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The behavior of co-sputtering tungsten silicide after vacuum rapid annealing at 1000-1100℃ for 15s is investigated by Raman scattering, scanning electron microscope, X-ray diffraction, Auger electron spectrum and resistivity measurements. There are two Raman peaks at 331 and 450cm-1, and their intensities increase with the temperature rise of rapid thermal annealing. Scanning electron micrograph exhibits crystallization at 1000℃ and its enhancement with increase of annealing temperature. In addition to the (002), (101), (110), (103), (112) and (200) diffraction peaks of WSi2, there are some W5Si3 peaks in X-ray diffraction pattern. However, the composition of WSi2 is found in Auger electron spectrum at 1000℃, and the measurement results of sheet resistance also conclude WSi2 characteristics. 相似文献
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一、制造业亟待转型升级2013年10月份中国制造业采购经理指数(PMI)较9月上升0.3个百分点,达到51.4%,连续第四个月回升,也创下18个月以来新高。在接下来的三五年时间里,我国将进入一个比较稳定的经济增长新周期。但有专家说,制造业的基础仍不稳固,除了融资、劳动力各项成本高企外,还面临束缚发展的体制、机制、法制等问题。 相似文献
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