Swords to plowshares: Shock wave applications to advanced lithography

xtreme ltra iolet ithography (EUVL) seeks to apply radiation in a wavelength region centered near 13 nm to produce microcircuits having feature sizes 0.1 micron or less. A critical requirement for the commercial application of this technology is the development of an economical, compact source of this radiation which is suitable for lithographic applications. A good candidate is a laser-plasma source, which is generated by the interaction of an intermediate intensity laser pulse (up to 10¹² W/cm²) with a metallic target. While such a source has radiative characteristics which satisfy the needs of an EUVL source, the debris generated during the laser-target interaction strikes at the economy of the source. Here, we review the use of concepts and computer modeling, originally developed for hypervelocity impact analysis, to study this problem.     

Kinetics of vinyl chloride and vinyl acetate emulsion polymerization

The kinetics of vinyl chloride and vinyl acetate emulsion polymerization are reexamined. The validity of Ugelstad's model for systems with high desorption rate is confirmed by simulating conversion histories for both systems at different initiator concentrations and particle numbers. On the basis of the model, it is shown that at ordinary initiation rates, termination reactions are unimportant with respect to molecular weight development in both systems, and as a consequence, molecular weight development is independent of number and size distribution of polymer particles and of initiator and emulsifier level. Based on this conclusion, it is shown that in accordance with experimental facts, the molecular weight distribution obtained in vinyl chloride emulsion polymerization is the most probable distribution, and it is concluded that the number of long-chain branch points per repetition unit is less than 2 × 10^?4 at high conversions. In vinyl acetate emulsion polymerization, an almost logarithmic normal distribution is obtained. The distribution is strongly broadened by branching reactions with the number of long-chain branch points increasing rapidly with monomer conversion. The increase of M_n with increasing conversion is due to terminal double-bond polymerization, while the increase in M_w is due mainly to transfer to polymer.     

Bulk and suspension polymerization of styrene in the presence of n-pentane. An evaluation of monofunctional and bifunctional initiation

The plasticizing effect of n-pentane on the rate of bulk free radical polymerization of styrene and molecular weight distribution development has been modeled on the basis of the free volume theory for both monofunctional and bifunctional initiation. A strong decrease in the reaction rate in the late stages of the polymerization, due to the displacement of the onset of the gel effect, has been observed for both types of initiation. This decrease in the polymerization rate limited the terminal conversion to values well below 100% for mono-functional initiation. However, in bifunctionally initiated polymerization, terminal conversions close to 100% were obtained in spite of the decrease in reaction rate. Contrary to what was expected, the molecular weight distribution obtained at terminal conversion was almost completely insensitive to these changes in polymerization rate. This phenomenon is explained in terms of limited transfer to monomer reactions when n-pentane is present in the system. In suspension polymerization, the limiting conversion and plasticizing effects of n-pentane in monofunctionally initiated systems, caused enhanced coalescence leading to suspension set-up. In bifunctionally initiated systems this enhanced coalescence was completely overcome by the short duration of the particle growth stage, owing to high polymerization rates, and stable suspensions were achieved. For these systems the particle size distributions obtained were similar to that of suspension polystyrene without n-pentane. © 1993 John Wiley & Sons, Inc.     

Diffusion-controlled adsorption processes

Numerical solutions of differential equations for diffusion-controlled adsorption processes in spherical particles are presented for slow diffusion of gaseous molecules followed by rapid adsorption according to the Langmuir isotherm. As the parameter in the denominator of the Langmuir equation is increased the rate increases and the generalized rate curves shift progressively from that for the linear isotherm, the Langmuir parameter = 0, to the curve of the parabolic law. Adsorption and desorption cycles are considered and parameters are provided for relating any of these processes to the generalized curves. A simple linear equation was shown to approximate the rate curves with moderate accuracy.     

