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该文基于掺钪AlN薄膜制备了高次谐波体声波谐振器(HBAR),研究了钪(Sc)掺杂浓度对AlN压电薄膜材料特性及器件性能的影响。研究表明,当掺入Sc的摩尔分数从0增加到25%时,压电应力系数e33增加、刚度 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">下降,导致Al1-xScxN压电薄膜的机电耦合系数 从5.6%提升至15.8%,从而使HBAR器件的有效机电耦合系数 MU9oHVXkfj0b/xfm8UMr/IyrKlzNUDtXXtvWdEludaGizJ2zRjJ64S7OW1biWCK0ntqiDL6K+IrUQuO9rNUQLhI70oNuL66lSH/8FGWUae1NaGazu+NIEg1+6lWyb2ofOup3a6aozOe7NVEkZpv/nzHaWCy0HoGbZdctrE8tR120kyn93RgY+iXpZ0opv5RLxuaVhC3dSeHtlFaVT9y4vshs3Xk1Po8qLQs38xIZ52WPzDOY+NM3zRAkUCW+l0WzWY9mCm1FqgtJS4gkfNZ0ZsxbQuzBAq2fH26QszuR2Nu7+bFxbEk9XT8bK3PZnRDbsNMfG7eZtDPW2SI0xb0v9C9Gm1Ar0ybUyrQJtTJtQq1Mm1Ar0ybUyvwPmqnFKq3uBaAAAAAASUVORK5CYII=">提升了3倍。同时,当Sc掺杂摩尔分数达25%时,Al1-xScxN(x为Sc掺杂摩尔分数)压电薄膜的声速下降13%,声学损耗提高,导致HBAR器件的谐振频率和品质因数降低。 相似文献