对基于该技术制作的成形件进行性能评测,对成形件进行密度、强度与硬度指标测试和金相组织观察表明,基于弧焊的直接金属成形件的组织结构和力学性能指标明显优于SLS(selective laser simering)工艺成形件,达到或高于铸造零件;异种材料成形时化学成分、物理性能、组织特点的差异对成形件的性能有不利影响。  相似文献   
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Flexible electronics have received considerable attention in academies and industries for their promising applications in enormous fields, such as flexible displays, wearable sensors, artificial skins, and flexible energy devices. Challenges remain in developing a flexible and scalable manufacturing method to facilitate the fabrication of multi-functional structures in a flexible electronic system. Nanoimprint lithography is a high resolution and low-cost approach to fabricate nanostructures over a large area. This paper reviews recent progress of nanoimprint lithography and its applications in flexible electronics. The basic principles, classification, research focus, and critical issues of nanoimprint lithography are elaborated. Then, the advantages of nanoimprint lithography are demonstrated in several typical applications related to flexible electronics, including conductive films, optoelectronic devices, flexible sensors, energy harvesting and storage devices, and bioinspired electronic devices. Finally,the challenges and perspectives of nanoimprint lithography in flexible electronic systems are discussed.  相似文献   
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