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为了适应LTPS TFT LCD显示屏超高分辨率极细布线的趋势,降低LTPS TFT层间绝缘层过孔刻蚀带来的良率损失,提高产品品质,本文研究了LTPS TFT层间绝缘层过孔刻蚀的工艺优化。实验以干法刻蚀为主刻蚀,湿法刻蚀为辅刻蚀的方式,既结合干法刻蚀对侧壁剖面角及刻蚀线宽的精确控制能力,又利用了湿法刻蚀高刻蚀选择比的优良特性,改善了层间绝缘层刻蚀形貌,减少干法刻蚀对器件有源层的损伤,避免有源层被氧化,防止刻蚀副产物污染开孔表面。实验结果表明,干法辅助湿法刻蚀能基本解决刻蚀过程中过刻、残留的问题,使得层间绝缘层过孔不良良率损失减少73%以上,且TFT源漏电极接触电阻减小约90%,器件开态电流提升约15%。干法辅助湿法刻蚀是一种优化刻蚀工艺,提升产品性能的新方法。 相似文献
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2010年10月27日至29日,中共中央政治局委员、国务院副总理张德江分别到广州、佛山、东莞、深圳等地就中小企业发展问题进行视察调研。27日下午,张德江副总理视察了节能中央空调的新秀企业广州市华德工业有限公司,陪同视察的还有国务院副秘书长肖亚庆,工业和信息化部副部长苗圩,中央政治局委员、广东省委书记汪洋, 相似文献
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A novel anaerobic reactor, jet biogas inter-loop anaerobic fluidized bed (JBILAFB), was designed and constructed. The start-up and performance of the reactor was investigated in the Process. of .artificial glucose wastewater treatment. With the wastewater recycle ratio of 2.5 : 1, the recycled wastewater with biogas could mix sludge and wastewater in the JBILAFB reactor completely. The start-up of the JBILAFB reactor could be completed in less than 70 d through maintenance of hydraulic retention time (HR~I") and stepwise increase of feed total organic carbon (TOC) concentration. After the start-up, with the volumetric TOC loadings of 14.3 kg·m ^-3·d^-1, the TOC removal ratio, the effluent pH, and the volatile fatty acids (VFA)/alkalinity of the JBILAFB reactor were more than 80%, close to 7.0 and less than 0.4, respectively. Moreover, CH4 was produced at more than 70% of the theoretical value, The reactor exhibited high stability under the condition of high volumetric TOC loading. Sludge granules in the JBILAFB reactor were developed during the start-up and their sizes were enlarged with the stepwise increase of volumetric TOC loadings from 0.8 kg.m^-3.d ^-1 to 14.3 kg.m^-3.d^-1. Granules, an offwhite color and a similar spherical shape, were mainly comprised of global-like bacteria. These had good methanogenic activity and settleability, which were formed probably through adhesion of the bacteria. Some inorganic metal compounds such as Fe, Ca, Mg, Al, etc. were advantageous to the formation of the granules. 相似文献
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<正>(2014年3月7日)1 2013年全区水利系统党风廉政建设和反腐败工作取得明显成效1.1严格落实党风廉政建设责任制2013年2月20日,在召开全区水利工作会议的同时召开了全区水利系统党风廉政建设工作会议,全面部署2013年全区水利系统党风廉政建设工作,下发了《水利厅2013年党风廉政建设工作要点和任务分 相似文献