Reduction of loading effect by tungsten etchback in a magneticallyenhanced reactive ion etcher

The plug loading effect occurring during the etchback of tungsten was investigated in a magnetically enhanced reactive ion etcher using SF ₆/Ar mixtures. It was found that while the plug loading effect is independent of varying SF₆/Ar flow rate ratio and magnetic field intensity, it is reduced under the condition of high selectivity of tungsten relative to TiN which was achieved at high chamber pressure and low RF power. It is proposed that when TiN is used as a glue layer, the W etch rate enhancement in the plug is mainly controlled by a local loading effect. Under the optimized etchback conditions the plug loss was successfully controlled without the tungsten residue left on severe topology     

Analysis of Electromagnetic Scattering from an Eccentric Multilayered Sphere

An exact analytic solution of a plane electromagnetic (EM) wave scattered by an eccentric multilayered sphere (EMS) is obtained. It is assumed that the layers are perfect dielectrics and that the innermost core is a perfectly conducting sphere. Each center of a layer is translated along the incident axis. All fields are expanded in terms of the spherical vector wave functions with unknown expansion coefficients. The addition theorem for spherical wave functions is used prior to applying the boundary conditions. The unknown coefficients are determined by solving a system of linear equations derived from the boundary conditions. Numerical results of the scattering cross sections are presented on the plane of φ=0 degrees and φ=90 degrees. The convergence of modal solutions and the characteristics of patterns are examined with various geometries and permittivity distributions     

Equilibrium and crystallographic measurements of the binary tetrahydrofuran and helium clathrate hydrates

Clathrate compounds are crystalline materials formed by a physical interaction between host and relatively light guest molecules. Various types of nano-sized cages surrounded by host frameworks exist in the highly unique crystalline structures and free guest molecules are entrapped in an open host-guest network. Recently, we reported two peculiar phenomena, swapping and tuning, naturally occurring in the hydrate cages. Helium, one of the smallest light guest molecules, must be the challengeable material in the sense of physics and moreover possesses versatile applications in the field of superconductivity technology and thermonuclear industry. In this regard, we attempted for the first time to synthesize helium hydrates at moderate temperature and pressure conditions. According to inclusion phenomena, helium itself normally cannot form clathrate hydrates due to being too small molecularly without the help of hydrate former molecules (sI, sII, and sH formers). In this study, the hydrate equilibria of the binary clathrate hydrate containing tetrahydrofuran, helium, and water were determined at 2, 3, 5.56 THF mol%. Direct volumetric measurements were also carried out to confirm the exact amount of helium captured in the hydrate cages. Finally, the crystalline structure of the formed mixed hydrates was identified by powder X-ray diffraction, resulting in structure II.     

Effects of anodizing voltage on the anodized and hydrothermally treated titanium surface

Anodic oxidation is the process of creating a titanium oxide layer with various defects more dense and stable. In this study, a dense, stable and porous oxide layer was formed using anodic spark oxidation on pure titanium surface and hydroxyapatite crystals were formed on its surface via a hydrothermal treatment. A mixture of 0.02M−GP (Glycerolphosphate disodium salt) and 0.2M-CA (Calcium acetate) was used as an electrolyte. By increasing the anodizing voltage to 220, 260, 300, and 360 V, the effects of the anodizing voltage were examined by evaluating the film properties after anodization and a hydrothermal treatment. Breakdown occurred around 230 V. As the voltage increased after breakdown, the pore size increased. After the hydrothermal treatment, the amount of HA crystal precipitation was also increased as the voltage increased. The mean surface roughness (Ra) of the anodizing surface was also increased as the voltage increased. The Ra value was larger in the hydrothermally treated group compared with the group treated with anodization as a result of the HA crystals present on the surface after the hydrothermal treatment. Corrosion resistance of the surface modified by anodization was significantly increased in a saline solution compared to that for the non-treated group; this increased further after the hydrothermal treatment. These increases were most likely due to a thick stable oxide layer formed through anodization. Thus, it is believed that titanium with its surface modified through anodic spark oxidation would be a suitable biomaterial due to its corrosion resistance and biocompatibility.     

