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Salehi Maryam Zavarian Ali Asghar Arman Ali Hafezi Fatemeh Rad Ghasem Amraee Mardani Mohsen Hamze Kooros Luna Carlos Naderi Sirvan Ahmadpourian Azin 《SILICON》2018,10(6):2743-2749
Silicon - The characterization of ion beam current density distribution and beam uniformity is crucial for improving broad-beam ion source technologies. The design of the broad ion beam extraction... 相似文献
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