Polymer reactors and molecular weight distribution. VIII. A method of interpreting skewed GPC chromatograms

A new-method of interpreting GPC chromatograms which accounts for skewing and symmetrical axial dispersion has been developed. General relationships for a symmetrical axial dispersion correction and for a skewing correction are derived. The method has been verified experimentally for unimodal chromatograms and linear calibration curves over a wide range of GPC operating conditions, polymer molecular weights and polydispersities. Measurements of h and skewing factors were obtained by a once-through technique. The need for performing reverse flow experiments has been eliminated. Artificial oscillations in the corrected chromatogram due to step size (Method of Pierce-Armonas), and to number of terms in a polynomial expansion (Method of Tung and Method of Smith) are eliminated. The method has yet to be evaluated for nonlinear calibration curves and multi-modal distributions. However, suggestions for its application in these circumstances are presented.     

Rapid thermal annealing effects on the photoluminescence properties of molecular beam epitaxy-grown GaIn(N)As quantum wells with Ga(N)As spacers and barriers

This article describes the effects of rapid thermal annealing (RTA) on the photoluminescence (PL) emission from a series of GaIn(N)As quantum wells. Indium compositions of both 20% and 32% were examined with nominal N compositions of 1% or 2%. The N location was varied within our quantum structure, which can be divided into three regions: (1) quantum well, (2) Ga(N)As spacer layers at the barrier-to-well interface and well-to-barrier interface, and (3) barriers surrounding each quantum well. Eight combinations of samples were examined with varying In content, Ga(N)As spacer layer thickness, N content, and N location in the structure. In the best cases, the presence of these Ga(N)As spacer layers improves the PL properties, due to annealing, with a reduction in the emission wavelength blueshift by ～400 Å, a reduction of the decrease in the full-width at half-maximum (FWHM) by ～5 meV, and a threefold reduction of the increase in integrated intensity. It was also observed that relocating N from the quantum wells to the barriers produces a comparable emission wavelength both before and after annealing. Our results further show that the composition of incorporated N in the material is most influential during the stages of RTA in which relatively small amounts of thermal energy is present from our lower annealing times and temperatures. Hence, we believe a low thermal-energy anneal is responsible for the recovery of the plasma-related crystal damage that was incurred during its growth. However, the In composition in the quantum well is most influential during the latter stages of thermal annealing, at increased times and temperatures, where the wavelength blueshift was roughly independent of the amount of incorporated N. As a result, our investigations into the effects of RTA on the PL properties support other reports that suggest the wavelength blueshift is not due to N diffusion.     

Mass transfer with fast chemical reaction in drops

Mass transfer with a fast second-order chemical reaction inside a drop has been studied photographically. Measured flow patterns and the reaction surface position have been compared with predictions of solutions of transport equations. The agreement is within experimental error.     

Limitation and evaluation of the two-broad standard (TBS) method of calibration of aqueous SEC

Few years ago, the two broad standard method of molecular weight (MW) calibration was proposed¹ and the presence of negative σ² (peak dispersion coefficient) was found to be somewhat disturbing. The limitation of the method was not specified. Since large negative values of σ² cannot be tolerated, herein is reported another type of instrumental spreading function for which the method may seem to apply, and an evaluation of this method. In its evaluation, plots of log_e (intercept of a linear molecular weight calibration curve), that is, log_e(D₁) vs. the corresponding slope of the molecular weight calibration curve, D₂, which were found to be linear, were used. The systems employed were Dextran/Corning controlled porous glass (CPG-10) packing in well-chosen mobile phase.     

Rushton桨气液搅拌槽内气泡流对搅拌轴弯矩的影响（英文）

The bending moment acting on the overhung shaft of a gas-sparged vessel stirred by a Rushton turbine, as one of the results of fluid and structure interactions in stirred vessels, was measured using a moment sensor equipped with digital telemetry. An analysis of the shaft bending moment amplitude shows that the amplitude distribution of the bending moment, which indicates the elasticity nature of shaft material against bending deformation, fol-lows the Weibull distribution. The trends of amplitude mean, standard deviation and peak deviation character-istics manifest an“S”shape versus gas flow. The“S”trend of the relative mean bending moment over gas flow rate, depending on the flow regime in gas–liquid stirred vessels, resulted from the competition among the non-uniformity of bubbly flow around the impeller, the formation of gas cavities behind the blades, and the gas direct impact on the impel er when gas is introduced. A further analysis of the bending moment power spectral density shows that the rather low frequency and speed frequency are evident. The low-frequency contribution to bend-ing moment fluctuation peaks in the complete dispersion regime.