Mechanical and dynamic characteristics of double and single beam cantilevers for MEMS manipulation

Micro and millimeter-scaled cantilever beams are commonly used to apply and measure microforce and manipulate micro-objects, biological cells, and tissues. In manipulating micro-objects and actuating micro-devices by cantilever beams, sudden application and release of forces are typical, and subject to static and dynamic modes of operation. Therefore, the cantilever’s mechanical behavior and vibration characteristics are vital since they are also used in force sensors and probes. The dynamic behavior of the double beam cantilever (DBC) in micro and millimeter-scaled is explored by varying the length without changing the stiffness and compared with the single beam cantilever (SBC). The dynamic attributes such as mode shape, natural frequency, resonance, and response under the impulse force and Coulomb friction are evaluated numerically. This study will assist in selecting the appropriate type and length of cantilevers in micro and millimeter-scale to manipulate micro-objects, biological cells and tissues, and use in MEMS sensors.