用于130nm/90nm新工艺开发的铜CMP阻挡层磨料系统(英文)

通过与实验室的CMP和集成工程师合作,采用测试系统观察两种或两种以上混合配方磨料的选择比。实验数据表明,通过改变单个化学试剂组分的浓度改变磨料的选择比效果突出,磨料配方师可以简便地修改磨料配方。这种方法的优点是,如果改变集成方法或特殊膜层,可以很快地重新优化磨料。如SiN膜取代TEOW淀积氧化物膜,对新系统可以容易地重新优化磨料。介绍了几种磨料组分浓度的去除速率和选择比。     

Nanoporous platinum counter electrodes by glancing angle deposition for dye-sensitized solar cells

We report an effective way to produce nanoporous Pt counter electrodes of dye-sensitized solar cells by the glancing-angle deposition (GLAD) technique. By controlling the orientation of the substrate relative to the incident Pt vapor flux during the deposition, nanoporous films composed of inclined nm-scale columns were produced through the self-shadowing effect. Pt counter electrodes having varied nanoporous structures were characterized for their morphological and electrochemical properties, and were subjected to device studies to establish the correlation with DSSC characteristics/performances. The results suggest that the nanoporous GLAD Pt electrodes can effectively enhance active surface areas, the catalytic ability and charge exchange at the Pt/electrolyte interface of a DSSC. As a result, the quantum efficiency, short-circuit current, and power conversion efficiency of the DSSC can be enhanced by up to 12–13% with using the nanoporous GLAD Pt counter electrodes.     

Cooperative and Opportunistic Channel Access for Vehicle to Roadside (V2R) Communications

This paper focuses on vehicle to roadside (V2R) communications in vehicular networks based on the IEEE 802.11 DCF MAC protocol. In vehicular networks, roadside units (RSUs) are typically spaced apart along the road and each vehicle can be connected to an RSU only when the vehicle is within its transmission range. Due to the high relative speed between a moving vehicle and a stationary RSU, the residence time of the vehicle within the coverage of each RSU is very short. Thus it is hard for the system to reach a steady state. With multi-hop forwarding, in which a vehicle may be connected to an RSU through relaying over other vehicles, the connection time of each V2R access may be extended. But this is at the expense of introducing wireless interference among vehicles, which may dramatically degrade the system performance. To tackle these challenges, we propose a new mechanism called Proxy-based Vehicle to RSU access (PVR) for V2R communications. This protocol is designed to exploit cooperative and opportunistic forwarding between any two distant RSUs and to emulate back-to-back transmissions within the coverage of an RSU. As a result, it can shorten the access delay by taking advantage of opportunistic forwarding and mitigate the interference problem during the short residence time within the coverage of an RSU. The simulation results show that PVR achieves excellent performance and outperforms all existing solutions for V2R communications in vehicular networks.     

Evaluation of electromagnetic loads on various design options of the ITER diagnostic upper port plug during plasma disruptions

Electromagnetic (EM) loads due to eddy current and halo current during plasma disruptions are evaluated for the ITER diagnostic upper port plug. To reduce strong EM loads acting on the port plug fixed to the vacuum vessel like a cantilever beam, three design options have been considered: removal of the diagnostic first wall, slitting of the diagnostic shield module and recess of the port plug. The main focus of the present study is to examine the efficacy of these options in terms of EM loads on the upper port plug. It is found that making slits is more effective than removing the first wall. It is also shown that the upper port plug needs to be recessed to reduce the EM load induced by halo current.     

Evaluation of fracture toughness degradation of CrMoV rotor steels based on ultrasonic nonlinearity measurements

The objective of this paper is to develop a nondestructive method for estimating the fracture toughness (K _IC) of CrMoV steels used as the rotor material of steam turbines in power plants. To achieve this objective, a number of CrMoV steel samples were heat-treated, and the fracture appearance transition temperature (FATT) was determined as a function of aging time. Nonlinear ultrasonics was employed as the theoretical basis to explain the harmonic generation in a damaged material, and the nonlinearity parameter of the second harmonic wave was the experimental measure used to be correlated to the fracture toughness of the rotor steel. The nondestructive procedure for estimating theK _IC consists of two steps. First, the correlations between the nonlinearity parameter and the FATT are sought. The FATT values are then used to estimateK _IC, using theK _IC versus excess temperature (i.e.,T-FATT) correlation that is available in the literature for CrMoV rotor steel.     

Brief Note : Improved <i>in vitro</i> embryo development of stenospermic grape by putrescine

The goal of this study was to determine the effect of putrescine, added to the culture medium, on the in vitro development of stenospermic grape (Vitis vinifera L) embryos. The cross breedings of Perlón x G.C88552 and Perlón x Argentina were used. 0 (control), 2 and 4 mM of putrescine were added to the immature seed’s culture medium. In Perlón x Argentina, 2mM of putrescine statistically increased the percentage of total embryos, direct germination, polyembryos and normal plants. In Perlón x G.C88552, only 2 mM of putrescine increased all the variables considered, eventually tripling the percentage of normal plants obtained. The results suggest that the endogenous concentration of putrescine may be a growth limiting factor. Adding putrescine to the culture medium of immature grape seeds is a legitimate resource to significantly increase the results of this technique.