High-speed train navigation system based on multi-sensor data fusion and map matching algorithm

Navigation system for high-speed trains is necessary for increased operational safety and efficiency, new services for customers, and low maintenance cost. This paper proposes a high accuracy navigation system for high-speed trains based on a sensor fusion algorithm, with non-holonomic constraints, for multiple sensors, such as accelerometers, gyroscopes, tachometers, Doppler radar, differential GPS, and RFID, and a map matching algorithm. In the proposed system, we consider the federated Kalman filter for sensor fusion, where local filters utilize filter models developed for various sensor types. Especially, the local Kalman filter for RFID positioning, that is detected at irregular time intervals due to the varying train speed and RFID tag spacing, is developed to maintain high performance during GPS outage. In addition, an orthogonal projection map matching algorithm is developed to improve the performance of the proposed system. The performance of the proposed system is demonstrated with numerous simulations for a high-speed train in Korea. The simulation results are analyzed with respect to the existence of tunnel, RFID deployment spacing, RFID location uncertainty, and DGPS error.     

Mesh generation for confined fusion plasma simulation

XGC1 and M3D-C ¹ are two fusion plasma simulation codes being developed at Princeton Plasma Physics Laboratory. XGC1 uses the particle-in-cell method to simulate gyrokinetic neoclassical physics and turbulence (Chang et al. Phys Plasmas 16(5):056108, 2009; Ku et al. Nucl Fusion 49:115021, 2009; Admas et al. J Phys 180(1):012036, 2009). M3D-\(C^1\) solves the two-fluid resistive magnetohydrodynamic equations with the \(C^1\) finite elements (Jardin J comput phys 200(1):133–152, 2004; Jardin et al. J comput Phys 226(2):2146–2174, 2007; Ferraro and Jardin J comput Phys 228(20):7742–7770, 2009; Jardin J comput Phys 231(3):832–838, 2012; Jardin et al. Comput Sci Discov 5(1):014002, 2012; Ferraro et al. Sci Discov Adv Comput, 2012; Ferraro et al. International sherwood fusion theory conference, 2014). This paper presents the software tools and libraries that were combined to form the geometry and automatic meshing procedures for these codes. Specific consideration has been given to satisfy the mesh configuration and element shape quality constraints of XGC1 and M3D-\(C^1\).     

A small‐area and low‐power data driver IC using two‐stage DAC with a capacitor array for active matrix flat‐panel displays

A small‐area and low‐power data driver integrated circuit (IC) using a two‐stage digital‐to‐analog converter (DAC) with a capacitor array is proposed for active matrix flat‐panel displays. The proposed data driver IC employs a capacitor array in the two‐stage DAC so as to reduce the DAC area and eliminate the need for a resistor string, which has high‐power consumption. To verify the proposed two‐stage DAC, a 20‐channel data driver IC with the proposed 10‐bit two‐stage DAC was fabricated using a 0.18‐μm complementary metal–oxide–semiconductor process with 1.8 and 6 V complementary metal–oxide–semiconductor devices. The proposed 10‐bit two‐stage DAC occupies only 43.8% of the area of a conventional 10‐bit two‐stage DAC. The measurement results show that the differential nonlinearity and integral nonlinearity are +0.58/?0.52 least significant bit and +0.62/?0.59 least significant bit, respectively. The measured interchannel deviation of the voltage outputs is 8.8 mV, and the measured power consumption of the 20‐channel data driver IC is reduced to 7.1 mW, which is less than half of the power consumed by the conventional one.     

Alloy Design,Combinatorial Synthesis,and Microstructure–Property Relations for Low-Density Fe-Mn-Al-C Austenitic Steels

We present recent developments in the field of austenitic steels with up to 18% reduced mass density. The alloys are based on the Fe-Mn-Al-C system. Here, two steel types are addressed. The first one is a class of low-density twinning-induced plasticity or single phase austenitic TWIP (SIMPLEX) steels with 25–30 wt.% Mn and <4–5 wt.% Al or even <8 wt.% Al when naturally aged. The second one is a class of κ-carbide strengthened austenitic steels with even higher Al content. Here, κ-carbides form either at 500–600°C or even during quenching for >10 wt.% Al. Three topics are addressed in more detail, namely, the combinatorial bulk high-throughput design of a wide range of corresponding alloy variants, the development of microstructure–property relations for such steels, and their susceptibility to hydrogen embrittlement.     

Study on the flexoelectric characteristics in the sensing element of a duplex frustum pyramid

Journal of Mechanical Science and Technology - Recently, many researchers have studied to overcome some disadvantages of conventional sensing mechanisms. And the flexoelectric effect draw great...