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本文报告了核工业西南物理研究院最近研制开发的新一代全方位离子注入及增强沉积工业机。该机直径 90 0 m m,高 10 5 0 m m,立式放置 ,抽气系统由分子泵及机械泵构成并且实现了 PL C控制 ,本底真空小于 4× 10 - 4Pa。气体和金属等离子体可分别由热阴极放和三个高效磁过滤式金属等离子体源产生。真空室顶部预留了法兰口并配有冷却靶台。该机的负高压脉冲幅值为 10~ 80 k V,重复频率为 5 0~ 5 0 0 Hz,脉冲上升沿小于 2 μs,并且可根据需要产生脉冲串。一般地等离子体密度为 10 8~ 10 1 0 cm- 3,膜沉积速率为0 .1~ 0 .5 nm/s。文中亦报道了一些实验结果 相似文献
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报道了等离子体源离子注入 (PSII)或等离子体浸没离子注入 (PIII)及增强沉积工业机的实验结果及应用。该机真空室直径 90 0mm ,高 10 5 0mm ,立式放置 ,抽气系统由分子泵及机械泵构成并且实现了PLC控制 ,本底真空小于 4× 10 - 4Pa。等离子体由热阴极放电或三个高效磁过滤式金属等离子体源产生 ,因此可实现全方位离子注入或增强沉积成膜。该机的负高压脉冲最高幅值为 80kV ,最大脉冲电流为 6 0A ,重复频率为 5 0— 5 0 0Hz ,脉冲上升沿小于 2 μs,并且可根据需要产生脉冲串。其等离子体密度约为 10 8— 10 10 ·cm- 3,膜沉积速率为 0 .1— 0 .5nm/s。 相似文献
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1. IntroductionTi6A14V alloys have been widely applied in various fields from aircraft components, chemical prrycessing facilities to medical implants, because of itsremarkable mechanical and chemical properties suchas high strength--toweight ratio and corrosion resistance [l]. Hoal.ever, its poor hardness and inferior wearing-resistance make the applicable scope ofthis material limited [2,31. There are a few reportson the effects of nitrogen ion implantation on hardness: wearing resistance, … 相似文献
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1. IntroductionIon implantation being an effective technology forsurface modification has brought about Notable effects on the surfaCe hardness, wearability and corrosion resistance Of materials [1, 2l. However, themajor limitation to its wide use in industry i8 thatthe modlfied layer is very shallow, and llot suitableto many industrial aPplicatlons. Althougb the modi-fied l8y6r can be imProved by increasing the imPlant-ing energy, yet over-ranged X-ray 1nduced would beharmful to human heal… 相似文献
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