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1.
Storment C.W. Borkholder D.A. Westerlind V. Suh J.W. Maluf N.I. Kovacs G.T.A. 《Journal of microelectromechanical systems》1994,3(3):90-96
We present an all-aluminum MEMS process (Al-MEMS) for the fabrication of large-gap electrostatic actuators with process steps that are compatible with the future use of underlying, pre-fabricated CMOS control circuitry. The process is purely additive above the substrate as opposed to processes that depend on etching pits into the silicon, and thereby permits a high degree of design freedom. Multilayer aluminum metallization is used with organic sacrificial layers to build up the actuator structures. Oxygen-based dry etching is used to remove the sacrificial layers. While this approach has been previously used by other investigators to fabricate optical modulators and displays, the specific process presented herein has been optimized for driving mechanical actuators with relatively large travels. The process is also intended to provide flexibility for design and future enhancements. For example, the gap height between the actuator and the underlying electrode(s) can be set using an adjustable polyimide sacrificial layer and aluminum “post” deposition step. Several Al-MEMS electrostatic structures designed for use as mechanical actuators are presented as well as some measured actuation characteristics 相似文献
2.
Two versions of the pressure swing adsorption process are analysed as a means for purification of the light component of a binary feed of arbitrary composition. Local equilibrium with linear, uncoupled isotherms is assumed. The results of the analysis show that a critical pressure ratio must be exceeded before complete purification is possible and that this pressure ratio increases as the light-component content of the feed decreases. When clean up of the light component is complete, pressurization with product leads to higher light-component recoveries than pressurization with feed. This difference becomes large for small separation factors, small fractions of the light component in the feed, and large pressure ratios. 相似文献
3.
By combining smart sensors and traversability grids with a JAUS-based component and messaging architecture, DARPA Grand Challenge finalist team CIMAR quickly developed a robust autonomous ground vehicle (AGV), a custom-built off-road vehicle. Key components included six smart sensors for detecting environmental conditions and reporting a priori data, a smart arbiter for fusing data from multiple smart sensors, and a reactive driver for providing real-time navigation planning and obstacle avoidance 相似文献
4.
Robert Hieb R. Kent Dybvig Claude W. Anderson III 《Higher-Order and Symbolic Computation》1994,7(1):83-109
Continuations have proven to be useful for implementing a variety of control structures, including exception handling facilities and breadth-first searching algorithms. However, traditional continuations are not useful in the presence of concurrency, because the notion of the rest of the computation represented by a continuation does not in general make sense. Traditional continuations can also be difficult to use in nonconcurrent settings, since their global nature is sometimes problematic. This article presents a new type of continuation, called asubcontinuation. Just as a traditional continuation represents the rest of a computation ¿from a given point in the computation, a subcontinuation represents the rest of asubcomputation ¿from a given point in the subcomputation. Subcontinuations may be used to control tree-structured concurrency by allowing nonlocal exits to arbitrary points in a process tree and allowing the capture of a subtree of a computation as a composable continuation for later use. In the absence of concurrency the localized control achievable with subcontinuations makes them more useful than traditional continuations. 相似文献
5.
Kovacs G.T.A. Storment C.W. Halks-Miller M. Belczynski C.R. Jr. Santina C.C.D. Lewis E.R. Maluf N.I. 《IEEE transactions on bio-medical engineering》1994,41(6):567-577
A new process for the fabrication of regeneration microelectrode arrays for peripheral and cranial nerve applications is presented. This type of array is implanted between the severed ends of nerves, the axons of which regenerate through via holes in the silicon and are thereafter held fixed with respect to the microelectrodes. The process described is designed for compatibility with industry-standard CMOS or BiCMOS processes (it does not involve high-temperature process steps nor heavily-doped etch-stop layers), and provides a thin membrane for the via holes, surrounded by a thick silicon supporting rim. Many basic questions remain regarding the optimum via hole and microelectrode geometries in terms of both biological and electrical performance of the implants, and therefore passive versions were fabricated as tools for addressing these issues in on-going work. Versions of the devices were implanted in the rat peroneal nerve and in the frog auditory nerve. In both cases, regeneration was verified histologically and it was observed that the regenerated nerves had reorganized into microfascicles containing both myelinated and unmyelinated axons and corresponding to the grid pattern of the via holes. These microelectrode arrays were shown to allow the recording of action potential signals in both the peripheral and cranial nerve settings, from several microelectrodes in parallel 相似文献
6.
