Characterization of the Ion Beam Current Density of the RF Ion Source with Flat and Convex Extraction Systems

Silicon - The characterization of ion beam current density distribution and beam uniformity is crucial for improving broad-beam ion source technologies. The design of the broad ion beam extraction...     

Behaviors of capacitive and Pirani vacuum gauges

Knowing the exact pressure of the process has a great impact on the validity of the results, product quality, energy efficiency, and in some processes, on the security of work with the system. Hence, the calibration of the barometers and the accuracy of the readings should be taken seriously. Choosing the appropriate time interval for re-calibration is done according to the extent and conditions of use, uncertainty, and the inaccuracy allowed in measurement, constructive suggestion, and some other things. Failure to pay attention to the importance of periodic calibration in vacuum gauges leads to some irreparable losses in the research project and the vacuum generator system. In this study, using McLeod's barometer, the deviation of capacitive and Pirani vacuum gauges is investigated at different time intervals in the middle vacuum range, and it is determined that the vacuum gauge faces a serious deviation from the actual calibrated amount for upper and lower ranges of middle vacuum in the same working pressure range over time.