Reliable before-fabrication forecasting of MEMS piezoresistive pressure sensor: mathematical modelling and numerical simulation

Microsystem Technologies - Micro-mechanical systems (MEMS) based piezoresistive pressure sensors have significant importance in several pressure sensor devices in real world, i.e., aviation, IoT...     

Investigation of MEMS Piezoresistive Pressure Sensor with a Freely Supported Rectangular Silicon Carbide Diaphragm as a Primary Sensing Element for Altitudinal Applications

Silicon - Silicon and Polysilicon are used as piezoresistive materials in MEMS (Micro Electromechanical system) piezoresistive pressure sensors because of its reproducibility and enhanced...