7.
A flow-cytometric method with fluorescence-labeled monoclonal antibodies (MABs) against the low density lipoprotein (LDL) receptor (C7A MAB) or 3,3'-dioctadecylindocarbocyanin-iodide (DiI) LDL has been developed that allows the quantification of LDL receptors on leukocytes and the identification of patients with familial hypercholesterolemia (FH) within 48 hours. Leukocytes were isolated from 10 mL anticoagulated blood by density gradient centrifugation. To induce maximal expression of LDL receptors, mononuclear cells were preincubated with either phytohemagglutinine (PHA) or lipoprotein-deficient serum (LPDS). LPDS-treated monocytes provided a more homogeneous cell population with regard to LDL receptor activity than did the PHA-treated lymphocytes; they also provided a greater discrimination between the fluorescence of the receptor probes and cellular autofluorescence. The C7A MAB was able to compete for DiI LDL binding by about 40%. In competition with unlabeled LDL, DiI LDL revealed linear binding, indicating an affinity similar to native LDL. The binding characteristics of DiI LDL were also similar to 125I-LDL binding. LDL isolated from familial defective apolipoprotein B-100 was not able to compete for DiI LDL binding on monocytes, whereas native LDL reduced it by about 80%. In monocytes from FH heterozygous patients, the cellular mean fluorescence using either C7A MAB or DiI LDL at 4 degrees C was 30% to 70%; in FH homozygotes, cellular mean fluorescence was less than 20% of that in monocytes from normal individuals. In patients with familial defective apolipoprotein B-100 antibody binding was normal, but one patient's own LDL failed to compete with normal DiI LDL for 4 degrees C binding on U937 test monocytes. Patient monocytes having internalization defects showed normal 4 degrees C DiI LDL binding, but at 20 degrees C cell-associated fluorescence was reduced by about 40%. In our study 384 hypercholesterolemic patients (preselected according to serum cholesterol levels, clinical symptoms, and family history) were analyzed for LDL receptor expression using the C7A MAB-based assay. In 71.8% of the patients with cholesterol levels higher than 300 mg/dL, an LDL receptor deficiency was observed. Apolipoprotein E isoforms and lipoprotein[a] were found to be independent from the LDL receptor status. In some patients with high cholesterol levels but normal LDL receptor expression with the C7A MAB assay, LDL receptor defects could be diagnosed when either reduced binding or internalization of DiI LDL or familial defective apolipoprotein B-100 was detected.(ABSTRACT TRUNCATED AT 400 WORDS) 相似文献
8.
Savin H.V. Bucknell M.S. Spaulding M.D. Maciukenas T.B. Kent Fuchs W. 《Solid-State Circuits, IEEE Journal of》1994,29(7):770-779
Storage/Logic Arrays (SLA's) represent a structured logic array approach to the design of VLSI sequential logic. Design for concurrent error detection and testability is complicated in these arrays by the presence of embedded memory elements and multiple levels of logic. A means of designing SLA's for ease of testability and concurrent error detection (CED) is provided in this paper. Test sets for static and dynamic CMOS circuits are described. Fault and error coverage is presented and performance and area costs are analyzed for example circuits. In addition, a means of implementing dynamic CMOS SLA's is presented and shown superior to previous NMOS, static CMOS, and dynamic CMOS approaches based upon power consumption and simplicity of design 相似文献
9.
Considering the given situation in the Hungarian telecommunications infrastructure and the prompt demands for advanced services, this paper describes an individual solution to provide intelligent services in the mixed analog and partly digitalized Hungarian public telephone network. The preIN system is based on co-located stand-alone units equipped with SSP/SCP functionality 相似文献
10.