Reliability studies of MOCVD TiSiN and EnCoRe Ta(N)/Ta

Passivated single damascene copper SiO₂ damascene lines were evaluated in combination with TiSiN and Ta(N)/Ta diffusion barriers. Leakage current, breakdown and time-dependent dielectric breakdown properties were investigated on a wafer level basis for temperatures ranging between room temperature and 150 °C. It is found that the leakage performance of the wafers with a TiSiN barrier is better at room temperature, but at 150 °C the performance levels out with Ta(N)/Ta. Time-dependent dielectric breakdown measurements at 150 °C show that the lifetime of the interconnect is higher with the selected Ta(N)/Ta barrier than for TiSiN.     

Nondestructive readout mode static induction transistor (SIT) photosensors

The nondestructive readout (NDRO) performance of two static induction transistor (SIT) photosensors, a 40×40 pixel area array and a 140-b linear array, is examined. NDRO operation in the SIT sensors is demonstrated by imaging with the area array and by examining the output waveform of the linear array. The charge lost per NDRO cycle in the linear array was 0.014% near the saturation signal level, and no charge loss could be detected at the ⩽0.5 saturation level. NDRO performance in the area array was degraded compared to the linear array, due to the larger value of the load capacitance connected to the output electrode of the SIT. NDRO operation also enables the cancellation of both the photosite reset noise and the signal nonuniformity by subtracting the first NDRO output from the following NDRO outputs, as well as the advantage of monitoring the signal state during the integration period     

Time-space method for multidimensional melting and freezing problems

In this paper, the time–space method (TSM) for multidimensional melting and solidification problems is proposed. In the proposed TSM, the timewise co-ordinate is incorporated into one of the spatial co-ordinates, thereby transforming the usual transient 2-D (or 3-D) problems into steady 3D (or 4-D) boundary-value problems. Since time integration is not necessary, the TSM has a feature that eliminates the so-called numerical instability which has been a great concern in the principal numerical methodologies in the past. That is, no error propagation in the timewise direction occurs in the TSM calculation. The TSM is applicable to almost all transient heat transfer and flow problems. The computer running time will be reduced to only 1/100th–1/1000th of the existing schemes for 2-D or 3-D problems. The sample calculations are presented for a 2-D melting problem in a square cavity and the validity of the present method is examined.     

Elevated serum lipoprotein (a) levels associated with ulcerative colitis in a young Japanese patient

Thromboembolism has been shown to play a role in the pathogenesis of inflammatory bowel disease (IBD). A possibility exists that lipoprotein (a) [Lp(a)], a newly-discovered prothrombotic factor, also participates in the development of at least some cases of IBD. Marked elevation of serum Lp(a) levels was observed in a young patient with ulcerative colitis. A biopsy specimen of the rectal mucosa showed findings compatible with ulcerative colitis, as well as small vessel thrombus occurring within the muscularis mucosa in the rectum. Serum Lp(a) levels were markedly elevated on admission (71 mg/dl), with a gradual decrease to 46 mg/dl on discharge. Moreover, serum Lp(a) levels decreased in parallel with clinical improvement. In the quiescent clinical stage, no small vessel thrombus was observed in the mucosa on follow-up colonoscopy. The association between IBD and hyper-Lp(a)-emia would be presumable but it has been, to our knowledge, previously unreported. The case reported here would be the first young patient, suggesting the presence of hyper-Lp(a)-emia and small vessel thrombus formation occurring in association with the development of ulcerative colitis.     

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首先．本人声明,此篇小文并非与本版责编LSKEI叫嚣。但是,对于Lskei所提出的“信息过载”,本人确实持有不同意见。     

Effect of pre-oxidation on reactivity of chars in steam

The effects of pre-oxidation of char from Taiheiyo coal, a non-caking bituminous coal, in the 400–550 °C temperature range on its gasification reactivity with N₂-H₂O at 0.1 MPa (steam partial pressure of 13.2 kPa) have been investigated. The pre-oxidation of char markedly enhances gasification rates at temperatures between 800 and 900 °C. Reactivity is found to parallel the burn-off level during preoxidation at low temperatures (400–430 °C), whereas at relatively high temperatures (480–550 °C), the burn-off level only affects the reactivity slightly. The amount of CO and CO₂ evolved from the preoxidized char by heat treatment is proportional to the burn-off level at low temperatures (400–430 °C), being closely related to the enhancement of the gasification reactivity in steam.     

Alteration of ryanodine receptor in the hippocampus CA1 after hemispheric cerebral ischemia

Alterations in ryanodine binding and local cerebral blood flow (LCBF) were examined at 30 minutes and 2 hours post-ischemia in the gerbil brain in order to evaluate the influence of cerebral ischemia on the intracellular channels of Ca2+-induced Ca2+ release (CICR). Severe hemispheric cerebral ischemia was induced by occluding the right common carotid artery. LCBF was measured at the end of the experiment using [14C]iodoantipyrine method, and the ryanodine binding was evaluated in vitro using [3H]ryanodine as a specific ligand for CICR channels. An autoradiographic method developed in our laboratory enabled us to determine both parameters within the same brain. A group of gerbils who underwent a sham procedure served as controls. LCBF was found to be significantly reduced in most of the cerebral regions on the occluded side at both 30 minutes as well as 2 hours post-ischemia. In contrast, a significant reduction in ryanodine binding was noted only in the hippocampus CA1 on the occluded side at 30 minutes and 2 hours after the occlusion. These findings suggest that regionally specific changes of CICR may be the cause of decreased ryanodine binding in the hippocampus CA1, and that these changes may be related to the pathophysiological mechanisms that cause this region to be particularly vulnerable to ischemia.     

In situ X-ray diffraction study of self-forming barriers from a Cu-Mn alloy in 100 nm Cu/low-k damascene interconnects using synchrotron radiation

An in situ study of self-forming barriers from a Cu-Mn alloy was performed to investigate the barrier growth using X-ray diffraction on damascene lines. The associated evolution in interconnect texture and Cu stress was also observed. The shift in Cu diffraction peak position was used to determine the change in Mn concentration and hence, estimate the thickness of the MnSi_xO_y barrier. The observed peak shift followed a log(t) behaviour and is described well by metal oxidation kinetics, following the field enhanced diffusion model. We used multiple anneal temperatures to study the activation of the formation process, demonstrating a faster barrier formation with higher ion excitation. A strong [1 1 1] Cu texture was shown to develop during the anneal in contrast to traditional PVD barrier systems. Finally, the stress in the 100 nm Cu lines was calculated, observing a large in-plane relaxation when using a self-forming barrier due to reduced confinement.     

Evaluating k-values for low-k materials after damascene integration: Method and results

This work discusses a method for measuring k-values of low-k films after integration in damascene structures. The experimental results are obtained from 90 nm ½ pitch single damascene structures on low-k materials with intrinsic k-values ranging between 2.2 and 3. The measurement technique is discussed in detail with a focus on the accuracy, limitation of the method, impact of low-k damage and applicability for smaller dimensions.