Measurements of distribution of self-bias potential on an RF-plane electrode in plasma etching devices

The self-bias potential (V_dc) induced on an RF-powdered electrode (153 mm Ø) in a plasma is measured using electrical probes which are buried in, de-insulated from, and RF-connected to the electrode. The configuration of the probes allows to study the distribution of V_dc discretely on the electrode. The potential is homogeneous in the absence of external magnetic field. In the presence of a homogeneous magnetic field parallel to the electrode, it is reduced and a monotonous gradient takes place in its distribution due to the plasma shift induced by E × B drift. When the magnetic field is rotated along the axis of the RF-electrode at a frequency less than 50 Hz, the distribution, which is almost identical to the one in a static field, rotates with the magnetic field. On the coordinate system rotating with the magnetic field, the probes are regarded to be rotating. The potential distribution is obtained as a continuous function of the azimuthal angle. Thus the rotation of the field provides information for the experimental interpolation.     

Subsurface structures in initial stage of FeSi2 growth studied by high-resolution Rutherford backscattering spectroscopy

The initial stage of iron silicide formation is investigated by high-resolution Rutherford backscattering spectroscopy. During the Fe deposition on Si(001) at 470 °C, the formation of FeSi₂ is confirmed by the surface peak analysis. Initially, FeSi₂ grows epitaxially so that one of the major crystallographic axes is parallel to the <111> axis of the Si substrate. With increasing Fe deposition, the deviation between the major crystallographic axis of the silicide region and Si<111> increases although the electron diffraction pattern is independent of the amount of Fe deposition. Therefore, the subsurface crystallographic structure of iron silicide is transformed from a cubic-like to a low-symmetry structure.     

Morphology of thin anatase coatings prepared from alkoxide solutions containing organic polymer,affecting the photocatalytic decomposition of aqueous acetic acid

Porous anatase coatings were prepared from alkoxide solutions containing organic polymer by a dip-coating technique. The morphology of the coatings, such as pore size, pore distribution and thickness, was controlled. The effects of the morphology of the porous anatase coatings on the photocatalytic activity for the photocatalytic decomposition of aqueous acetic acid were examined.     

Preparation and photoconduction of rapidly quenched films in the Bi2O31bM2O5 system (M=V,Nb and Ta)

The Bi₂O₃1bM₂O₅ films (M=V, Nb and Ta) were prepared by a rapid quenching technique using a twin-roller type equipment. Quenched film of pure Bi₂O₃ partially precipitated a tetragonal phase which differs from well-known β-Bi₂O₃ in structure. In every (Bi₂O₃)_0.975 (M₂O₅)_0.025 composition (2.5% M₂O₅), the tetragonal phase was obtained as single phase, and the tetragonality became greater than that of the pure Bi₂O₃. Beyond this composition, the tetragonality decreased to form δ-phase with a fcc structure with increasing the M₂O₅ content. The lowest V₂O₅ content forming a δ-phase was 5%, while a slight tetragonality still remained in the samples containing 10% Nb₂O₅ and 10% Ta₂O₅, respectively. From the measurement of the photoconductivities of the quenched films, it was proved that a photoconduction appeared in the tetragonal phase while no photoconductivity was observed in the cubic phase. The characteristic of the photoconduction was that a remarkable decrease in the resistivity was observed when a light of ca. 500 nm in wave length was irradiated on the films.     

Chemical processing and characterization of spinel-type thermistor powder in the Mn-Ni-Fe oxide system

The coprecipitated Mn-Ni-Fe oxalate was prepared from the mixed sulfate solution by optimum pH control. The chemical composition agreed well with that of the starting solution, and the thermal decomposition of the Mn-Ni-Fe oxalate in air below 600 °C led to the direct formation of cubic spinel phase with fine particle size. The sinterability of the calcined powder, the stability of cubic spinel phase and the influence of annealing temperature on electrical properties of the sintered bodies, were investigated.     

A dynamic Houjin (square) and a symmetric Houjin

A Houjin is an n by n square lattice with each cell containing a symbol (such as a number or a letter). Further, these numbers or letters are designed to exhibit symmetry. For example, a magic square is a Houjin where the embedded symmetry is that the numbers in each row, column, and a center diagonal have an equal sum. This article reports a new Houjin: a dynamic Houjin. A dynamic Houjin changes its numbers at each time step while satisfying the symmetry as a Houjin (a magic square). The dynamic Houjin has a further symmetry in a time dimension, i.e., the sums of the numbers in each cell are identical.     

Effect of SiC on Interfacial Reaction and Sintering Mechanism of TiB2

Compacts of TiB₂ with densities approaching 100% are difficult to obtain using pressureless sintering. The addition of SiC was very effective in improving the sinterability of TiB₂. The oxygen content of the raw TiB₂ powder used in this research was 1.5 wt%. X-ray photoelectron spectroscopy showed that the powder surface consisted mainly of TiO₂ and B₂O₃. Using vacuum sintering at 1700°C under 13–0.013 Pa, TiB₂ samples containing 2.5 wt% SiC achieved 96% of their theoretical density, and a density of 99% was achieved by HIPing. TEM observations revealed that SiC reacts to form an amorphous phase. TEM-EELS analysis indicated that the amorphous phase includes Si, O, and Ti, and X-ray diffraction showed the reaction to be TiO₂+ SiC → SiO₂+ TiC. Therefore, the improved sinterability of TiB₂ resulted from the SiO₂ liquid phase that was formed during sintering when the raw TiB₂ powder had 1.5 wt% oxygen.