气体传感器长期稳定性智能检测系统

设计了一种基于ARM的气体传感器长期稳定性智能检测系统,该系统以LM3S1138作为控制和处理核心。系统共有10片测试板,每片测试板可放置8个气体传感器,最多可一次测试80只气体传感器。可实现对供电电压在0～10V、基值电阻在0～300kΩ的半导体气体传感器进行检测,最多可同时测量80只气体传感器,可同时检测不同类型的气体传感器;采集环境温湿度值;对检测值可在LCD上显示同时将数据存储到SD卡。本系统具有适应性强、使用灵活、稳定性好、可靠性高和精度高的特点。     

Microwave annealing effects on ZnO films deposited by atomic layer deposition

Zinc oxide thin films deposited on glass substrate at 150°C by atomic layer deposition were annealed by the microwave method at temperatures below 500 °C.The microwave annealing effects on the structural and luminescent properties of Zn O films have been investigated by X-ray diffraction and photoluminescence.The results show that the MWA process can increase the crystal quality of Zn O thin films with a lower annealing temperature than RTA and relatively decrease the green luminescence of Zn O films.The observed changes have demonstrated that MWA is a viable technique for improving the crystalline quality of Zn O thin film on glass.     

液晶光学相控阵子阵列寻址电极的加工工艺

基于液晶光学相控阵(LCOPA)电极基板的子阵列连接方案,利用电子束直写和激光直写混合光刻技术,进行了通光区域电极条纹、外围电路和子阵列联络孔的微纳米加工工艺研究。结果表明利用激光直写技术,可以形成最小线宽0.5μm的液晶光学相控阵电极图案,曝光时长48 min,具备可制造性。利用富含导电颗粒的SX AR-PC5000/90.1涂层,可以有效解决电子束在绝缘玻璃基底上直写时由电荷积累所产生的电子束曝光场拼接偏移与火花放电等问题,保证了电子束直接曝光子阵列电极上下导电层之间的联络孔套刻精度。利用特定电子束直写对准标记,解决了绝缘体表面在混合光刻中套刻对位精度问题。     

应用微波技术抑制光刻胶图形的坍塌与黏连

针对显影工艺中水的表面张力导致的高高宽比抗蚀剂图形的坍塌及黏连,提出了一种基于微波加热的干燥技术来有效改善纳米抗蚀剂图形的干燥效果。该方法利用微波穿透光刻胶结构直接加热光刻胶图形间隙中残存的去离子水,水分子吸收微波的光子能量迅速蒸发,从而有效地抑制光刻胶图形的坍塌与黏连现象。利用提出的基于微波加热的干燥方法,成功获取了高260nm、宽16nm的光刻胶线条组和直径为20nm的光刻胶柱形阵列,其中高高宽比线条组和由15 625根柱子组成的柱形阵列结构没有出现坍塌及黏连情况,验证了在微波产生的交变电场作用下,可以减小水分子团簇,降低水的表面张力。     

基于BP算法的传感器单气体定量识别

气体的定性识别与定量分析一直是气体检测领域的主要难点,也是气体传感器应用中的研究热点.文中在对多个气体传感器进行气体定性分析和实时数据采集基础上,通过BP网络分析方法,实现了气体的定量识别,然后对训练前后气体浓度的误差进行对比分析,仿真结果表明:平均相对误差均控制在1％以内,最大相对误差控制在2％以内,提高了对气体浓度的预测精度.     

A method to restrain the charging effect on an insulating substrate in high energy electron beam lithography

Pattern distortions caused by the charging effect should be reduced while using the electron beam lithography process on an insulating substrate. We have developed a novel process by using the SX AR-PC 5000/90.1solution as a spin-coated conductive layer, to help to fabricate nanoscale patterns of poly-methyl-methacrylate polymer resist on glass for phased array device application. This method can restrain the influence of the charging effect on the insulating substrate effectively. Experimental results show that the novel process can solve the problems of the distortion of resist patterns and electron beam main field stitching error, thus ensuring the accuracy of the stitching and overlay of the electron beam lithography system. The main characteristic of the novel process is that it is compatible to the multi-layer semiconductor process inside a clean room, and is a green process, quite simple, fast, and low cost. It can also provide a broad scope in the device development on insulating the substrate,such as high density biochips, flexible electronics and liquid crystal display screens.     

氯气检测报警器的设计

提出了一种以LM3S1138 Cortex-M3处理器为核心的氯气检测报警器的软硬件设计.采用恒电位电解式氯气传感器对空气中的氯气浓度进行测量.设计了恒电位电路、信号调理电路、人机接口电路和报警电路,同时采用软件温湿度补偿策略,实现温湿度自动补偿.该报警器测量氯气浓度范围为0～20 ppm,(1 ppm=10-6)测量精度达到0.1 ppm,响应时间＜60 s.具有时间显示,一、二阶报警和报警锁存等功能.可广泛应用于石油化工、造纸、纺织、水处理等场合.