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omCnoxThewhcromechanisIn/MEMS(MicroElectro-Me-chanicalS}stem)arenewresearchfie1dshasedoncom-putertechnology,dricro-electrontechnologyandndcro-manufacturingtechnology['].Fromthepresentresearch,thedricromechanismhasprofoundapplications.Itcanbeemploiedinindustry,agriculture,biologyengineering,environmentcontIDl,medicalscience,aeronautics,astro-..nautics,nationaldefence.t.[2'3].Undoubtedlythepres-enceofthedricromechanismwillhaveahdeepimpctonthenationaleconom}.ThereforethehacromechanismandMEM… 相似文献
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