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为克服现有光纤光栅位移传感器设计中存在的传力介质弹性系数易改变、滑块易产生偏移等对测量精度的不利影响,提出了一种滑动式位移传感器。楔形滑块的滑动面和限制面的采样互相垂直、等强度梁的变截面和一体化、滑动面圆弧化等特殊设计,使传感器具有抗滑动干扰性、梁挠位移测量的高灵敏性、长期往复测量的耐磨性等优点。阐述了传感器测量原理,加工制造了传感器原型,并开展了全面的性能测试。测试结果和误差分析表明:传感器在0~100mm的量程中,灵敏度为20.11pm/mm,精度达到0.099 5%F.S,具备良好的微位移测量能力;重复性误差和迟滞误差分别仅为0.705%和0.403%,且抗蠕变性能良好,可满足机械装备、土木工程等重大设施的结构健康监测对位移、变形测量的精度和长期稳定性要求。  相似文献   
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Silicon photonics is an emerging competitive solution for next-generation scalable data communications in different application areas as high-speed data communication is constrained by electrical interconnects. Optical interconnects based on silicon photonics can be used in intra/inter-chip interconnects, board-to-board interconnects, short-reach communications in datacenters, supercomputers and long-haul optical transmissions. In this paper, we present an overview of recent progress in silicon optoelectronic devices and optoelectronic integrated circuits(OEICs) based on a complementary metal-oxide-semiconductor-compatible process, and focus on our research contributions. The silicon optoelectronic devices and OEICs show good characteristics, which are expected to benefit several application domains, including communication, sensing, computing and nonlinear systems.  相似文献   
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